IP Library Granted Patent US 7,528,348
Granted Patent B2
US 7,528,348 · App. 11/021,915 · Granted May 5, 2009

Apparatus and method for measuring the temperature of substrates

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,528,348
App. No.
11/021,915
Granted
May 5, 2009
Kind
B2
Abstract

An apparatus for measuring an object temperature of an object, and including at least one heating apparatus having at least one heating element for heating an object via electromagnetic radiation. Also included is at least one first radiation detector that detects radiation coming from the object within a first field of vision, and, for determining correction parameters, a measuring device that detects the electromagnetic radiation that reaches the first field of vision from the at least one heating element up to a proportionality factor or a known intensity-dependent function.

Claims (26)

1. An apparatus for measuring an object temperature of an object, comprising:

at least one heating apparatus having at least one heating element for heating an object via electromagnetic radiation;

at least one first radiation detector that detects radiation coming from said object within a first field of vision;

for determining correction parameters, a measuring device that detects the electromagnetic radiation that reaches said first field of vision from said at least one heating element up to a proportionality factor or a known intensity-dependent function;

wherein said measuring device includes an impedance measurement of said heating elements or a thermocouple for measuring the temperature of said heating elements; and

at least one restrictor that restricts said field of vision of said radiation detector;

wherein said restrictor comprises essentially linear and stepped edges.

2. An apparatus for measuring the temperature of an object, the apparatus comprising:

at least one heating apparatus having at least one heating element for heating an object via electromagnetic radiation;

at least one first radiation detector that detects radiation coming from said object within a first field of vision;

for determining correction parameters, a measuring device that detects the electromagnetic radiation that reaches said first field of vision from said at least one heating element up to a proportionality factor or a known intensity-dependent function;

wherein said heating apparatus includes at least one filament having an at least partially helical filament structure; and

at least one restrictor that restricts said field of vision of said radiation detector;

wherein said restrictor comprises essentially linear and stepped edges.

3. An apparatus according to claim 2 , wherein a pre-determined geometrical and spectral radiation profile is achievable by the filament structure of said heating apparatus.

4. An apparatus according to claim 3 , wherein a filament of said heating apparatus includes alternating helical and non-helical filament structures.

5. An apparatus according to claim 2 , wherein said heating apparatus includes two individually controllable filaments, or wherein at least one filament has at least three electrical terminals.

6. An apparatus according to claim 2 , wherein at least one filament structure has a thickness along the filament that varies.

7. An apparatus for measuring the temperature of an object, the apparatus comprising:

at least one heating apparatus having at least one heating element for heating an object via electromagnetic radiation;

at least one first radiation detector that detects radiation coming from said object within a first field of vision; and

for determining correction parameters, a measuring device that detects the electromagnetic radiation that reaches said first field of vision from said at least one heating element up to a proportionality factor or a known intensity-dependent function;

wherein the measuring device includes a second radiation detector,

wherein said heating apparatus and a channel body are disposed relative to one another in such a way that said second radiation detector generates a signal that is free from effects of filament retaining mechanisms or other means that adversely affect the radiation temperature of said heating apparatus and

at least one restrictor that restricts said field of vision of said radiation detector;

wherein said restrictor comprises essentially linear and stepped edges.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2020
From: HAUF, MARKUS
To: STEAG RTP SYSTEMS GMBH
Reel/Frame 051551/0403 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
SECURITY INTEREST Recorded Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 7037797 PREVIOUSLY RECORDED AT REEL: 045763 FRAME: 0296. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded May 14, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046151/0332 →
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 7037797 PREVIOUSLY RECORDED AT REEL: 045781 FRAME: 0177. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046151/0462 →
CORRECTIVE ASSIGNMENT TO CORRECT THE PATENT NUMBER 7,037,797 PREVIOUSLY RECORDED AT REEL: 045781 FRAME: 0177. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded May 14, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 046719/0574 →
CHANGE OF NAME Recorded Mar 29, 2018
From: STEAG RTP SYSTEMS GMBH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 045781/0177 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 29, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045763/0296 →