Patent Assignment
Reel/Frame 015290/0051
Assignment of Assignor's Interest
Recorded: 2004-04-26
Pages: 3
Assignors
NENYEI, ZSOLT
Executed: 2002-09-13
LERCH, WILFRIED
Executed: 2002-09-13
NIESS, JURGEN
Executed: 2002-09-13
GRAF, THOMAS
Executed: 2002-09-13
Assignee
STEAG RTP SYSTEMS GMBH
DAIMLERSTRASSE 10, DORNSTADT, D-89160, GERMANY
Covered Property
(1)
Method for the Removing of Adsorbed Molecules from a Chamber
Related Assignments
(11)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 25, 2002
From: NEYEI, ZSOLT; LERCH, WOLFRIED; NIESS, JURGEN; GRAF, THOMAS
To: STEAG RTP SYSTEMS
Reel/Frame 013817/0882 →
Assignment of Assignor's Interest
Mar 29, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045763/0296 →
Change of Name
Mar 29, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 045781/0177 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045763 Frame: 0296. Assignor(S) Hereby Confirms the Assignment.
May 14, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046151/0332 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046151/0462 →
Corrective Assignment to Correct the Patent Number 7,037,797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046719/0574 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →