Semiconductor device and method of forming Fo-WLCSP having conductive layers and conductive vias separated by polymer layers
View Patent ↗A Fo-WLCSP has a first polymer layer formed around a semiconductor die. First conductive vias are formed through the first polymer layer around a perimeter of the semiconductor die. A first interconnect structure is formed over a first surface of the first polymer layer and electrically connected to the first conductive vias. The first interconnect structure has a second polymer layer and a plurality of second vias formed through the second polymer layer. A second interconnect structure is formed over a second surface of the first polymer layer and electrically connected to the first conductive vias. The second interconnect structure has a third polymer layer and a plurality of third vias formed through the third polymer layer. A semiconductor package can be mounted to the WLCSP in a PoP arrangement. The semiconductor package is electrically connected to the WLCSP through the first interconnect structure or second interconnect structure.
1. A semiconductor device, comprising:
a first polymer layer;
a first semiconductor die disposed over the first polymer layer;
a second polymer layer formed over the first polymer layer and first semiconductor die; and
a first conductive via formed through openings in the first polymer layer and second polymer layer.
2. The semiconductor device of claim 1 , further including:
a third polymer layer formed over the second polymer layer; and
a second conductive via formed through the third polymer layer.
3. The semiconductor device of claim 1 , further including an interconnect structure formed over the second polymer layer.
4. The semiconductor device of claim 1 , further including:
a third polymer layer formed over the second polymer layer;
a second conductive via formed through the third polymer layer; and
a conductive layer formed over the third polymer layer and electrically connected to the second conductive via.
5. The semiconductor device of claim 4 , further including a second semiconductor die disposed over the first polymer layer or third polymer layer.
6. The semiconductor device of claim 1 , further including a plurality of the first conductive vias formed around a perimeter of the first semiconductor die.
7. A semiconductor device, comprising:
a first polymer layer including a first conductive layer within the first polymer layer;
a first semiconductor die disposed over a surface of the first polymer layer opposite the first conductive layer;
a second polymer layer formed over the first polymer layer and first semiconductor die; and
a first conductive via formed through the first polymer layer and second polymer layer and coupled to the first conductive layer.
8. The semiconductor device of claim 7 , further including:
a third polymer layer formed over the second polymer layer; and
a second conductive via formed through the third polymer layer.
9. The semiconductor device of claim 7 , further including a second conductive layer formed over the second polymer layer.
10. The semiconductor device of claim 7 , further including an interconnect structure formed over the second polymer layer.
11. The semiconductor device of claim 8 , further including a second semiconductor die disposed over the first polymer layer or third polymer layer.
12. The semiconductor device of claim 7 , further including a plurality of the first conductive vias formed around a perimeter of the first semiconductor die.
13. A semiconductor device, comprising:
a first polymer layer;
a first semiconductor die disposed over the first polymer layer;
a second polymer layer formed over the first polymer layer; and
a first interconnect structure formed through openings in the first polymer layer and second polymer layer.
14. The semiconductor device of claim 13 , further including:
a third polymer layer formed over the second polymer layer; and
a conductive via formed through the third polymer layer.
15. The semiconductor device of claim 13 , further including a second interconnect structure formed over the second polymer layer.
16. The semiconductor device of claim 13 , further including:
a third polymer layer formed over the second polymer layer;
a conductive via formed through the third polymer layer; and
a conductive layer formed over the third polymer layer and electrically connected to the conductive via.
17. The semiconductor device of claim 16 , further including a second semiconductor die disposed over the first polymer layer or third polymer layer.
18. The semiconductor device of claim 13 , further including a plurality of conductive vias formed around a perimeter of the first semiconductor die.
19. A method of making a semiconductor device, comprising:
providing a first polymer layer including a first conductive layer within the first polymer layer;
disposing a first semiconductor die over a surface of the first polymer layer opposite the first conductive layer;
forming a second polymer layer over the first polymer layer and first semiconductor die; and
forming a first conductive via through openings in the first polymer layer and second polymer layer and coupled to the first conductive layer.
20. The method of claim 19 , further including:
forming a third polymer layer over the first polymer layer; and
forming a second conductive via through the third polymer layer.
21. The method of claim 19 , further including forming a second conductive layer over the second polymer layer.
22. The method of claim 19 , further including forming an interconnect structure over the second polymer layer.
23. The method of claim 19 , further including:
forming a third polymer layer over the second polymer layer;
forming a second conductive via through the third polymer layer; and
forming a second conductive layer over the third polymer layer and electrically connected to the second conductive via.
24. The method of claim 23 , further including disposing a second semiconductor die over the first polymer layer or third polymer layer.
25. The method of claim 19 , further including forming a plurality of the first conductive vias around a perimeter of the first semiconductor die.
26. A method of making a semiconductor device, comprising:
providing a first polymer layer;
disposing a first semiconductor die over the first polymer layer;
forming a second polymer layer over the first polymer layer and first semiconductor die; and
forming a first conductive via through openings in the first polymer layer and second polymer layer.
27. The method of claim 26 , further including:
forming a third polymer layer over the first polymer layer; and
forming a second conductive via through the third polymer layer.
28. The method of claim 26 , further including forming an interconnect structure over the second polymer layer.
29. The method of claim 26 , further including:
forming a third polymer layer over the second polymer layer;
forming a second conductive via through the third polymer layer; and
forming a conductive layer over the third polymer layer and electrically connected to the second conductive via.
30. The method of claim 29 , further including disposing a second semiconductor die over the first polymer layer or third polymer layer.
31. The method of claim 26 , further including forming a plurality of the first conductive vias around a perimeter of the first semiconductor die.