IP Library › Granted Patent US 6,614,005
Granted Patent Utility PCT National Stage
US 6,614,005 · Confirmation No. 3080

Apparatus and Method for the Thermal Treatment of Substrates

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2001-12-13 ABST Abstract 1 View
2001-12-13 LET. Miscellaneous Incoming Letter 51 View
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Quick Facts
Patent No.
US 6,614,005
App. No.
09/979,646
Filed
2001-12-13
Effective Filing
2001-11-21
Granted
2003-09-02
Art Unit
3742
PTA
0 days