IP Library › Granted Patent US 6,479,373
Granted Patent Utility
US 6,479,373 · Confirmation No. 2818

METHOD OF STRUCTURING LAYERS WITH A POLYSILICON LAYER AND AN OVERLYING METAL OR METAL SILICIDE LAYER USING A THREE STEP ETCHING PROCESS WITH FLUORINE, CHLORINE, BROMINE CONTAINING GASES

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 Code Description Pages PDF
2001-06-19 TRNA Transmittal of New Application 1 View
2001-06-19 A.PE Preliminary Amendment 4 View
2001-06-19 SPEC Specification 43 View
2001-06-19 CLM Claims 9 View
2001-06-19 ABST Abstract 1 View
2001-06-19 DRW Drawings-only black and white line drawings 7 View
2001-06-19 OATH Oath or Declaration filed 3 View
2001-06-19 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,479,373
App. No.
09/884,188
Filed
2001-06-19
Granted
2002-11-12
Pub. No.
US20020016044A1
Art Unit
2813
PTA
-100 days