Semiconductor device and a method of manufacture therefor
The present invention provides a semiconductor device, a method of manufacture therefor, and an integrated circuit including the aforementioned semiconductor device. The semiconductor device, in accordance with the principles of the present invention, may include a substrate, and a graded capping layer located over the substrate, wherein the graded capping layer includes at least two different layers, wherein first and second layers of the at least two different layers have different stress values.
1. A semiconductor device, comprising:
a substrate; and
a graded capping layer located over said substrate, wherein said graded capping layer includes at least two different layers, wherein first and second layers of said at least two different layers have different compressive stress values that increase as said first and second layers move away from said substrate.
2. The semiconductor device as recited in claim 1 wherein said substrate comprises an interlevel dielectric material.
3. The semiconductor device as recited in claim 2 wherein said interlevel dielectric material comprises fluoro-silicate glass.
4. The semiconductor device as recited in claim 1 wherein said graded capping layer includes from about 2 to about 6 different layers, each of said different layers having different stress values.
5. The semiconductor device as recited in claim 1 wherein said first layer has a compressive stress value ranging from about 30 MPa to about 40 MPa and said second layer has a compressive stress value ranging from about 70 MPa to about 90 MPa.
6. The semiconductor device as recited in claim 1 wherein each of said first and second layers has a thickness ranging from about 100 nm to about 300 nm.
7. A method for manufacturing a semiconductor device, comprising:
providing a substrate; and
forming a graded capping layer over said substrate, wherein said graded capping layer includes at least two different layers, wherein first and second layers of said at least two different layers have different compressive stress values that increase as said first and second layers move away from said substrate.
8. The method as recited in claim 7 wherein providing a substrate includes providing an interlevel dielectric layer.
9. The method as recited in claim 8 wherein providing an interlevel dielectric layer includes providing an interlevel dielectric layer comprising fluoro-silicate glass.
10. The method as recited in claim 7 wherein forming a graded capping layer including at least two different layers includes forming a graded capping layer including from about 2 to about 6 different layers, each of said different layers having different stress values.
11. The method as recited in claim 7 wherein said first layer has a compressive stress value ranging from about 30 MPa to about 40 MPa and said second layer has a compressive stress value ranging from about 70 MPa to about 90 MPa.
12. The method as recited in claim 7 wherein forming a graded capping layer includes forming a graded capping layer using a dual frequency RF power ranging from about 500 Watts to about 700 Watts.
13. The method as recited in claim 7 wherein forming a graded capping layer includes forming a silicon rich oxide graded capping layer.
14. An integrated circuit, comprising:
transistors located over a semiconductor substrate;
an interlevel dielectric layer located over said transistors;
a graded capping layer located over said interlevel dielectric layer, wherein said graded capping layer includes at least two different layers, wherein first and second layers of said at least two different layers have different compressive stress values that increase as said first and second layers move away from said substrate; and
interconnects located in said interlevel dielectric layer for contacting said transistors and thereby forming an operational integrated circuit.
15. The integrated circuit as recited in claim 14 wherein said first and second layers have different compressive stress values and further wherein said compressive stress values of said first and second layers increase as said layers move away from said substrate.
16. The integrated circuit as recited in claim 14 wherein said transistors are selected from the group consisting of:
CMOS devices;
BiCMOS devices; and
bipolar devices.