IP Library › Granted Patent US 10,468,170
Granted Patent B2
US 10,468,170 · App. 15/919,576 · Granted Nov 5, 2019

Magnetic device

Inventors: Young Min Eeh (Seongnam-si, KR); Toshihiko Nagase (Tokyo, JP); Daisuke Watanabe (Yokkaichi Mie, JP); Kazuya Sawada (Seoul, KR); Tadaaki Oikawa (Seoul, KR); Kenichi Yoshino (Seongnam-si, KR)
Assignee: TOSHIBA MEMORY CORPORATION
H01F10/3254G11C11/161H01F10/3268H01F10/3286H01F41/302H01L43/08H01L43/10H01L43/12G11C11/1657G11C11/1673G11C11/1675H01F10/30
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Quick Facts
Patent No.
US 10,468,170
App. No.
15/919,576
Granted
Nov 5, 2019
Kind
B2
Abstract

According to one embodiment, a magnetic device comprising a magnetoresistive effect element, wherein the magnetoresistive effect element includes: a first ferromagnetic body, a second ferromagnetic body, and a first rare-earth ferromagnetic oxide that is provided between the first ferromagnetic body and the second ferromagnetic body and magnetically joins the first ferromagnetic body and the second ferromagnetic body.

Claims (36)

1. A magnetic device comprising a magnetoresistive effect element, wherein the magnetoresistive effect element comprises:

a first ferromagnetic body;

a second ferromagnetic body;

a first rare-earth ferromagnetic oxide that is provided between the first ferromagnetic body and the second ferromagnetic body and magnetically joins the first ferromagnetic body and the second ferromagnetic body; and

a first seed,

wherein the first ferromagnetic body is provided between the first seed and the first rare-earth ferromagnetic oxide, and

wherein a parasitic resistance of the first rare-earth ferromagnetic oxide is smaller than a parasitic resistance of the first seed.

2. The magnetic device according to claim 1 , wherein the magnetoresistive effect element further comprises:

a third ferromagnetic body; and

a second rare-earth ferromagnetic oxide that is provided between the second ferromagnetic body and the third ferromagnetic body and magnetically joins the second ferromagnetic body and the third ferromagnetic body.

3. The magnetic device according to claim 1 , wherein the first rare-earth ferromagnetic oxide comprises:

one of terbium (Tb), gadolinium (Gd), neodymium (Nd), yttrium (Y), samarium (Sm), promethium (Pm), thulium (Tm), scandium (Sc), cerium (Ce), europium (Eu), erbium (Er), holmium (Ho), lanthanum (La), ytterbium (Yb), lutetium (Lu), praseodymium (Pr), or dysprosium (Dy); and

one of iron (Fe), cobalt (Co), nickel (Ni), or manganese (Mn).

4. The magnetic device according to claim 3 , wherein the first rare-earth ferromagnetic oxide further comprises one of boron (B), phosphorus (P), carbon (C), aluminum (Al), silicon (Si), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), hafnium (Hf), or titanium (Ti).

5. The magnetic device according to claim 1 , wherein the first ferromagnetic body and the second ferromagnetic body comprise one of iron (Fe), cobalt (Co), or nickel (Ni).

6. The magnetic device according to claim 1 , wherein:

the magnetoresistive effect element further comprises a second seed; and

the second ferromagnetic body is provided between the second seed and the first rare-earth ferromagnetic oxide.

7. The magnetic device according to claim 1 , wherein:

the second ferromagnetic body comprises a plurality of layers, each of which comprises one of cobalt (Co), iron (Fe), palladium (Pd), rhodium (Rh), or platinum (Pt).

8. The magnetic device according to claim 1 , wherein the first seed comprises one of magnesium oxide (MgO), aluminum oxide (AlO), zinc oxide (ZnO), titanium oxide (TiO), or lanthanum strontium manganese oxide (LSMO).

9. The magnetic device according to claim 1 , wherein the first seed comprises one of platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), iridium (Ir), or chromium (Cr).

10. The magnetic device according to claim 1 , further comprising a memory cell including the magnetoresistive effect element.

11. A method of manufacturing the magnetic device of claim 1 , comprising:

forming a layered body comprising the first ferromagnetic body, the second ferromagnetic body, the first rare-earth ferromagnetic oxide, wherein the first ferromagnetic body and the second ferromagnetic body are amorphous and include an impurity;

transforming the first ferromagnetic body and the second ferromagnetic body from an amorphous state to a crystalline state by annealing; and

magnetically joining the first ferromagnetic body and the second ferromagnetic body transformed into the crystalline state by a magnetic property of the first rare-earth ferromagnetic oxide.

12. The manufacturing method according to claim 11 , wherein the first rare-earth ferromagnetic oxide comprises:

one of terbium (Tb), gadolinium (Gd), neodymium (Nd), yttrium (Y), samarium (Sm), promethium (Pm), thulium (Tm), scandium (Sc), cerium (Ce), europium (Eu), erbium (Er), holmium (Ho), lanthanum (La), ytterbium (Yb), lutetium (Lu), praseodymium (Pr), or dysprosium (Dy); and

one of iron (Fe), cobalt (Co), nickel (Ni), or manganese (Mn).

13. The manufacturing method according to claim 11 , wherein the first ferromagnetic body and the second ferromagnetic body comprise one of iron (Fe), cobalt (Co), or nickel (Ni).

14. The manufacturing method according to claim 11 , wherein the first rare-earth ferromagnetic oxide does not include the impurity before the annealing, and includes the impurity diffused from the first ferromagnetic body and the second ferromagnetic body after the annealing.

15. The manufacturing method according to claim 14 , wherein the impurity further comprises one of boron (B), phosphorus (P), carbon (C), aluminum (Al), silicon (Si), tantalum (Ta), tungsten (W), molybdenum (Mo), chromium (Cr), hafnium (Hf), or titanium (Ti).

16. The manufacturing method according to claim 11 , wherein the first seed is provided on the first ferromagnetic body.

17. The manufacturing method according to claim 16 , wherein the first seed comprises one of magnesium oxide (MgO), aluminum oxide (AlO), zinc oxide (ZnO), titanium oxide (TiO), or lanthanum strontium manganese oxide (LSMO).

18. The manufacturing method according to claim 16 , wherein the first seed comprises one of platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), iridium (Ir), or chromium (Cr).

Assignments (4)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 27, 2018
From: EEH, YOUNG MIN; NAGASE, TOSHIHIKO; WATANABE, DAISUKE; SAWADA, KAZUYA; OIKAWA, TADAAKI; YOSHINO, KENICHI
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 045658/0447 →
Priority Claims (1)
JP 2017-175925 · Sep 13, 2017 · national
Continuity (1)
Related Publication 20190080833A1 · Mar 14, 2019
Cited By (7)
US 12,284,811 US 12,310,251 US 12,329,038 US 12,356,866 US 12,426,273 US 12,501,837 US 12,520,499