IP Library Granted Patent US 12,484,361
Granted Patent B2
US 12,484,361 · App. 17/815,866 · Granted Nov 25, 2025

U-LED, U-LED device, display and method for the same

Inventors: Martin Behringer (Regensburg, DE); Andreas Biebersdorf (Regensburg, DE); Ruth Boss (Neutraubling, DE); Erwin Lang (Regensburg, DE); Tobias Meyer (Kelheim, DE); Alexander Pfeuffer (Regensburg, DE); Marc Philippens (Regensburg, DE); Julia Stolz (Regensburg, DE); Tansen Varghese (Regensburg, DE); Sebastian Wittmann (Regensburg, DE); Siegfried Herrmann (Regenstauf, DE); Berthold Hahn (Hemau—Hohenschambach, DE); Bruno Jentzsch (Regensburg, DE); Korbinian Perzlmaier (Regensburg, DE); Peter Stauss (Regensburg, DE); Petrus Sundgren (Lappersdorf, DE); Jens Mueller (Regenstauf, DE); Kerstin Neveling (Regensburg, DE); Frank Singer (Pentling, DE); Christian Mueller (Deuerling, DE)
Assignee: OSRAM Opto Semiconductors GmbH
H10H29/142H10H20/814H10H20/819H10H20/855
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,484,361
App. No.
17/815,866
Granted
Nov 25, 2025
Kind
B2
Abstract

The invention relates to various aspects of a μ-LED or a μ-LED array for augmented reality or lighting applications, in particular in the automotive field. The μ-LED is characterized by particularly small dimensions in the range of a few μm.

Claims (11)

1 . A μ-LED comprising:

a functional layer stack having an active layer having a first main surface side facing away from a growth substrate and a second main surface side facing the growth substrate;

a first electrically conductive contact layer arranged on the first main surface side;

a second electrically conductive contact layer applied to the second main surface side; and

a holding structure anchored on or partially in the growth substrate and supporting the functional layer stack with the first electrically conductive contact layer and the second electrically conductive contact layer, wherein the holding structure extends from the growth substrate along a side portion of the functional layer stack to a side portion of the first electrically conductive contact layer, wherein the holding structure is configured to be breakable for separating the μ-LED from the holding structure during a lift-off procedure,

wherein the active layer has an increased band gap in edge regions of the μ-LED or in regions which are at least adjacent to the holding structure or adjacent to a break-off edge.

2 . The μ-LED according to claim 1 , further comprising quantum well intermixing in edge regions of the active layer or in regions of the active layer adjacent to the holding structure or adjacent to a break-off edge.

3 . The μ-LED according to claim 1 , wherein the holding structure comprises InGaAlP or AlGaAs or BCB or an oxide or a nitride or a combination of such materials and is electrically non-conductive.

4 . The μ-LED according to claim 1 , wherein the holding structure further comprises a layer of InGaAlP or a layer of AlGaAs, wherein the layer of InGaAlP or the layer of AlGaAs is attached to the functional layer stack on the first main surface side.

5 . The μ-LED according to claim 1 , wherein the holding structure further comprises a layer of InGaAlP or a layer of AlGaAs, and wherein the layer of InGaAlP or the layer of AlGaAs is attached to the functional layer stack on the second main surface side and comprises InGaAlP or AlGaAs.

6 . The μ-LED according to claim 1 , wherein the first electrically conductive contact layer or the second electrically conductive contact layer comprises ITO or ZnO or a metal.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 17, 2022
From: BEHRINGER, MARTIN; BIEBERSDORF, ANDREAS; BOSS, RUTH; LANG, ERWIN; MEYER, TOBIAS; PFEUFFER, ALEXANDER; PHILIPPENS, MARC; STOLZ, JULIA; VARGHESE, TANSEN; WITTMANN, SEBASTIAN; HERRMANN, SIEGFRIED; HAHN, BERTHOLD; JENTZSCH, BRUNO; PERZLMAIER, KORBINIAN; STAUSS, PETER; SUNDGREN, PETRUS; MUELLER, JENS; NEVELING, KERSTIN; SINGER, FRANK; MUELLER, CHRISTIAN
To: OSRAM OPTO SEMICONDUCTORS GMBH
Reel/Frame 061437/0919 →
Priority Claims (10)
DE 10 2019 110 500.5 · Apr 23, 2019 · national
DE 10 2019 112 490.5 · May 13, 2019 · national
DE 10 2019 112 604.5 · May 14, 2019 · national
DE 10 2019 113 768.3 · May 23, 2019 · national
DE 10 2019 113 791.8 · May 23, 2019 · national
DE 10 2019 114 442.6 · May 29, 2019 · national
DE 10 2019 121 672.9 · Aug 12, 2019 · national
DE 10 2019 125 875.8 · Sep 25, 2019 · national
DE 10 2019 129 209.3 · Oct 29, 2019 · national
DE 10 2019 130 866.6 · Nov 15, 2019 · national
Continuity (3)
Continuation 17039283 · Sep 30, 2020
Continuation PCTEP2020052191 · Jan 29, 2020
Related Publication 20220375991A1 · Nov 24, 2022
References Cited (400)
US 4897614A · Nishio · 1990 [cited by applicant]
US 4979002A · Pankove · 1990 [cited by applicant]
US 5103271A · Izumiya et al. · 1992 [cited by applicant]
US 5526063A · Joubert et al. · 1996 [cited by applicant]
US 5537171A · Ogino et al. · 1996 [cited by applicant]
US 5858814A · Goossen et al. · 1999 [cited by applicant]
US 6048751A · D'Asaro et al. · 2000 [cited by applicant]
US 6316286B1 · Trezza · 2001 [cited by applicant]
US 6527456B1 · Trezza · 2003 [cited by applicant]
US 6531328B1 · Chen · 2003 [cited by applicant]
US 6881982B2 · Okuyama et al. · 2005 [cited by applicant]
US 7067339B2 · Biwa et al. · 2006 [cited by applicant]
US 7101050B2 · Magarill et al. · 2006 [cited by applicant]
US 7390097B2 · Magarill · 2008 [cited by applicant]
US 7808005B1 · Fattal et al. · 2010 [cited by applicant]
US 8049233B2 · Fukshima et al. · 2011 [cited by applicant]
US 8269238B2 · Kim et al. · 2012 [cited by applicant]
US 8349116B1 · Bibl et al. · 2013 [cited by applicant]
US 8536026B2 · Park et al. · 2013 [cited by applicant]
US 8586965B2 · Toyoda et al. · 2013 [cited by applicant]
US 8816324B2 · Fukui et al. · 2014 [cited by applicant]
US 9202988B2 · Yoshida et al. · 2015 [cited by applicant]
US 9318645B2 · Tani et al. · 2016 [cited by applicant]
US 9368683B1 · Meitl · 2016 [cited by examiner]
US 9437782B2 · Bower et al. · 2016 [cited by applicant]
US 9444015B2 · Bower et al. · 2016 [cited by applicant]
US 9472734B1 · Chen et al. · 2016 [cited by applicant]
US 9520537B2 · Bower et al. · 2016 [cited by applicant]
US 9698308B2 · Bower et al. · 2017 [cited by applicant]
US 9705042B2 · Bower et al. · 2017 [cited by applicant]
US 9923013B1 · Yamashita et al. · 2018 [cited by applicant]
US 9991423B2 · Bower et al. · 2018 [cited by applicant]
US 9997102B2 · Rotzoll et al. · 2018 [cited by applicant]
US 10069036B2 · Atanackovic · 2018 [cited by applicant]
US 10096585B2 · Tanaka et al. · 2018 [cited by applicant]
US 10147849B2 · Xu et al. · 2018 [cited by applicant]
US 10162182B2 · Jepsen · 2018 [cited by applicant]
US 10177195B2 · Ahmed et al. · 2019 [cited by applicant]
US 10224460B2 · Bower et al. · 2019 [cited by applicant]
US 10395589B1 · Vahid Far et al. · 2019 [cited by applicant]
US 10396241B1 · Perkins · 2019 [cited by applicant]
US 10405406B2 · Liszt · 2019 [cited by applicant]
US 10418517B2 · Atanackovic · 2019 [cited by applicant]
US 10446719B2 · Bower et al. · 2019 [cited by applicant]
US 10466487B2 · Blum et al. · 2019 [cited by applicant]
US 10490695B2 · Gomez-Iglesias et al. · 2019 [cited by applicant]
US 10522787B1 · Montgomery et al. · 2019 [cited by applicant]
US 10622514B1 · Atanackovic · 2020 [cited by applicant]
US 10802334B2 · Kim et al. · 2020 [cited by applicant]
US 10833225B2 · Bower et al. · 2020 [cited by applicant]
US 10903193B2 · Yamada · 2021 [cited by applicant]
US 10963103B1 · Shahmohammadi · 2021 [cited by applicant]
US 10985143B2 · Bower et al. · 2021 [cited by applicant]
US 11156759B2 · Brick et al. · 2021 [cited by applicant]
US 11300827B2 · Hwang et al. · 2022 [cited by applicant]
US 11302248B2 · Halbritter · 2022 [cited by applicant]
US 11367807B2 · Wada et al. · 2022 [cited by applicant]
US 11513275B2 · Brick et al. · 2022 [cited by applicant]
US 11538852B2 · Varghese et al. · 2022 [cited by applicant]
US 11552057B2 · Chae et al. · 2023 [cited by applicant]
US 12176461B2 · Chen et al. · 2024 [cited by applicant]
US 20020072138A1 · Trezza et al. · 2002 [cited by applicant]
US 20020074553A1 · Starikov et al. · 2002 [cited by applicant]
US 20030013230A1 · Dudoff et al. · 2003 [cited by applicant]
US 20030141507A1 · Krames et al. · 2003 [cited by applicant]
US 20030168666A1 · Okuyama et al. · 2003 [cited by applicant]
US 20030189125A1 · Trierenberg · 2003 [cited by applicant]
US 20040146219A1 · Sathyanarayana · 2004 [cited by applicant]
US 20040189627A1 · Shirasaki et al. · 2004 [cited by applicant]
US 20050174768A1 · Conner · 2005 [cited by applicant]
US 20050194598A1 · Kim et al. · 2005 [cited by applicant]
US 20050237488A1 · Yamasaki et al. · 2005 [cited by applicant]
US 20050264472A1 · Rast · 2005 [cited by applicant]
US 20060002247A1 · Kim et al. · 2006 [cited by applicant]
US 20060043402A1 · Suehiro et al. · 2006 [cited by applicant]
US 20060163435A1 · Russom et al. · 2006 [cited by applicant]
US 20060164345A1 · Sarma et al. · 2006 [cited by applicant]
US 20060192225A1 · Chua et al. · 2006 [cited by applicant]
US 20070012940A1 · Suh et al. · 2007 [cited by applicant]
US 20070057249A1 · Kim et al. · 2007 [cited by applicant]
US 20070096127A1 · Pattison et al. · 2007 [cited by applicant]
US 20070252132A1 · Kamins et al. · 2007 [cited by applicant]
US 20080061304A1 · Huang et al. · 2008 [cited by applicant]
US 20080160725A1 · Byun et al. · 2008 [cited by applicant]
US 20090045416A1 · Bierhuizen et al. · 2009 [cited by applicant]
US 20090101897A1 · Murphy et al. · 2009 [cited by applicant]
US 20090140272A1 · Beeson et al. · 2009 [cited by applicant]
US 20090229097A1 · Crandlemire · 2009 [cited by applicant]
US 20090291237A1 · Park et al. · 2009 [cited by applicant]
US 20090315054A1 · Kim et al. · 2009 [cited by applicant]
US 20100019693A1 · Hoogzaad et al. · 2010 [cited by applicant]
US 20100019697A1 · Korsunsky et al. · 2010 [cited by applicant]
US 20100163894A1 · Uemura et al. · 2010 [cited by applicant]
US 20100252103A1 · Yao et al. · 2010 [cited by applicant]
US 20100317132A1 · Rogers et al. · 2010 [cited by applicant]
US 20110012142A1 · Hahn et al. · 2011 [cited by applicant]
US 20110037094A1 · Lin et al. · 2011 [cited by applicant]
US 20110151602A1 · Speier · 2011 [cited by applicant]
US 20110156070A1 · Yoon et al. · 2011 [cited by applicant]
US 20110156616A1 · Anderson et al. · 2011 [cited by applicant]
US 20110198653A1 · Cho · 2011 [cited by applicant]
US 20110204327A1 · Hiruma et al. · 2011 [cited by applicant]
US 20110254043A1 · Negishi et al. · 2011 [cited by applicant]
US 20110263054A1 · Yu et al. · 2011 [cited by applicant]
US 20110291115A1 · Kim et al. · 2011 [cited by applicant]
US 20120012622A1 · Sundbaum · 2012 [cited by applicant]
US 20120126229A1 · Bower · 2012 [cited by applicant]
US 20120223289A1 · Gwo et al. · 2012 [cited by applicant]
US 20120223873A1 · Ohta · 2012 [cited by applicant]
US 20120261642A1 · Bergenek et al. · 2012 [cited by applicant]
US 20130063413A1 · Miyake · 2013 [cited by applicant]
US 20130063815A1 · Kubota · 2013 [cited by applicant]
US 20130082624A1 · Brassfield et al. · 2013 [cited by applicant]
US 20130119424A1 · Kang et al. · 2013 [cited by applicant]
US 20130154498A1 · Missbach · 2013 [cited by applicant]
US 20130208273A1 · Dominguez-Caballero et al. · 2013 [cited by applicant]
US 20130249972A1 · Nishino et al. · 2013 [cited by applicant]
US 20130256708A1 · Jin et al. · 2013 [cited by applicant]
US 20130328066A1 · Sabathil et al. · 2013 [cited by applicant]
US 20140008677A1 · Zhu et al. · 2014 [cited by applicant]
US 20140054619A1 · Tseng et al. · 2014 [cited by applicant]
US 20140111559A1 · Yang et al. · 2014 [cited by applicant]
US 20140131753A1 · Ishida et al. · 2014 [cited by applicant]
US 20140159064A1 · Sakariya et al. · 2014 [cited by applicant]
US 20140231841A1 · Wang · 2014 [cited by applicant]
US 20140319560A1 · Tischler · 2014 [cited by applicant]
US 20140340900A1 · Bathurst et al. · 2014 [cited by applicant]
US 20150018609A1 · Forsell · 2015 [cited by applicant]
US 20150103070A1 · In et al. · 2015 [cited by applicant]
US 20150103404A1 · Rudy et al. · 2015 [cited by applicant]
US 20150162560A1 · Chen et al. · 2015 [cited by applicant]
US 20150186099A1 · Hall · 2015 [cited by applicant]
US 20150187991A1 · McGroddy et al. · 2015 [cited by applicant]
US 20150207399A1 · Li et al. · 2015 [cited by applicant]
US 20150213756A1 · Wacyk · 2015 [cited by applicant]
US 20150221835A1 · Tischler et al. · 2015 [cited by applicant]
US 20150280086A1 · Jang et al. · 2015 [cited by applicant]
US 20150293302A1 · Czornomaz et al. · 2015 [cited by applicant]
US 20150325598A1 · Pfeuffer et al. · 2015 [cited by applicant]
US 20160013167A1 · Sakariya et al. · 2016 [cited by applicant]
US 20160155892A1 · Li et al. · 2016 [cited by applicant]
US 20160172253A1 · Wu et al. · 2016 [cited by applicant]
US 20160185277A1 · Cho et al. · 2016 [cited by applicant]
US 20160240159A1 · Ohkawa et al. · 2016 [cited by applicant]
US 20160315218A1 · Bour et al. · 2016 [cited by applicant]
US 20160341942A1 · Cheon et al. · 2016 [cited by applicant]
US 20160351539A1 · Bower et al. · 2016 [cited by applicant]
US 20170005151A1 · Kim et al. · 2017 [cited by applicant]
US 20170061878A1 · Park et al. · 2017 [cited by applicant]
US 20170082263A1 · Byrnes et al. · 2017 [cited by applicant]
US 20170084775A1 · Li et al. · 2017 [cited by applicant]
US 20170133357A1 · Kuo et al. · 2017 [cited by applicant]
US 20170170360A1 · Bour et al. · 2017 [cited by applicant]
US 20170179097A1 · Zhang et al. · 2017 [cited by applicant]
US 20170179192A1 · Zhang et al. · 2017 [cited by applicant]
US 20170186740A1 · Cok et al. · 2017 [cited by applicant]
US 20170186908A1 · Robin et al. · 2017 [cited by applicant]
US 20170236885A1 · Koshihara et al. · 2017 [cited by applicant]
US 20170250323A1 · Otto et al. · 2017 [cited by applicant]
US 20170254518A1 · Vasylyev · 2017 [cited by applicant]
US 20170270852A1 · Meitl et al. · 2017 [cited by applicant]
US 20170278733A1 · Chang et al. · 2017 [cited by applicant]
US 20170287402A1 · Toyomura et al. · 2017 [cited by applicant]
US 20170338372A1 · Teraguchi et al. · 2017 [cited by applicant]
US 20170345867A1 · Chaji et al. · 2017 [cited by applicant]
US 20170352309A1 · Chang et al. · 2017 [cited by applicant]
US 20170352313A1 · Miyake · 2017 [cited by applicant]
US 20170371087A1 · You et al. · 2017 [cited by applicant]
US 20180005562A1 · Lin et al. · 2018 [cited by applicant]
US 20180012540A1 · Hosoyachi et al. · 2018 [cited by applicant]
US 20180024412A1 · Kim et al. · 2018 [cited by applicant]
US 20180033767A1 · Yu et al. · 2018 [cited by applicant]
US 20180033768A1 · Kumar et al. · 2018 [cited by applicant]
US 20180075798A1 · Nho et al. · 2018 [cited by applicant]
US 20180084614A1 · Bower et al. · 2018 [cited by applicant]
US 20180090058A1 · Chen et al. · 2018 [cited by applicant]
US 20180097033A1 · Ahmed et al. · 2018 [cited by applicant]
US 20180114878A1 · Danesh et al. · 2018 [cited by applicant]
US 20180138071A1 · Bower et al. · 2018 [cited by applicant]
US 20180180249A1 · Yarnada et al. · 2018 [cited by applicant]
US 20180182298A1 · Jang et al. · 2018 [cited by applicant]
US 20180190712A1 · Xu et al. · 2018 [cited by applicant]
US 20180211582A1 · Sakariya et al. · 2018 [cited by applicant]
US 20180211595A1 · Takahashi et al. · 2018 [cited by applicant]
US 20180211945A1 · Cok et al. · 2018 [cited by applicant]
US 20180219144A1 · Perkins et al. · 2018 [cited by applicant]
US 20180226386A1 · Cok · 2018 [cited by applicant]
US 20180233536A1 · Chang · 2018 [cited by applicant]
US 20180247586A1 · Vahid et al. · 2018 [cited by applicant]
US 20180269234A1 · Hughes et al. · 2018 [cited by applicant]
US 20180275410A1 · Yeoh et al. · 2018 [cited by applicant]
US 20180301433A1 · Robin et al. · 2018 [cited by applicant]
US 20180308832A1 · Shin et al. · 2018 [cited by applicant]
US 20180323116A1 · Wu et al. · 2018 [cited by applicant]
US 20180323178A1 · Meitl et al. · 2018 [cited by applicant]
US 20180331258A1 · Halbritter et al. · 2018 [cited by applicant]
US 20180342492A1 · Lu · 2018 [cited by applicant]
US 20180358339A1 · Iguchi · 2018 [cited by applicant]
US 20180358340A1 · Wong et al. · 2018 [cited by applicant]
US 20180367769A1 · Greenberg · 2018 [cited by applicant]
US 20190012957A1 · Liu et al. · 2019 [cited by applicant]
US 20190012965A1 · Fu et al. · 2019 [cited by applicant]
US 20190013439A1 · Sung et al. · 2019 [cited by applicant]
US 20190044023A1 · Cheng et al. · 2019 [cited by applicant]
US 20190058081A1 · Ahmed et al. · 2019 [cited by applicant]
US 20190066571A1 · Goward · 2019 [cited by applicant]
US 20190066587A1 · Han · 2019 [cited by applicant]
US 20190096973A1 · Zhou · 2019 [cited by applicant]
US 20190096976A1 · Jang et al. · 2019 [cited by applicant]
US 20190113199A1 · Pellarin et al. · 2019 [cited by applicant]
US 20190113727A1 · Tamma · 2019 [cited by applicant]
US 20190115508A1 · Lin et al. · 2019 [cited by applicant]
US 20190137757A1 · Rousseau · 2019 [cited by applicant]
US 20190148606A1 · Racz et al. · 2019 [cited by applicant]
US 20190165209A1 · Bonar et al. · 2019 [cited by applicant]
US 20190174079A1 · Anthony et al. · 2019 [cited by applicant]
US 20190195466A1 · Shimizu et al. · 2019 [cited by applicant]
US 20190198716A1 · Gordon et al. · 2019 [cited by applicant]
US 20190229097A1 · Takeya et al. · 2019 [cited by applicant]
US 20190235234A1 · Hu et al. · 2019 [cited by applicant]
US 20190235677A1 · Liu et al. · 2019 [cited by applicant]
US 20190258346A1 · Cheng et al. · 2019 [cited by applicant]
US 20190293939A1 · Sluka · 2019 [cited by applicant]
US 20190302917A1 · Pan · 2019 [cited by applicant]
US 20190305035A1 · Cho et al. · 2019 [cited by applicant]
US 20190305036A1 · Ahn et al. · 2019 [cited by applicant]
US 20190305185A1 · Lauermann et al. · 2019 [cited by applicant]
US 20190335553A1 · Ahmed et al. · 2019 [cited by applicant]
US 20190347979A1 · Ahmed · 2019 [cited by applicant]
US 20190371777A1 · Iguchi · 2019 [cited by applicant]
US 20190378674A1 · Chou et al. · 2019 [cited by applicant]
US 20190383474A1 · Vasylyev · 2019 [cited by applicant]
US 20190386173A1 · Chen et al. · 2019 [cited by applicant]
US 20190393198A1 · Takeya · 2019 [cited by applicant]
US 20200052033A1 · Iguchi · 2020 [cited by applicant]
US 20200105184A1 · Shao et al. · 2020 [cited by applicant]
US 20200119233A1 · Dupont · 2020 [cited by applicant]
US 20200134624A1 · Zhang et al. · 2020 [cited by applicant]
US 20200203580A1 · Marutani · 2020 [cited by applicant]
US 20200219855A1 · Chen et al. · 2020 [cited by applicant]
US 20200227594A1 · Kuo · 2020 [cited by applicant]
US 20200251638A1 · Morris et al. · 2020 [cited by applicant]
US 20200342194A1 · Bhat et al. · 2020 [cited by applicant]
US 20200343230A1 · Sizov et al. · 2020 [cited by applicant]
US 20200356016A1 · Sampayan et al. · 2020 [cited by applicant]
US 20200357103A1 · Wippermann · 2020 [cited by applicant]
US 20200366067A1 · David et al. · 2020 [cited by applicant]
US 20210005775A1 · Chen et al. · 2021 [cited by applicant]
US 20210005782A1 · Ting · 2021 [cited by examiner]
US 20210043617A1 · Onuma et al. · 2021 [cited by applicant]
US 20210104574A1 · Behringer et al. · 2021 [cited by applicant]
US 20210104647A1 · Harrold et al. · 2021 [cited by applicant]
US 20210124247A1 · Mezouari et al. · 2021 [cited by applicant]
US 20210134624A1 · Zhang · 2021 [cited by applicant]
US 20210136966A1 · Jang et al. · 2021 [cited by applicant]
US 20210242370A1 · Lee et al. · 2021 [cited by applicant]
US 20210272938A1 · Chang et al. · 2021 [cited by applicant]
US 20210313497A1 · Pourquier · 2021 [cited by applicant]
US 20210325594A1 · Meng et al. · 2021 [cited by applicant]
US 20210375833A1 · Lee et al. · 2021 [cited by applicant]
US 20210391514A1 · Koyama et al. · 2021 [cited by applicant]
US 20210405276A1 · Brick et al. · 2021 [cited by applicant]
US 20220051614A1 · Baumheinrich et al. · 2022 [cited by applicant]
US 20220052235A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220093833A1 · Takiguchi et al. · 2022 [cited by applicant]
US 20220101781A1 · Baumheinrich et al. · 2022 [cited by applicant]
US 20220102583A1 · Baumheinrich et al. · 2022 [cited by applicant]
US 20220123046A1 · Behringer et al. · 2022 [cited by applicant]
US 20220231193A1 · Boss et al. · 2022 [cited by applicant]
US 20220262850A1 · Behringer et al. · 2022 [cited by applicant]
US 20220262851A1 · Behringer et al. · 2022 [cited by applicant]
US 20220262852A1 · Behringer et al. · 2022 [cited by applicant]
US 20220271084A1 · Behringer et al. · 2022 [cited by applicant]
US 20220271085A1 · Behringer et al. · 2022 [cited by applicant]
US 20220285430A1 · Behringer et al. · 2022 [cited by applicant]
US 20220285591A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220285592A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220293829A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220293830A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220310888A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220352436A1 · Biebersdorf et al. · 2022 [cited by applicant]
US 20220375991A1 · Behringer et al. · 2022 [cited by applicant]
CN 109473047A · 2019 [cited by applicant]
DE 19744793A1 · 1998 [cited by applicant]
DE 19751649A1 · 1999 [cited by applicant]
DE 19911717A1 · 2000 [cited by applicant]
DE 10009782A1 · 2001 [cited by applicant]
DE 102006045702A1 · 2008 [cited by applicant]
DE 102007043877A1 · 2009 [cited by applicant]
DE 102007046339A1 · 2009 [cited by applicant]
DE 102005063159B4 · 2009 [cited by applicant]
DE 102012008833A1 · 2012 [cited by applicant]
DE 102013104273A1 · 2014 [cited by applicant]
DE 102017106755A1 · 2018 [cited by applicant]
DE 102017109083A1 · 2018 [cited by applicant]
DE 102018108022A1 · 2018 [cited by applicant]
DE 102017114369A1 · 2019 [cited by applicant]
DE 102018113363A1 · 2019 [cited by applicant]
DE 102018119312A1 · 2020 [cited by applicant]
DE 102018119376A1 · 2020 [cited by applicant]
EP 0488772A1 · 1992 [cited by applicant]
EP 1544660A1 · 2005 [cited by applicant]
EP 1553640A1 · 2005 [cited by applicant]
EP 1887634A2 · 2008 [cited by applicant]
EP 2323185A2 · 2011 [cited by applicant]
EP 2396818A2 · 2011 [cited by applicant]
EP 2430652A0 · 2012 [cited by applicant]
EP 2609624A0 · 2012 [cited by applicant]
EP 2477240A2 · 2012 [cited by applicant]
EP 2506321A1 · 2012 [cited by applicant]
EP 2642537A2 · 2013 [cited by applicant]
EP 2685155A2 · 2014 [cited by applicant]
EP 2750208A2 · 2014 [cited by applicant]
EP 2838130A1 · 2015 [cited by applicant]
EP 2924490A2 · 2015 [cited by applicant]
EP 2980866A1 · 2016 [cited by applicant]
EP 2986082A1 · 2016 [cited by applicant]
EP 3010048A1 · 2016 [cited by applicant]
EP 3031086A1 · 2016 [cited by applicant]
EP 2676528B1 · 2017 [cited by applicant]
EP 3226042A1 · 2017 [cited by applicant]
EP 2704215B1 · 2018 [cited by applicant]
EP 3367374A1 · 2018 [cited by applicant]
EP 33673774A1 · 2018 [cited by applicant]
JP S642386A · 1987 [cited by applicant]
JP S62269385A · 1987 [cited by applicant]
JP H06244457A · 1994 [cited by applicant]
JP H11145519A · 1999 [cited by applicant]
JP 2002246647A · 2002 [cited by applicant]
JP 2004228297A · 2004 [cited by applicant]
JP 2005244220A · 2005 [cited by applicant]
JP 2005346066A · 2005 [cited by applicant]
JP 2006263932A · 2006 [cited by applicant]
JP 2007264610A · 2007 [cited by applicant]
JP 2007324416A · 2007 [cited by applicant]
JP 2008047906A · 2008 [cited by applicant]
JP 2008130721A · 2008 [cited by applicant]
JP 2009141254A · 2009 [cited by applicant]
JP 2009186794A · 2009 [cited by applicant]
JP 2009260357A · 2009 [cited by applicant]
JP 2010272245A · 2010 [cited by applicant]
JP 2012510716A · 2012 [cited by applicant]
JP 2013048282A · 2013 [cited by applicant]
JP 2013110154A · 2013 [cited by applicant]
JP 2014019436A · 2014 [cited by applicant]
JP 2014110333A · 2014 [cited by applicant]
JP 2015099238A · 2015 [cited by applicant]
JP 2016174179A · 2016 [cited by applicant]
JP 2016208012A · 2016 [cited by applicant]
JP 2017152655A · 2017 [cited by applicant]
JP 2017533453A · 2017 [cited by applicant]
JP 2017535966A · 2017 [cited by applicant]
JP 2018050082A · 2018 [cited by applicant]
JP 2018063975A · 2018 [cited by applicant]
JP 2018191006A · 2018 [cited by applicant]
JP 2019009438A · 2019 [cited by applicant]
JP 2019029473A · 2019 [cited by applicant]
KR 100713226B1 · 2007 [cited by applicant]
KR 20090068407A · 2009 [cited by applicant]
KR 1020110075279A · 2011 [cited by applicant]
KR 20120038539A · 2012 [cited by applicant]
KR 20130052944A · 2013 [cited by applicant]
KR 1020140009923A · 2014 [cited by applicant]
KR 20150132354A · 2015 [cited by applicant]
KR 20170095418A · 2017 [cited by applicant]
KR 101798134B1 · 2017 [cited by applicant]
WO 2004084318A1 · 2004 [cited by applicant]
WO 2006035212A1 · 2006 [cited by applicant]
WO 2007001099A1 · 2007 [cited by applicant]
WO 2009082121A2 · 2009 [cited by applicant]
WO 2010019594A2 · 2010 [cited by applicant]
WO 2010132552A1 · 2010 [cited by applicant]
WO 2010149027A1 · 2010 [cited by applicant]
WO 2011069747A1 · 2011 [cited by applicant]
WO 2011117056A1 · 2011 [cited by applicant]
WO 2011160051A2 · 2011 [cited by applicant]
WO 2012014857A1 · 2012 [cited by applicant]
WO 2013026440A2 · 2013 [cited by applicant]
WO 2014047113A1 · 2014 [cited by applicant]
WO 2014093063A1 · 2014 [cited by applicant]
WO 2015138102A1 · 2015 [cited by applicant]
WO 2016025325A1 · 2016 [cited by applicant]
WO 2016054092A1 · 2016 [cited by applicant]
WO 2016060677A1 · 2016 [cited by applicant]
WO 2016151112A1 · 2016 [cited by applicant]
WO 2017087312A1 · 2017 [cited by applicant]
WO 2017111827A1 · 2017 [cited by applicant]
WO 2017120320A1 · 2017 [cited by applicant]
WO 2017120341A1 · 2017 [cited by applicant]
WO 2017197576A1 · 2017 [cited by applicant]
WO 2018117382A1 · 2018 [cited by applicant]
WO 2018123280A1 · 2018 [cited by applicant]
WO 2018192322A1 · 2018 [cited by applicant]
WO 2018179540A1 · 2018 [cited by applicant]
WO 2019079383A1 · 2019 [cited by applicant]
Buljan et al., “Ultra-Compact Multichannel Freeform Optics for 4xWUXGA OLED Microdisplays,” Proc. SPIE 10676, Digital Optics for Immersive Displays, 9 pages (2018). [cited by applicant]
Fortuna, “Integrated Nanoscale Antenna-LED for On-Chip Optical Communication,” UC Berkeley, 146 pages (2017). [cited by applicant]
Li et al., “Waveguiding in Vertical Cavity Quantum-Well Structure Defined by lon Implantation,” J. Lightwave Technol. 16, pp. 1498-1508 (1998). [cited by applicant]
Ogihara et al., “1200 Dots-Per-Inch Light Emitting Diode Array Fabricated by Solid-Phase Zinc Diffusion,” IEICE Transactions on Electronics, 80;3, pp. 489-497 (1997). [cited by applicant]
Stevens et al., “Varifocal Technologies Providing Prescription and VAC Mitigation In HMDs Using Alvarez Lenses,” Proc. SPIE 10676, Digital Optics for Immersive Displays, 18 pages (2018). [cited by applicant]