Structures and methods for improving solder bump connections in semiconductor devices
Structures with improved solder bump connections and methods of fabricating such structures are provided herein. The structure includes a via formed in a dielectric layer to expose a contact pad and a capture pad formed in the via and over the dielectric layer. The capture pad has openings over the dielectric layer to form segmented features. The solder bump is deposited on the capture pad and the openings over the dielectric layer.
1. A method of manufacturing a semiconductor structure, comprising:
forming a capture pad structure over an insulative material and a via formed therein to contact an underlying contact pad;
segmenting the capture pad structure over the insulative material surrounding the via such that openings are formed in the capture pad structure over the insulative material to form a plurality of capture pad structure openings surrounding the via; and
forming a solder bump over capture pad structure and between the segments.
2. The method of claim 1 , wherein the segmenting is provided by an etching process and the insulative material is a soft polymer layer.
3. The method of claim 1 , wherein the capture pad structure is formed by depositing layers.
4. The method of claim 3 , wherein the layers include one of:
a nickel material sandwiched between a gold layer and a barrier layer; and
a TiW/Cu/Ni structure.
5. The method of claim 4 , wherein the barrier layer is a TiW barrier layer.
6. The method of claim 1 , wherein the solder bump is a lead free solder bump.
7. The method of claim 1 , wherein the segmenting includes forming the openings in the capture pad structure over the insulative material by an etching process.
8. The method of claim 7 , wherein the etching forms openings of various shapes and sizes in the capture pad structure to form the segments.
9. The method of claim 1 , wherein the solder bump covers no more than one via.
10. A method of manufacturing a package, comprising:
depositing a capture pad structure on an insulative material, and which contacts with an underlying contact pad;
segmenting the capture pad structure into a ball limiting metallurgy capture pad structure having a plurality of openings surrounding a via structured for solder connection;
heating the package which includes the ball limiting metallurgy capture pad to a set temperature in order to form solder interconnection joints;
cooling the package to solidify the solder interconnection joints; and
moving at least one segmented portion of the ball limiting metallurgy capture pad of the package to terminate fatigue crack initiation.
11. The method of claim 10 , wherein the movement absorbs stresses, which cause the fatigue crack initiation.
12. The method of claim 11 , further comprising directing the stresses into an underlying flexible insulative material for flexibility of a ball limiting metallurgy or under bump metallurgy segments and away from metal pads, wires and interconnects thereby preventing the formation of white bumps.
13. The method of claim 10 , wherein the solder interconnection joints include lead free solder bumps.
14. The method of claim 10 , wherein the segmented portion comprises openings of various shapes and sizes.
15. The method of claim 10 , wherein the segmented portion comprises a plurality of rows of openings.
16. The method of claim 10 , wherein the segmented portion comprises openings in the form of a non-contiguous plurality of openings.
17. The method of claim 10 , wherein the segmented portion comprises openings comprising arc-shaped openings surrounding other openings.
18. The method of claim 10 , wherein the solder interconnection joints include a solder bump covering no more than one via formed in an insulative material.
19. The method of claim 10 , further comprising forming a solder bump over the segmented capture pad structure and between the segments.
20. A method of manufacturing a package, comprising:
heating the package to a set temperature in order to form solder interconnection joints;
cooling the package to solidify the solder interconnection joints; and
moving at least one segmented portion of a ball limiting metallurgy of the package to terminate fatigue crack initiation,
wherein a capture pad structure is segmented into a ball limiting metallurgy capture pad structure having a plurality of openings surrounding a via structured for solder connection.