IP Library › Assignment 021267/0030
Patent Assignment
Reel/Frame 021267/0030

Assignment of Assignor's Interest

Recorded: 2008-07-21 Pages: 4
Assignors
MITCHELL, ROBERT J.
Executed: 2008-07-17
VANDERBERG, BO H.
Executed: 2008-07-14
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Method and Apparatus for Measurement of Beam Angle in Ion Implantation
Patent: 7,897,944 →
Application: 12/176,748 →
Publication: US 2010/0012861
Related Assignments (5)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →