Granted Patent
Utility
US 6,656,798
· Confirmation No. 4220
GATE PROCESSING METHOD WITH REDUCED GATE OXIDE CORNER AND EDGE THINNING
Inventors
Helmut Tews
Unterhaching, DE
Oleg Gluschenkov
Wappingers Falls, NY
Mary Weybright
Pleasant Valley, NY
Attorneys & Agents of Record
Classification
USPC
438/270
H10D64/691
H10D84/0151
H10D64/516
H10D84/038
H10W10/014
H10W10/17
H10D64/01352
Prosecution
- Examiner
- HUYNH, ANDY
- Art Unit
- 2818
- Docket No.
- 01 P 17651 US (8055-64)
- Confirmation No.
- 4220
Publication
- Pub. No.
- US20030067035A1
- Pub. Date
- 2003-04-10
Patent Term Adjustment
-28days
No related applications found.
RELEASE OF SECURITY INTEREST
Recorded 2021-05-12
RELEASE OF SECURITY INTEREST
Recorded 2020-11-20
from
GLOBALFOUNDRIES INC.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-11-02
from
GLOBALFOUNDRIES INC.
SECURITY AGREEMENT
Recorded 2018-11-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-12-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-05
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-03
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-09-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-14
from
TEWS, HELMUT
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-11-28
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Quick Facts
- Patent No.
- US 6,656,798
- App. No.
- 09/965,919
- Filed
- 2001-09-28
- Granted
- 2003-12-02
- Pub. No.
- US20030067035A1
- Examiner
- HUYNH, ANDY
- Art Unit
- 2818
- PTA
- -28 days
External Links