IP Library › Granted Patent US 12,442,069
Granted Patent B2
US 12,442,069 · App. 16/368,748 · Granted Oct 14, 2025

Thin film deposition apparatus

Inventors: Hyun-Sook Park (Yongin-si, KR); Chang-Mog Jo (Yongin-si, KR); Hee-Cheol Kang (Yongin-si, KR); Yun-Mi Lee (Yongin-si, KR); Un-Cheol Sung (Yongin-si, KR); Yong-Sup Choi (Yongin-si, KR); Jong-Heon Kim (Yongin-si, KR); Jae-Kwang Ryu (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
C23C14/24C23C14/042H10K71/164
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Quick Facts
Patent No.
US 12,442,069
App. No.
16/368,748
Granted
Oct 14, 2025
Kind
B2
Abstract

A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.

Claims (11)

1. A thin film deposition apparatus for forming a thin film on a substrate, the apparatus comprising:

a deposition source that discharges a deposition material;

a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction;

a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a row in a second direction that is perpendicular to the first direction;

a frame in which the patterning slit sheet is disposed; and

a connection member which connects the deposition source, the deposition source nozzle unit, and the frame, the connection member extending at an oblique angle from a region of the deposition source nozzle unit that is spaced apart from the plurality of deposition source nozzles in the second direction to a region of the patterning slit sheet that is spaced apart from the plurality of patterning slits in the second direction,

wherein a deposition is performed while one of the substrate and the thin film deposition apparatus moves relative to the other one of the substrate and the thin film deposition apparatus in the first direction,

wherein the plurality of deposition source nozzles protrude from an upper surface of the deposition source nozzle unit toward the patterning slit sheet,

wherein the connecting member is connected to an edge of the deposition source nozzle unit and an edge of the frame, and

wherein each of the patterning slits is elongated in the first direction so as to overlap the plurality of deposition source nozzles.

2. The thin film deposition apparatus of claim 1 , wherein the connection member directly contacts the deposition source nozzle unit.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2019
From: PARK, HYUN-SOOK; JO, CHANG-MOG; KANG, HEE-CHEOL; LEE, YUN-MI; SUNG, UN-CHEOL; CHOI, YONG-SUP; KIM, JONG-HEON; RYU, JAE-KWANG
To: SAMSUNG MOBILE DISPLAY CO., LTD.
Reel/Frame 049011/0297 →
MERGER Recorded Apr 26, 2019
From: SAMSUNG MOBILE DISPLAY CO., LTD.
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 049015/0094 →
Priority Claims (1)
KR 10-2010-0002381 · Jan 11, 2010 · national
Continuity (3)
Continuation 15145689 · May 3, 2016
Division 12979656 · Dec 28, 2010
Related Publication 20190226078A1 · Jul 25, 2019
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