Apparatus for thermally treating semiconductor substrates
View Patent ↗An apparatus for thermally treating semiconductor substrates has a processing space which is defined by first walls substantially parallel to the semiconductor substrate and a second side wall connected to the first walls; a substrate holding device disposed in the processing space which defines a substrate retaining region for a semiconductor substrate in the processing space; and heating elements which are disposed in the processing space between at least one of the first walls and the substrate retaining region. The thermal gradient between the edge of the semiconductor substrate and the center of the semiconductor substrate can be effectively compensated by providing a shutter between the substrate retaining region and the heating elements which limits the radiation emitted in the processing space by the heating elements in the direction of the substrate retaining region.
1. An apparatus for thermally treating a substrate, the substrate defining a central region, an outer region, and an outer contour, the apparatus comprising:
a pair of first substantially planar walls in spaced parallel relation and arranged substantially parallel to the substrate and a second wall connected to the first substantially planar walls, the pair of first substantially planar walls and second wall defining a processing space;
a substrate holding device located within the processing space, the substrate holding device defining a substrate retaining region;
a heating element located in the processing space between one of the first substantially planar walls and the substrate retaining region;
a shutter located between the substrate retaining region and the heating element, the shutter configured to limit radiation emitted by the heating element in the direction of the substrate retaining region, the shutter comprising an aperture having a contour that corresponds to the outer contour of the substrate, the shutter further comprising a chamfer facing the substrate retaining region;
wherein the second wall comprises a wall section located between the substrate retaining region and the shutter, the wall section having a reflective surface facing the substrate retaining region, the reflective surface configured to reflect radiation emitted by the substrate.
2. The apparatus of claim 1 , wherein the shutter is connected to the second wall and projects from the second wall into the processing space.
3. The apparatus of claim 1 , wherein the apparatus further comprises a second shutter.
4. The apparatus of claim 1 , wherein the shutter comprises a round aperture.
5. The apparatus of claim 1 , wherein the shutter has a reflective surface facing the substrate retaining region, the reflective surface configured to reflect radiation emitted from the outer region of the substrate back to the outer region of the substrate.
6. The apparatus of claim 1 , wherein the shutter is impermeable to radiation emitted by the heating element.
7. The apparatus of claim 1 , wherein the processing space defines a circumferential processing region extending between the shutter and the substrate retaining region, wherein the circumferential processing region is shielded from radiation emitted from the heating element.
8. The apparatus of claim 1 , wherein the wall section is at least partially shielded from radiation emitted from the heating element.
9. The apparatus of claim 1 , wherein the shutter has a circumferential reflective surface facing the substrate retaining region.
10. The apparatus of claim 9 , wherein the circumferential reflective surface comprises diffuse reflection characteristics for radiation having wavelengths from 500 nm to 3000 nm.
11. The apparatus of claim 1 , wherein the pair of opposing first substantially planar walls and the second wall comprise a reflective layer which diffusely reflects radiation having wavelengths from 500 nm to 3000 nm.
12. The apparatus of claim 1 , wherein the shutter is formed from aluminum.
13. The apparatus of claim 1 , wherein the heating element is a halogen lamp or an arc lamp.
14. The apparatus of claim 13 , wherein the heating element is a rod lamp arranged substantially parallel to the first substantially planar walls.
15. The apparatus of claim 1 , wherein the apparatus comprises heating elements located above the substrate retaining region and below the substrate retaining region.
16. The apparatus of claim 1 , wherein the substrate holding device is rotatable in the processing space.
17. The apparatus of claim 1 , wherein the wall section surrounds the substrate in at least a partially circular manner.
18. The apparatus of claim 1 , wherein the wall section comprises a cross-sectional surface having an outer contour that is substantially parallel to an outer contour of the substrate.
19. The apparatus of claim 1 , wherein the distance between the substrate and the wall section is 70% to 130% of the distance between the substrate and one of the first substantially planar walls.
20. The apparatus of claim 1 , wherein the shutter is movable so that the distance between the shutter and the substrate retaining region is adjustable.
21. The apparatus of claim 1 , wherein the shutter comprises a cooling system.
22. The apparatus of claim 1 , wherein the apparatus further comprises a quartz plate located between the substrate retaining region and the heating element.