Patent Assignment
Reel/Frame 046719/0574
Corrective Assignment to Correct the Patent Number 7,037,797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
Recorded: 2018-05-14
Pages: 7
Assignor
STEAG RTP SYSTEMS GMBH
Executed: 2001-01-05
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Properties
(13)
Optical Radiation Measurement Apparatus
Method of Measuring Electromagnetic Radiation
Patent:
6,191,392 →
Application:
09/208,955 →
Gas Driven Rotating Susceptor for Rapid Thermal Processing (Rtp) System
Method of Producing a Semiconductor Surface Covered with Fluorine
Patent:
6,566,271 →
Application:
09/671,827 →
Method and Apparatus Device for the Heat Treatment of Substrates
Patent:
6,752,625 →
Application:
09/700,577 →
Method and Apparatus for Calibrating Temperature Measurements Independent of Emissivity
Patent:
6,561,694 →
Application:
09/744,880 →
Method of measuring electromagnetic radiation
Device and Method for Measuring the Temperature of Substrates
Patent:
6,847,012 →
Application:
09/913,269 →
Apparatus and Method for the Thermal Treatment of Substrates
Patent:
6,614,005 →
Application:
09/979,646 →
Method and Apparatus for the Thermal Treatment of Substrates
Patent:
7,041,610 →
Application:
10/111,737 →
Device for Thermal Treatment of Substrates
Method for the Removing of Adsorbed Molecules from a Chamber
Apparatus and Method for Measuring the Temperature of Substrates
Related Assignments
(12)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 29, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045763/0296 →
Change of Name
Mar 29, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 045781/0177 →
Contract
Mar 29, 2018
From: INFINEON TECHNOLOGIES AG
To: STEAG RTP SYSTEMS GMBH
Reel/Frame 045770/0975 →
Change of Name
Mar 29, 2018
From: STEAG AST ELEKTRONIK GMBH
To: STEAG RTP SYSTEMS GMBH
Reel/Frame 045767/0218 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046151/0462 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045763 Frame: 0296. Assignor(S) Hereby Confirms the Assignment.
May 14, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046151/0332 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Assignment of Assignor's Interest
Jan 18, 2020
From: HAUF, MARKUS
To: STEAG RTP SYSTEMS GMBH
Reel/Frame 051551/0403 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →