IP Library Granted Patent US 6,689,666
Granted Patent Utility
US 6,689,666 · Confirmation No. 4070

REPLACING A FIRST LINER LAYER WITH A THICKER OXIDE LAYER WHEN FORMING A SEMICONDUCTOR DEVICE

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2007-06-05 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2003-12-18 IFEE Issue Fee Payment (PTO-85B) 3 View
2002-04-19 TRNA Transmittal of New Application 4 View
2002-04-19 SPEC Specification 10 View
2002-04-19 CLM Claims 3 View
2002-04-19 ABST Abstract 1 View
2002-04-19 DRW Drawings-only black and white line drawings 7 View
2002-04-19 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,689,666
App. No.
10/126,841
Filed
2002-04-19
Granted
2004-02-10
Art Unit
2812
PTA
-1 days