FinFET devices
FinFET devices and processes to prevent fin or gate collapse (e.g., flopover) in finFET devices are provided. The method includes forming a first set of trenches in a semiconductor material and filling the first set of trenches with insulator material. The method further includes forming a second set of trenches in the semiconductor material, alternating with the first set of trenches that are filled. The second set of trenches form semiconductor structures which have a dimension of fin structures. The method further includes filling the second set of trenches with insulator material. The method further includes recessing the insulator material within the first set of trenches and the second set of trenches to form the fin structures.
1. A method, comprising:
forming a first trench in a semiconductor material;
forming a first liner on sidewalls of the first trench;
forming a first epitaxial growth at a base of the first trench;
forming a first insulator material on the first epitaxial growth;
forming a second trench in the semiconductor material, the first trench and the second trench defining a feature in the semiconductor material;
forming a second liner on sidewalls of the second trench;
forming a second epitaxial growth at a base of the second trench; and
forming a second insulator material on the second epitaxial growth.
2. The method of claim 1 , wherein the first epitaxial growth is between portions of the first liner.
3. The method of claim 2 , wherein the second epitaxial growth is between portions of the second liner.
4. The method of claim 1 , wherein the first epitaxial growth is an in-situ doped material.
5. The method of claim 4 , wherein the second epitaxial growth is an in-situ doped material.
6. The method of claim 1 , wherein the first insulator material is between portions of the first liner.
7. The method of claim 6 , wherein the second insulator material is between portions of the second liner.
8. A semiconductor structure, comprising:
a feature defined by a first trench and a second trench in a semiconductor material;
a first liner, a first epitaxial growth, and a first insulator material in the first trench; and
a second liner, a second epitaxial growth, and a second insulator material in the second trench.
9. The semiconductor structure of claim 8 , wherein:
the first liner is on sidewalls of the first trench; and
the second liner is on sidewalls of the second trench.
10. The semiconductor structure of claim 9 , wherein:
the first epitaxial growth is at a base of the first trench between portions of the first liner; and
the second epitaxial growth is at a base of the second trench between portions of the second liner.
11. The semiconductor structure of claim 8 , wherein:
the first epitaxial growth is at a base of the first trench between portions of the first liner; and
the second epitaxial growth is at a base of the second trench between portions of the second liner.