Semiconductor device and method of forming conductive posts and heat sink over semiconductor die using leadframe
A semiconductor device has a prefabricated multi-die leadframe with a base and integrated raised die paddle and a plurality of bodies extending from the base. A thermal interface layer is formed over a back surface of a semiconductor die or top surface of the raised die paddle. The semiconductor die is mounted over the raised die paddle between the bodies of the leadframe with the TIM disposed between the die and raised die paddle. An encapsulant is deposited over the leadframe and semiconductor die. Vias can be formed in the encapsulant. An interconnect structure is formed over the leadframe, semiconductor die, and encapsulant, including into the vias. The base is removed to separate the bodies from the raised die paddle. The raised die paddle provides heat dissipation for the semiconductor die. The bodies are electrically connected to the interconnect structure. The bodies operate as conductive posts for electrical interconnect.
1. A method of making a semiconductor device, comprising:
providing a substrate including a raised die area extending from a surface of the substrate and a plurality of conductive bodies comprising a height greater than a height of the raised die area;
disposing a semiconductor die over the raised die area between the conductive bodies of the substrate;
depositing an encapsulant over the substrate and a surface of the semiconductor die opposite the raised die area;
forming an interconnect structure over the encapsulant;
removing a portion of the substrate to separate the conductive bodies from the raised die area; and
singulating through the encapsulant.
2. The method of claim 1 , wherein the raised die area provides heat dissipation for the semiconductor die.
3. The method of claim 1 , further including disposing a thermal interface material between the semiconductor die and raised die area.
4. The method of claim 1 , further including forming a plurality of bumps over the semiconductor die.
5. The method of claim 1 , further including:
forming a plurality of vias in the encapsulant extending to the conductive bodies; and
forming a conductive layer over the encapsulant and into the vias.
6. The method of claim 1 , further including planarizing the encapsulant to the conductive bodies.
7. A method of making a semiconductor device, comprising:
providing a substrate including a raised die area extending from a surface of the substrate and a plurality of conductive posts comprising a height greater than a height of the raised die area;
disposing a semiconductor die over the raised die area;
depositing an encapsulant over and around the semiconductor die and conductive posts;
forming a plurality of vias in the encapsulant over the conductive posts; and
forming a conductive layer over the encapsulant and extending into the vias.
8. The method of claim 7 , further including forming an interconnect structure over the semiconductor die.
9. The method of claim 7 , wherein the raised die area provides heat dissipation for the semiconductor die.
10. The method of claim 7 , further including disposing a thermal interface material between the semiconductor die and raised die area.
11. The method of claim 7 , further including forming a plurality of bumps over the semiconductor die.
12. The method of claim 7 , further including removing a portion of the substrate to separate the raised die area from the conductive posts.
13. A semiconductor device, comprising:
a die support;
a semiconductor die disposed over the die support and electrically isolated from the die support;
an encapsulant deposited over the semiconductor die including along a sidewall of the die support;
an interconnect structure formed over the encapsulant and semiconductor die; and
a conductive post extending from the interconnect structure to a first surface of the encapsulant opposite the interconnect structure.
14. The semiconductor device of claim 13 , wherein the die support provides heat dissipation for the semiconductor die.
15. The semiconductor device of claim 13 , further including a thermal interface material disposed between the semiconductor die and die support.
16. The semiconductor device of claim 13 , further including a plurality of bumps formed over the semiconductor die.
17. The semiconductor device of claim 13 , wherein the interconnect structure includes a conductive layer.
18. The semiconductor device of claim 13 , wherein a second surface of the encapsulant opposite the first surface of the encapsulant is planar with the conductive post.
19. The semiconductor device of claim 13 , wherein the interconnect structure extends into a via formed in the encapsulant over the conductive post.
20. A semiconductor device, comprising:
a die support;
a semiconductor die disposed over a raised surface of the die support;
a conductive post extending above the raised surface of the die support and disposed adjacent to the semiconductor die; and
an encapsulant deposited over a surface of the semiconductor die opposite the die support and along a sidewall of the die support.
21. The semiconductor device of claim 20 , further including a substrate disposed over the semiconductor die, wherein the die support and conductive post extend from a surface of the substrate.
22. The semiconductor device of claim 20 , further including an interconnect structure formed over the encapsulant.
23. The semiconductor device of claim 20 , wherein the die support provides heat dissipation for the semiconductor die.
24. The semiconductor device of claim 20 , further including a thermal interface material disposed between the semiconductor die and die support.
25. The semiconductor device of claim 20 , further including a plurality of bumps formed over the semiconductor die.
26. The semiconductor device of claim 20 , wherein the die support is electrically isolated from semiconductor die and conductive post.