Packaged semiconductor devices
Packages for semiconductor devices, packaged semiconductor devices, and methods of cooling packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes a substrate including a semiconductor device mounting region, a cover coupled to a perimeter of the substrate, and members disposed between the substrate and the cover. The package includes partitions, with each partition being disposed between two adjacent members. The package includes a fluid inlet port coupled to the cover, and a fluid outlet port coupled to one of the partitions.
1. A package, comprising:
a substrate;
a cover coupled to a perimeter of the substrate;
an inner partition and at least one outer partition defined between the substrate and the cover;
an inner ring member between the inner partition and the at least one outer partition, the inner ring member having a first aperture that allows fluid flow between the inner partition and the at least one outer partition;
an integrated circuit device mounted to the substrate within the inner partition; and
an underfill material between the integrated circuit device and the substrate, the underfill material having therein fluid channels to allow fluid to flow there through between the integrated circuit device and the substrate.
2. The package according to claim 1 , wherein the underfill material comprises an underfill material and the fluid channels define a fluid flow area and wherein a ratio between fluid flow area to underfill area is about 1:1.8.
3. The package according to claim 1 , wherein a cross-sectional area of respective fluid channels is configured to produce a desired pressure drop of from about 30 kPa to about 80 kPa at a fluid flow rate of about 45 mL/min.
4. The package according to claim 1 , wherein the fluid channels are defined by respective non-wettable areas on the substrate.
5. The package according to claim 1 , wherein the underfill material is configured in a pattern selected from the group consisting of a peripheral pattern, a parallel strip pattern, and a corner pattern.
6. The package according to claim 1 , wherein the integrated circuit device includes an integrated circuit die mounted to an interposer substrate and further wherein the inner ring member is mounted to the cover at an upper end and mounted to the interposer substrate at a lower end.
7. The package according to claim 1 , wherein the at least one outer partition includes a plurality of outer partitions.
8. The package according to claim 7 , wherein the inner ring member is configured to allow fluid flow between the inner partition and a first one of the plurality of outer partitions and further wherein the package is configured to allow fluid flow under the integrated circuit device from the first one of the plurality of outer partitions to a second one of the plurality of outer partitions.
9. The package according to claim 8 , further comprising an outlet port in fluid flow communication with the second one of the plurality of outer partitions, the outlet port configured to allow a fluid to flow out of the package from the second one of the outer partitions.
10. The package according to claim 1 , wherein the integrated circuit device includes a stack of dies mounted to an interposer.
11. The package according to claim 1 , wherein the integrated circuit device includes a top surface having a plurality of fins therein and wherein the package is configured to allow fluid to flow amongst the plurality of fins.
12. A package, comprising:
a substrate;
a cover over the substrate;
an inner partition between the substrate and the cover;
a first outer partition between the substrate and the cover, and a second outer partition between the substrate and the cover;
a first wall between the inner partition and the first outer partition, the first wall having therein an aperture to allow fluid flow between the inner partition and the first outer partition; and
a second wall between the inner partition and the second outer partition, the second wall configured to prevent fluid flow between the inner partition and the second outer partition.
13. The package according to claim 12 , further comprising an integrated circuit device within the inner partition and a fluid flow path extending from the first outer partition, under the integrated circuit device and into the second outer partition.
14. The package according to claim 13 , wherein the integrated circuit device includes a plurality of connectors and wherein the fluid flow path surrounds respective ones of the plurality of connectors.
15. The package according to claim 13 , further comprising:
underfill material between the substrate and the integrated circuit device; and
at least one fluid flow channel extending through the underfill material.
16. The package according to claim 15 , wherein the underfill material has an underfill area and wherein the at least one fluid flow channel defines a fluid flow area and further wherein a ratio between fluid flow area to underfill area is about 1:1.8.
17. The package according to claim 15 , wherein the underfill material comprises a parallel strip pattern, a tile pattern, a peripheral pattern or a corner pattern.
18. A package, comprising:
a package substrate including a semiconductor device mounting region and a cover over the package substrate;
a semiconductor device coupled to the semiconductor device mounting region of the package substrate;
an outer ring member disposed around a perimeter of the package substrate;
an inner ring member mounted to a perimeter of the semiconductor device, the inner ring member defining an inner partition;
a plurality of members extending between the package substrate and the cover, the plurality of members defining respective outer partitions;
the inner ring member being configured to allow fluid flow between the inner partition and one of the outer partitions and further configured to prevent fluid flow between the inner partition and a second one of the outer partitions;
a fluid inlet port coupled to the inner partition; and
a fluid outlet port coupled to the second one of the outer partitions.
19. The package according to claim 18 , wherein the semiconductor device comprises one or more integrated circuit dies coupled to an interposer substrate, and further comprising a fluid flow path from a first one of the outer partitions, under the interposer substrate, and to a second one of the outer partitions.
20. The package of claim 19 , wherein the fluid flow path extends through channels in an underfill material between the interposer substrate and the package substrate.