IP Library › Granted Patent US 10,026,888
Granted Patent B2
US 10,026,888 · App. 14/639,430 · Granted Jul 17, 2018

Magnetoresistive effect element and magnetic memory

Inventors: Takao Ochiai (Funabashi Chiba, JP); Eiji Kitagawa (Yokohama Kanagawa, JP); Kenji Noma (Yokohama Kanagawa, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L43/08H01L43/10H01L27/228
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Quick Facts
Patent No.
US 10,026,888
App. No.
14/639,430
Granted
Jul 17, 2018
Kind
B2
Abstract

According to one embodiment, a magnetoresistive effect element includes: a first magnetic layer; a second magnetic layer; a non-magnetic film between the first magnetic layer and the second magnetic layer; a first layer on an opposite side of a side of the non-magnetic layer of the first magnetic layer, the first layer including magnesium oxide as a principal component; and a second layer between the first film and the first magnetic layer, the second layer including a material different from a material of the first layer.

Claims (20)

1. A magnetoresistive effect element comprising:

a substrate;

a pinned layer above the substrate;

a free layer between the substrate and the pinned layer;

a non-magnetic layer between the free layer and the pinned layer;

a first layer on an opposite side of a side of the non-magnetic layer of the free layer, the first layer being between the free layer and the substrate, the first layer including magnesium oxide as a principal component, and the first layer being non-magnetic;

a second layer formed of one layer selected from the group consisting of a metal layer and a compound layer inserted between the first layer and the free layer, the second layer being in direct contact with the first layer and the free layer, and the second layer being non-magnetic; and

a third layer between the first layer and the substrate, the third layer being in contact with the substrate.

2. The element according to claim 1 , wherein a surface smoothness of the second layer is higher than a surface smoothness of the first layer.

3. The element according to claim 1 , wherein the metal layer is a layer having at least one element selected from a group consisting of niobium, hafnium, tantalum, ruthenium, and tungsten as the principal component.

4. The element according to claim 1 , wherein the compound layer is a layer selected from a group consisting of a titanium nitride layer, a tantalum nitride layer, a lead doped indium oxide layer, and a zinc oxide layer.

5. The element according to claim 1 , wherein the compound layer includes a magnesium oxide layer including impurities.

6. The element according to claim 5 , wherein the second layer is a layer including a plurality of crystal grains of 5 nm or less and the second layer is a (001)-oriented layer.

7. The element according to claim 1 , wherein a thickness of the second layer is 0.5 nm or less.

8. The element according to claim 1 , wherein the free layer includes a layer having at least two elements selected from a group including iron, cobalt, and boron as the principal components.

9. The element according to claim 1 , wherein the free and pinned layers have perpendicular magnetic anisotropy.

10. The element according to claim 1 , wherein a direction of magnetization of the free layer is variable and the direction of the magnetization of the pinned layer is invariable.

11. The element according to claim 1 , wherein the non-magnetic layer is a layer having magnesium oxide as the principal component.

12. A magnetic memory comprising:

a memory cell including the magnetoresistive effect element according to claim 1 .

Assignments (5)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 3, 2017
From: KABUSHIKI KAISHA TOSHIBA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 043191/0052 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 5, 2015
From: OCHIAI, TAKAO; KITAGAWA, EIJI; NOMA, KENJI
To: KABUSHIKI KAISHA TOSHIBA
Reel/Frame 035097/0064 →
Continuity (2)
Provisional Application 62034038 · Aug 6, 2014
Related Publication 20160043305A1 · Feb 11, 2016
Cited By (7)
US 12,201,034 US 12,284,811 US 12,310,251 US 12,329,038 US 12,356,866 US 12,501,837 US 12,520,499