Patent Assignment
Reel/Frame 022754/0599
Assignment of Assignor's Interest
Recorded: 2009-05-29
Pages: 3
Assignors
FALTER, ERNST, LEGAL REPRESENTATIVE OF MANFRED FALTER, DECEASED
Executed: 2008-12-06
FALTER, JEANETTE, LEGAL REPRESENTATIVE OF MANFRED FALTER, DECEASED
Executed: 2008-12-06
Assignee
MATTSON THERMAL PRODUCTS GMBH
DALMLERSTRASSE 10, DORNSTADT, 89160, GERMANY
Covered Property
(1)
Apparatus for Thermally Treating Semiconductor Substrates
Related Assignments
(7)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 29, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045763/0296 →
Corrective Assignment to Correct the Patent Number 7037797 Previously Recorded at Reel: 045763 Frame: 0296. Assignor(S) Hereby Confirms the Assignment.
May 14, 2018
From: MATTSON THERMAL PRODUCTS GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 046151/0332 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
Reel/Frame 055370/0755 →
Assignment of Assignor's Interest
Feb 23, 2021
From: MATTSON THERMAL PRODUCTS, GMBH
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055368/0987 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →