IP Library Patent Application 10122870
Patent Application Utility
App. No. 10/122,870 · Confirmation No. 6175

BARRIER-METAL-FREE COPPER DAMASCENE TECHNOLOGY USING ATOMIC HYDROGEN ENHANCED REFLOW

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-05-26 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-03-12 NOA Notice of Allowance and Fees Due (PTOL-85) 29 View
2004-03-12 892 List of references cited by examiner 1 View
2004-03-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-12 FWCLM Index of Claims 1 View
2004-03-12 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-23 WFEE Fee Worksheet (SB06) 1 View
2004-02-02 RCEX Request for Continued Examination (RCE) 1 View
2004-01-27 CTAV Advisory Action (PTOL-303) 3 View
2004-01-15 FWCLM Index of Claims 1 View
2004-01-15 WFEE Fee Worksheet (SB06) 1 View
2003-12-29 A.NE Response After Final Action 1 View
2003-12-29 CLM Claims 26 View
2003-12-29 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2003-12-29 LET. Miscellaneous Incoming Letter 2 View
2003-10-01 CTFR Final Rejection 21 View
2003-10-01 1449 List of References cited by applicant and considered by examiner 1 View
2003-07-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-07-10 CLM Claims 1 View
2003-07-10 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2003-07-10 CLM Claims 19 View
2003-07-10 DRW Drawings-only black and white line drawings 1 View
2003-07-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-07-10 LET. Miscellaneous Incoming Letter 2 View
2003-04-10 CTNF Non-Final Rejection 17 View
2003-04-10 892 List of references cited by examiner 1 View
2003-04-10 1449 List of References cited by applicant and considered by examiner 3 View
2003-04-01 SRNT Examiner's search strategy and results 2 View
2002-04-15 TRNA Transmittal of New Application 2 View
2002-04-15 ADS Application Data Sheet 3 View
2002-04-15 A.PE Preliminary Amendment 48 View
2002-04-15 SPEC Specification 13 View
2002-04-15 CLM Claims 15 View
2002-04-15 ABST Abstract 1 View
2002-04-15 DRW Drawings-only black and white line drawings 3 View
2002-04-15 OATH Oath or Declaration filed 8 View
2002-04-15 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-04-15 SRFW Search information including classification, databases and other search related notes 1 View
2002-04-15 FWCLM Index of Claims 1 View
2002-04-15 TRNA Transmittal of New Application 2 View
2002-04-15 DRW Drawings-only black and white line drawings 7 View
2002-04-15 SPEC Specification 13 View
2002-04-15 CLM Claims 15 View
2002-04-15 ABST Abstract 1 View
2002-04-15 OATH Oath or Declaration filed 7 View
2002-04-15 WFEE Fee Worksheet (SB06) 1 View
2002-04-15 WFEE Fee Worksheet (SB06) 1 View
2002-04-15 WCLM Claims Worksheet (PTO-2022) 2 View
2002-04-15 ADS Application Data Sheet 3 View
2002-04-15 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-04-15 A.PE Preliminary Amendment 1 View
2002-04-15 SPEC Specification 1 View
2002-04-15 CLM Claims 42 View
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Quick Facts
App. No.
10/122,870
Filed
2002-04-15
Granted
2004-07-13
Pub. No.
US20020130419A1
Art Unit
2825
PTA
-32 days