Sonic-energy cleaner system with gasified fluid
View Patent ↗In accordance with one embodiment there is provided a method of improving the performance of a substrate cleaner of the type having a megasonic probe with a probe shaft extending generally parallel to a surface of a rotating substrate, and at least one dispenser for applying a cleaning liquid onto the surface of the substrate, wherein the megasonic probe agitates the liquid on the surface. The method comprising dissolving gas in the liquid before the liquid reaches the dispenser. In accordance with another embodiment, an apparatus for cleaning substrates comprises a rotary fixture which is adapted to support a substrate and rotate the substrate about a first axis, a probe having a probe shaft extending generally parallel to a surface of the substrate, and a megasonic transducer in acoustically coupled relation to the probe. The apparatus further comprises at least one dispenser that applies a cleaning liquid drawn from a cleaning liquid supply onto a surface of the substrate, and a gasifier operatively associated with the cleaning liquid supply. The gasifier causes gas to dissolve in the cleaning liquid.
1. An apparatus for processing a substrate, said apparatus comprising:
a support for supporting the substrate in a substantially horizontal orientation;
a first source for applying a film of liquid to one side of the substrate while on said support in said orientation;
a solid transmitter having an elongated portion in contact with the film of liquid to apply sonic energy to the substrate, the transmitter being acoustically coupled to a megasonic transducer; and
means for dissolving gas into said liquid.
2. The apparatus of claim 1 wherein said gasifier comprises a membrane contactor.
3. The apparatus of claim 1 wherein said transmitter is positioned on said one side of said substrate, said transmitter configured to apply sonic energy to said substrate through said film of liquid and dissolved gas applied by said first source.
4. The apparatus of claim 1 further comprising a second source for applying a film of liquid to an opposite side of the substrate while on said support in said orientation, wherein said means for dissolving is configured to dissolve said gas into said liquid applied by at least one of said first or second sources.
5. The apparatus of claim 4 wherein said transmitter is configured to apply said sonic energy to the substrate through one of said films and through the substrate to the other of said films to loosen particles on both sides of said substrate simultaneously.
6. The apparatus of claim 5 wherein said transmitter is positioned on one of said sides of the substrate so that the transmitter applies sonic energy to the substrate through one of said films of said liquid that comprises a dissolved gas.
7. The apparatus of claim 1 wherein said gas comprises a nonreactive gas.
8. The apparatus of claim 7 wherein said nonreactive gas is selected from a group consisting of air and nitrogen.
9. The apparatus of claim 1 wherein said liquid comprises ultra-pure water.
10. The apparatus of claim 1 wherein said liquid comprises ultra-pure water which is degassed prior to dissolving said gas in said liquid.
11. The apparatus of claim 1 wherein said transmitter comprises a probe.
12. The apparatus of claim 11 wherein said probe comprises a probe shaft configured to extend generally parallel to the substrate when applying sonic energy to the substrate.
13. The apparatus of claim 1 wherein said support comprises a rotary fixture.
14. The apparatus of claim 1 wherein said gas is a reactive gas.
15. The apparatus of claim 1 further comprising:
a second source for applying a film of liquid to an opposite side of the substrate while on said support in said orientation;
wherein said transmitter is positioned on said one side of the substrate, said transmitter configured to apply sonic energy to said substrate through said film of liquid and dissolved gas applied by said first source;
wherein said transmitter is configured to apply said sonic energy to said substrate with sufficient power so tat said sonic energy is transmitted through said film applied by said first source and through the substrate to said film applied by said second source to loosen particles on both sides of the substrate simultaneously;
wherein said gas comprises a nonreactive gas; wherein said liquid comprises a cleaning liquid;
wherein said transmitter comprises a probe shaft configured to extend generally parallel to the substrate when applying sonic energy to the substrate; and
wherein said support comprises a rotary fixture.