Patent Assignment
Reel/Frame 045767/0218
Change of Name
Recorded: 2018-03-29
Pages: 7
Assignor
STEAG AST ELEKTRONIK GMBH
Executed: 1999-05-05
Assignee
STEAG RTP SYSTEMS GMBH
DAIMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Gas Driven Rotating Susceptor for Rapid Thermal Processing (Rtp) System
Related Assignments
(10)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 29, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045763/0296 →
Change of Name
Mar 29, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 045781/0177 →
Corrective Assignment to Correct the Patent Number 7,037,797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046719/0574 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045763 Frame: 0296. Assignor(S) Hereby Confirms the Assignment.
May 14, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046151/0332 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045781 Frame: 0177. Assignor(S) Hereby Confirms the Change of Name.
May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046151/0462 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →