Light-emitting device and method for manufacturing the same
A highly reliable light-emitting device and a manufacturing method thereof are provided. A light-emitting element and a terminal electrode are formed over an element formation substrate; a first substrate having an opening is formed over the light-emitting element and the terminal electrode with a bonding layer provided therebetween; an embedded layer is formed in the opening; a transfer substrate is formed over the first substrate and the embedded layer; the element formation substrate is separated; a second substrate is formed under the light-emitting element and the terminal electrode; and the transfer substrate and the embedded layer are removed. In addition, an anisotropic conductive connection layer is formed in the opening, and an electrode is formed over the anisotropic conductive connection layer. The terminal electrode and the electrode are electrically connected to each other through the anisotropic conductive connection layer.
1. A method for forming a light-emitting device comprising the steps of:
forming a first layer over and in contact with a terminal electrode;
forming an EL layer over and in contact with a first electrode;
forming a second layer over and in contact with the first layer;
forming a second electrode over and in contact with the EL layer;
forming a first resin layer comprising a first opening over the second electrode;
forming a substrate comprising a second opening over the first resin layer;
forming a second resin layer over the second layer and in a region where the first opening and the second opening overlap with each other;
removing the second resin layer, the first layer, and the second layer to expose a surface of the terminal electrode; and
forming a conductive layer in contact with the surface of the terminal electrode through the first opening and the second opening,
wherein a light-emitting element comprises the first electrode, the EL layer, and the second electrode,
wherein the first layer and the EL layer comprise a first material, and
wherein the second layer and the second electrode comprise a second material.
2. A method for forming a light-emitting device according to claim 1 , wherein the first material is an organic material.
3. A method for forming a light-emitting device according to claim 1 , wherein the second material is a metal material, a conductive oxide material, or a semiconductor material.
4. A method for forming a light-emitting device comprising the steps of:
forming a first layer over and in contact with a terminal electrode;
forming an EL layer over and in contact with a first electrode;
forming a second layer over and in contact with the first layer;
forming a second electrode over and in contact with the EL layer;
forming a first resin layer comprising a first opening over the second electrode;
forming a substrate comprising a second opening over the first resin layer;
forming a second resin layer over the second layer and in a region where the first opening and the second opening overlap with each other;
removing the second resin layer and the second layer;
removing the first layer by using an organic solvent to expose a surface of the terminal electrode; and
forming a conductive layer in contact with the surface of the terminal electrode through the first opening and the second opening,
wherein a light-emitting element comprises the first electrode, the EL layer, and the second electrode,
wherein the first layer and the EL layer comprise a first material, and
wherein the second layer and the second electrode comprise a second material.
5. A method for forming a light-emitting device according to claim 4 , wherein the first material is an organic material.
6. A method for forming a light-emitting device according to claim 4 , wherein the second material is a metal material, a conductive oxide material, or a semiconductor material.