IP Library Granted Patent US 11,812,620
Granted Patent B2
US 11,812,620 · App. 18/206,040 · Granted Nov 7, 2023

3D DRAM memory devices and structures with control circuits

Inventors: Zvi Or-Bach (Haifa, IL); Jin-Woo Han (San Jose, CA); Brian Cronquist (Klamath Falls, OR)
Assignee: Monolithic 3D Inc.
H10B80/00H01L24/08H01L24/80H01L25/0657H01L25/18H01L25/50H10B12/20H01L2224/08145H01L2224/80895H01L2224/80896H01L2924/1431H01L2924/1436
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Quick Facts
Patent No.
US 11,812,620
App. No.
18/206,040
Granted
Nov 7, 2023
Kind
B2
Abstract

A semiconductor device, the device including: a first level including a plurality of first memory arrays, where the first level includes a plurality of first transistors and a plurality of metal layers; a second level disposed on top of the first level, where the second level includes a plurality of second memory arrays, where the first level is bonded to the second level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, where the plurality of first memory arrays includes a plurality of first DRAM (Dynamic Random Access Memory) cells, and where the plurality of second memory arrays includes a plurality of second DRAM (Dynamic Random Access Memory) cells.

Claims (75)

1. A semiconductor device, the device comprising:

a first level comprising a plurality of first memory arrays,

wherein said first level comprises a plurality of first transistors and a plurality of metal layers;

a second level disposed on top of said first level,

wherein said second level comprises a plurality of second memory arrays,

wherein said first level is bonded to said second level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein said plurality of first memory arrays comprises a plurality of first DRAM (Dynamic Random Access Memory) cells, and

wherein said plurality of second memory arrays comprises a plurality of second DRAM (Dynamic Random Access Memory) cells.

2. The device according to claim 1 ,

wherein said second level comprises a single crystal silicon layer having a thickness of less than 30 microns and greater than 0.1 microns.

3. The device according to claim 1 ,

wherein said second level comprises at least one redundancy memory array.

4. The device according to claim 1 , further comprising:

a third level,

wherein said third level comprises control circuits providing control access to said plurality of first memory arrays.

5. The device according to claim 1 , further comprising:

a third level,

wherein said third level comprises control circuits providing control access to said plurality of first memory arrays, and

wherein said third level comprises control circuits providing control access to said plurality of second memory arrays.

6. The device according to claim 1 ,

wherein said plurality of first memory arrays comprise at least four sub-arrays, and

wherein each of said at least four sub-arrays comprises independent control line access.

7. The device according to claim 1 ,

wherein said plurality of first memory arrays comprises a plurality of word-lines (“WL”), and

wherein at least one of said plurality of word-lines is directly connected to at least one of said plurality metal to metal bonding regions.

8. A semiconductor device, the device comprising:

a first level comprising a plurality of first memory arrays,

wherein said first level comprises a plurality of first transistors and a plurality of metal layers;

a second level disposed on top of said first level,

wherein said second level comprises a plurality of second memory arrays,

wherein said first level is bonded to said second level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein said plurality of first memory arrays comprises a plurality of first DRAM (Dynamic Random Access Memory) cells,

wherein said plurality of second memory arrays comprises a plurality of second DRAM (Dynamic Random Access Memory) cells; and

a third level,

wherein said third level comprises control circuits providing control access to said first memory arrays.

9. The device according to claim 8 ,

wherein said memory level comprises a single crystal silicon layer having a thickness of less than 30 microns and greater than 0.1 microns.

10. The device according to claim 8 ,

wherein said first level comprises at least one redundancy memory array.

11. The device according to claim 8 ,

wherein said third level comprises a plurality of differential sense amplifier circuits.

12. The device according to claim 8 ,

wherein said control circuits provide control access to said plurality of second memory arrays.

13. The device according to claim 8 ,

wherein said plurality of first memory arrays comprises at least four sub-arrays, and

wherein each of said at least four sub-arrays comprises independent control line access.

14. The device according to claim 8 ,

wherein said plurality of first memory arrays comprises a plurality of word-lines (“WL”), and

wherein at least one of said plurality of word-lines is directly connected to at least one of said plurality of metal to metal bonding regions.

15. A semiconductor device, the device comprising:

a first level comprising a plurality of first memory arrays,

wherein said first level comprises a plurality of first transistors and a plurality of metal layers;

a second level disposed on top of said first level,

wherein said second level comprises a plurality of second memory arrays,

wherein said first level is bonded to said second level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein said first memory arrays comprise a plurality of first DRAM (Dynamic Random Access Memory) cells,

wherein said second memory arrays comprise a plurality of second DRAM (Dynamic Random Access Memory) cells; and

a third level,

wherein said third level comprises control circuits providing control access to said plurality of first memory arrays, and

wherein said control circuits providing control access to said plurality of second memory arrays.

16. The device according to claim 15 ,

wherein said second level comprises a single crystal silicon layer having a thickness of less than 30 microns and greater than 0.1 microns.

17. The device according to claim 15 ,

wherein said second level comprises at least one redundancy memory array.

18. The device according to claim 15 ,

wherein said third level comprises a plurality of differential sense amplifier circuits.

19. The device according to claim 15 ,

wherein said plurality of first memory arrays comprises at least four sub-arrays, and

wherein each of said at least four sub-arrays comprises independent control line access.

20. The device according to claim 15 ,

wherein said plurality of first memory arrays comprises a plurality of word-lines (“WL”), and

wherein at least one of said plurality of word-lines is directly connected to at least one of said plurality metal to metal bonding regions.

Continuity (13)
Continuation In Part 18105856 · Feb 5, 2023
Continuation In Part 17949988 · Sep 21, 2022
Continuation In Part 17712875 · Apr 4, 2022
Continuation In Part 17567049 · Dec 31, 2021
Continuation In Part 17485504 · Sep 27, 2021
Continuation In Part 17372476 · Jul 11, 2021
Continuation In Part 17214883 · Mar 28, 2021
Continuation In Part 16337665
Provisional Application 62406376 · Oct 10, 2016
Provisional Application 62517152 · Jun 8, 2017
Provisional Application 62471963 · Mar 16, 2017
Provisional Application 62440720 · Dec 30, 2016
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