Method and apparatus to improve plasma etch uniformity
View Patent ↗The present invention provides a method and an apparatus for improving the etch uniformity across a substrate during a plasma etch process that employs the use of an inductively coupled plasma helical inductor. The plasma apparatus comprising a vacuum chamber, a support member in the vacuum chamber for holding the substrate, an etchant gas supply for providing an etchant gas to the vacuum chamber, an exhaust in fluid communication with the vacuum chamber, an RF power source and a helical inductor disposed around or near a portion of the vacuum chamber. A sensor is provided for measuring a process attribute to generate a signal to a controller that then controls a mechanism that varies the position of the helical inductor so that the uniformity of the plasma etch is improved.
1. A method for improving plasma uniformity in a plasma etching process, the method comprising:
placing a substrate in a vacuum chamber, said vacuum chamber having a reactor wall;
subjecting the substrate to an inductively coupled plasma etch process within said vacuum chamber;
mechanically adjusting the position of a mechanically adjustable helical inductor in an “X” direction and in a “Y” direction relative to said reactor wall through a mechanism, said mechanism being attached to said mechanically adjustable helical inductor; and
removing the substrate from the vacuum chamber.
2. The method of claim 1 wherein said helical inductor is adjusted in an angular tilt translation relative to said reactor wall by said mechanism.
3. A method for improving plasma uniformity in a plasma etching process, the method comprising:
placing a substrate in a vacuum chamber, said vacuum chamber having a reactor wall;
subjecting the substrate to an inductively coupled plasma etch process within said vacuum chamber;
measuring a process attribute;
mechanically adjusting the position of a mechanically adjustable helical inductor in an “X” direction and in a “Y” direction relative to said reactor wall through a mechanism, said mechanism being attached to said mechanically adjustable helical inductor, said adjustment of said mechanically adjustable helical inductor being based on said measuring step; and
removing the substrate from the vacuum chamber.
4. The method of claim 3 wherein said process attribute is a plasma condition.
5. The method of claim 4 wherein said plasma condition is a plasma emission.
6. The method of 4 wherein said plasma condition is a spatial condition.
7. The method of claim 3 wherein said process attribute is a substrate measurement.
8. The method of claim 7 wherein said substrate measurement is a topographical measurement.
9. The method of claim 8 wherein said topographical measurement is a laser reflectance measurement.
10. The method of claim 7 wherein said substrate measurement is a thermal measurement.
11. The method of claim 7 wherein said substrate measurement is an electrical measurement.
12. The method of claim 7 wherein said substrate measurement is an optical measurement.