IP Library Patent Application 09809670
Patent Application Utility
App. No. 09/809,670 · Confirmation No. 5416

BARRIER-METAL-FREE COPPER DAMASCENE TECHNOLOGY USING ATOMIC HYDROGEN ENHANCED REFLOW

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2004-01-09 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-10-24 LET. Miscellaneous Incoming Letter 2 View
2003-10-24 DRW Drawings-only black and white line drawings 4 View
2001-03-15 TRNA Transmittal of New Application 3 View
2001-03-15 SPEC Specification 13 View
2001-03-15 CLM Claims 15 View
2001-03-15 ABST Abstract 1 View
2001-03-15 DRW Drawings-only black and white line drawings 3 View
2001-03-15 OATH Oath or Declaration filed 7 View
2001-03-15 TRNA Transmittal of New Application 3 View
2001-03-15 SPEC Specification 13 View
2001-03-15 CLM Claims 15 View
2001-03-15 ABST Abstract 1 View
2001-03-15 DRW Drawings-only black and white line drawings 3 View
2001-03-15 OATH Oath or Declaration filed 7 View
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Quick Facts
App. No.
09/809,670
Filed
2001-03-15
Granted
2004-02-24
Pub. No.
US20020132474A1
Art Unit
2825
PTA
-202 days