IP Library › Granted Patent US 10,388,343
Granted Patent B2
US 10,388,343 · App. 15/917,081 · Granted Aug 20, 2019

Magnetoresistive element and magnetic memory

Inventors: Tadaaki Oikawa (Seoul, KR); Young Min Eeh (Seongnam-si, KR); Kazuya Sawada (Seoul, KR); Kenichi Yoshino (Seongnam-si, KR); Toshihiko Nagase (Tokyo, JP); Daisuke Watanabe (Yokkaichi Mie, JP)
Assignee: TOSHIBA MEMORY CORPORATION
G11C11/161G11C11/1675H01L27/228H01L43/02H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 10,388,343
App. No.
15/917,081
Granted
Aug 20, 2019
Kind
B2
Abstract

A magnetoresistive element includes: a first magnetic layer having a magnetization direction that is variable; a second magnetic layer having a magnetization direction that is invariable; a first non-magnetic layer provided between the first magnetic layer and the second magnetic layer; a third magnetic layer that fixes the magnetization direction of the second magnetic layer and that antiferromagnetically couples with the second magnetic layer; and a second non-magnetic layer provided between the second magnetic layer and the third magnetic layer. The second non-magnetic layer includes ruthenium (Ru) and a metal element.

Claims (39)

1. A magnetoresistive element comprising:

a first magnetic layer having a magnetization direction that is variable;

a second magnetic layer having a magnetization direction that is invariable;

a first non-magnetic layer provided between the first magnetic layer and the second magnetic layer;

a third magnetic layer that fixes the magnetization direction of the second magnetic layer and that antiferromagnetically couples with the second magnetic layer; and

a second non-magnetic layer provided between the second magnetic layer and the third magnetic layer,

wherein:

the second non-magnetic layer includes ruthenium (Ru) and a metal element; and

the metal element is selected from the group consisting of osmium (Os), rhodium (Rh), palladium (Pd), iridium (Ir), platinum (Pt), chromium (Cr), tungsten (W), tantalum (Ta), niobium (Nb), and molybdenum (Mo).

2. The magnetoresistive element of claim 1 , wherein the magnetization direction of the second magnetic layer and the third magnetic layer is perpendicular to a film surface.

3. The magnetoresistive element of claim 1 , wherein:

an exchange coupling magnetic field between the second magnetic layer and the third magnetic layer via the second non-magnetic layer has a first characteristic of a waveform that becomes smaller as a thickness of the second non-magnetic layer increases;

the first characteristic has a first peak where the exchange coupling magnetic field is largest; and

the second non-magnetic layer is set to a thickness corresponding to the first peak.

4. The magnetoresistive element of claim 1 , wherein:

an exchange coupling magnetic field in a case of using ruthenium (Ru) as a non-magnetic layer of a synthetic antiferromagnetic (SAF) structure has a second characteristic of a waveform that becomes smaller as a thickness of the non-magnetic layer increases;

the second characteristic has a first peak where the exchange coupling magnetic field is largest, and a second peak where the exchange coupling magnetic field is second largest; and

a thickness of the second non-magnetic layer is greater than a thickness corresponding to the first peak and smaller than a thickness corresponding to the second peak.

5. The magnetoresistive element of claim 1 , wherein the second magnetic layer includes iron (Fe) and boron (B).

6. The magnetoresistive element of claim 1 , wherein the third magnetic layer includes iron (Fe) and boron (B).

7. The magnetoresistive element of claim 1 , wherein the first non-magnetic layer includes magnesium oxide (MgO).

8. The magnetoresistive element of claim 1 , wherein the first magnetic layer includes iron (Fe) and boron (B).

9. The magnetoresistive element of claim 1 , wherein the second magnetic layer, the second non-magnetic layer, and the third magnetic layer form a synthetic antiferromagnetic (SAF) structure.

10. A magnetic memory comprising the magnetoresistive element of claim 1 .

11. The magnetic memory of claim 10 , further comprising

a select transistor that is connected to one end of the magnetoresistive element.

12. The magnetic memory of claim 11 , further comprising:

a bit line connected to another end of the magnetoresistive element; and

a source line connected to one end of the select transistor.

13. A magnetoresistive element comprising:

a first magnetic layer having a magnetization direction that is variable;

a second magnetic layer having a magnetization direction that is invariable;

a first non-magnetic layer provided between the first magnetic layer and the second magnetic layer;

a third magnetic layer that fixes the magnetization direction of the second magnetic layer and that antiferromagnetically couples with the second magnetic layer; and

a second non-magnetic layer provided between the second magnetic layer and the third magnetic layer,

wherein:

the second non-magnetic layer includes ruthenium (Ru) and a metal element;

the metal element is selected from the group consisting of osmium (Os), rhodium (Rh), palladium (Pd), iridium (Ir), platinum (Pt), chromium (Cr), tungsten (W), tantalum (Ta), niobium (Nb), and molybdenum (Mo); and

the metal element is included in the second non-magnetic layer at a composition equal to or less than 30 atomic %.

Assignments (4)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 12, 2018
From: OIKAWA, TADAAKI; EEH, YOUNG MIN; SAWADA, KAZUYA; YOSHINO, KENICHI; NAGASE, TOSHIHIKO; WATANABE, DAISUKE
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 045519/0051 →
Priority Claims (1)
JP 2017-176870 · Sep 14, 2017 · national
Continuity (1)
Related Publication 20190080739A1 · Mar 14, 2019
Cited By (7)
US 12,284,811 US 12,310,251 US 12,329,038 US 12,356,866 US 12,426,273 US 12,501,837 US 12,520,499