Semiconductor device and method of simultaneous molding and thermalcompression bonding
View Patent ↗A semiconductor device has a semiconductor die disposed over a substrate. The semiconductor die and substrate are placed in a chase mold. An encapsulant is deposited over and between the semiconductor die and substrate simultaneous with bonding the semiconductor die to the substrate in the chase mold. The semiconductor die is bonded to the substrate using thermocompression by application of force and elevated temperature. An electrical interconnect structure, such as a bump, pillar bump, or stud bump, is formed over the semiconductor die. A flux material is deposited over the interconnect structure. A solder paste or SOP is deposited over a conductive layer of the substrate. The flux material and SOP provide temporary bond between the semiconductor die and substrate. The interconnect structure is bonded to the SOP. Alternatively, the interconnect structure can be bonded directly to the conductive layer of the substrate, with or without the flux material.
1. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a semiconductor die over the substrate;
forming an interconnect structure over the semiconductor die; and
simultaneously depositing an encapsulant around the semiconductor die and over the substrate and reflowing the interconnect structure.
2. The method of claim 1 , further including bonding the semiconductor die to the substrate using thermocompression.
3. The method of claim 1 , wherein reflowing the interconnect structure bonds the semiconductor die to the substrate.
4. The method of claim 3 , wherein the interconnect structure includes a bump, pillar bump, or stud bump.
5. The method of claim 3 , further including depositing a flux material over the interconnect structure of the semiconductor die.
6. The method of claim 3 , further including:
depositing a conductive bonding material over the substrate; and
bonding the interconnect structure to the conductive bonding material.
7. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a semiconductor die over the substrate; and
depositing an encapsulant between the semiconductor die and substrate while applying heat to bond the semiconductor die to the substrate.
8. The method of claim 7 , further including bonding the semiconductor die to the substrate using thermocompression.
9. The method of claim 7 , further including forming an electrical interconnect structure over the semiconductor die.
10. The method of claim 9 , wherein the electrical interconnect structure includes a bump, pillar bump, or stud bump.
11. The method of claim 9 , further including depositing a flux material over the electrical interconnect structure of the semiconductor die.
12. The method of claim 9 , further including:
depositing a conductive bonding material over the substrate; and
bonding the electrical interconnect structure to the conductive bonding material.
13. The method of claim 7 , further including:
providing a chase mold;
placing the semiconductor die and substrate in the chase mold;
depositing the encapsulant between the semiconductor die and substrate in the chase mold; and
bonding the semiconductor die to the substrate in the chase mold.
14. A method of making semiconductor device, comprising:
providing a substrate;
mounting a semiconductor die over the substrate;
disposing the mounted semiconductor die and substrate in a chase mold; and
depositing an encapsulant within the chase mold over the mounted semiconductor die and substrate simultaneously with bonding the mounted semiconductor die to the substrate.
15. The method of claim 14 , wherein bonding the mounted semiconductor die further includes thermocompression bonding the mounted semiconductor die to the substrate.
16. The method of claim 14 , further including forming an electrical interconnect structure over the semiconductor die.
17. The method of claim 16 , wherein the electrical interconnect structure includes a bump, pillar bump, or stud bump.
18. The method of claim 16 , further including depositing a flux material over the electrical interconnect structure of the semiconductor die.
19. The method of claim 16 , further including depositing a conductive bonding material paste over the substrate, wherein the electrical interconnect structure is bonded to the conductive bonding material.
20. A method of making a semiconductor device, comprising:
providing a substrate;
mounting a semiconductor die over the substrate; and
depositing an encapsulant between the semiconductor die and substrate after mounting the semiconductor die and while bonding the semiconductor die to the substrate.
21. The method of claim 20 , further including bonding the semiconductor die to the substrate using thermocompression.
22. The method of claim 20 , further including forming an interconnect structure over the semiconductor die.
23. The method of claim 22 , further including depositing a flux material over the interconnect structure of the semiconductor die.
24. The method of claim 20 , further including depositing a conductive bonding material over the substrate.