Miniaturized wide-band baluns for RF applications
A wide-band balun device includes a first metallization deposited over a substrate and oriented in a first coil. The first coil extends horizontally across the substrate while maintaining a substantially flat vertical profile. A second metallization is deposited over the substrate and oriented in a second coil. The second coil is magnetically coupled to the first coil and a portion of the second coil oriented interiorly of the first coil. A third metallization is deposited over the substrate and oriented in a third coil. The third coil is magnetically coupled to the first and second coils. A first portion of the third coil is oriented interiorly of the second coil. The third coil has a balanced port connected to the third coil between second and third portions of the third coil.
1. A wide-band balun device, comprising:
a first coil formed over a substrate in a spiral configuration extending horizontally across the substrate including a constant coil spacing and maintaining a substantially flat vertical profile;
a second coil formed over the substrate coplanar with the first coil and wound together with the first coil to form a nested spiral configuration adjacent to the first coil, the second coil including a constant coil spacing and being magnetically coupled to the first coil; and
a third coil formed over the substrate coplanar with the second coil and wound together with the second coil to form a nested spiral configuration adjacent to the second coil, the third coil including a constant coil spacing and being magnetically coupled to the first and second coils.
2. The wide-band balun device of claim 1 , wherein the substrate is made with silicon, glass, or ceramic material for structural support.
3. The wide-band balun device of claim 1 , wherein the first, second, and third coils include tube structures, the tube structures including a round, square, or rectangular cross-section.
4. The wide-band balun device of claim 1 , wherein the first, second, and third coils include copper or a copper alloy material.
5. The wide-band balun device of claim 1 , wherein the first, second, and third coils are organized over the substrate as a group of two coil structures.
6. The wide-band balun device of claim 1 , wherein the first, second, and third coils are arranged over the substrate as a single integrated structure.
7. The wide-band balun device of claim 1 , wherein the first, second, and third coils extend horizontally across the substrate in a geometrical pattern.
8. The wide-band balun device of claim 1 , wherein the first, second, and third coils each have a length, the first, second, and third coils including an associated mutual inductance along the length of the coils.
9. A balun device, comprising:
a first coil formed over a substrate in a spiral configuration extending horizontally across the substrate and maintaining a substantially flat vertical profile;
a second coil formed over the substrate including a length wound at a fixed spacing with respect to a length of the first coil in a nested spiral configuration, the second coil being magnetically coupled to the first coil; and
a third coil formed over the substrate including a length wound at a fixed spacing with respect to the length of the second coil to form a nested spiral configuration, the third coil being magnetically coupled to the first and second coils.
10. The balun device of claim 9 , wherein the first, second, and third coils are organized over the substrate as a group of two coil structures.
11. The balun device of claim 9 , wherein the first, second, and third coils are arranged over the substrate as a single integrated structure.
12. The balun device of claim 9 , wherein the substrate is made with silicon, glass, or ceramic material for structural support.
13. The balun device of claim 9 , wherein the first, second, and third coils include tube structures, the tube structures including a round, square, or rectangular cross-section.
14. A balun for a semiconductor device, comprising:
a first metallization formed over a substrate and patterned as a first coil extending horizontally across the substrate in a spiral configuration;
a second metallization formed over the substrate and patterned as a second coil coplanar with the first coil and wound together with the first coil in a nested spiral configuration, the second metallization being magnetically coupled to the first metallization; and
a third metallization formed over the substrate and patterned as a third coil coplanar with the second coil and wound together with the second coil in a nested spiral configuration, the third metallization being magnetically coupled to the second metallization.
15. The balun of claim 14 , wherein the substrate is made with silicon, glass, or ceramic material for structural support.
16. The balun of claim 14 , wherein the first, second, and third coils are organized over the substrate as a group of two coil structures.
17. The balun of claim 14 , wherein the first, second, and third coils are arranged over the substrate as a single integrated structure.
18. A method of making a balun, comprising:
forming a first metallization at a first level and a second level over a substrate and patterned as a first coil extending horizontally across the substrate in a spiral configuration including a constant coil spacing;
forming a second metallization at a third level over the substrate and patterned as a second coil between the first and second levels extending horizontally in a spiral configuration including a constant coil spacing, the second metallization being magnetically coupled to the first metallization; and
forming a third metallization at a fourth level over the substrate between the first and second levels patterned as a third coil in a spiral configuration, the third metallization being magnetically coupled to the second metallization.
19. The method of claim 18 , wherein the first and second coils are arranged over the substrate as a single integrated structure.
20. The method of claim 18 , wherein the first and second coils include tube structures, the tube structures including a round, square, or rectangular cross-section.
21. The method of claim 18 , wherein the first and second coils each have a length, the first and second coils including an associated mutual inductance along the length of the coils.
22. A method of making a balun, comprising:
forming a first metallization at a first level and a second level over a substrate and patterned as a first coil;
forming a second metallization at a third level over the substrate and patterned as a second coil between the first and second levels, the second metallization magnetically coupled to the first metallization; and
forming a third metallization between the first and second levels over the substrate and patterned as a third coil, the third metallization magnetically coupled to the second metallization.
23. The method of claim 22 , further including forming the third metallization over the substrate at multiple levels.
24. The method of claim 22 , further including forming the second metallization over the substrate at multiple levels.
25. The method of claim 22 , further including forming the first and second metallizations over the substrate as a single integrated structure.