IP Library › Granted Patent US 11,563,158
Granted Patent B2
US 11,563,158 · App. 17/132,546 · Granted Jan 24, 2023

Vertical solid-state transducers and high voltage solid-state transducers having buried contacts and associated systems and methods

Inventors: Vladimir Odnoblyudov (Eagle, ID); Martin F. Schubert (Mountain View, CA)
Assignee: Micron Technology, Inc.
H01L33/62H01L21/78H01L25/0753H01L27/04H01L27/156H01L33/005H01L33/0025H01L33/06H01L33/32H01L33/382H01L33/405H01L33/64H01L33/647H01L33/0095H01L33/58H01L33/642H01L33/644H01L2224/73265H01L2933/0016H01L2933/0033H01L2933/0066H01L2933/0075
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Quick Facts
Patent No.
US 11,563,158
App. No.
17/132,546
Granted
Jan 24, 2023
Kind
B2
Abstract

Solid-state transducers (“SSTs”) and vertical high voltage SSTs having buried contacts are disclosed herein. An SST die in accordance with a particular embodiment can include a transducer structure having a first semiconductor material at a first side of the transducer structure, and a second semiconductor material at a second side of the transducer structure. The SST can further include a plurality of first contacts at the first side and electrically coupled to the first semiconductor material, and a plurality of second contacts extending from the first side to the second semiconductor material and electrically coupled to the second semiconductor material. An interconnect can be formed between at least one first contact and one second contact. The interconnects can be covered with a plurality of package materials.

Claims (30)

1. A solid-state transducer (SST) die, comprising:

a first terminal;

a second terminal;

a plurality of SST junctions coupled in series between the first terminal and the second terminal; and

a thermal pad disposed over and electrically isolated from the plurality of SST junctions.

2. The SST die of claim 1 , wherein the plurality of SST junctions are coupled in series by a corresponding plurality of interconnects.

3. The SST die of claim 1 , wherein the thermal pad is electrically isolated from the plurality of SST junctions by a dielectric material covering contacts of the plurality of SST junctions.

4. The SST die of claim 3 , wherein the dielectric material comprises silicon nitride (SiN), silicon dioxide (SiO2), polyimide, or a combination thereof.

5. The SST die of claim 3 , further comprising a seed material between the dielectric material and the thermal pad.

6. The SST die of claim 5 , wherein the seed material comprises copper (Cu), titanium (Ti) or an alloy thereof.

7. The SST die of claim 1 , further comprising an insulating material disposed between adjacent ones of the plurality of SST junctions.

8. The SST die of claim 1 , wherein the first terminal and the second terminal are co-planar with the thermal pad.

9. The SST die of claim 1 , wherein each of the plurality of SST junctions comprises a first semiconductor material, a second semiconductor material, and a light-emitting active region between the first semiconductor material and the second semiconductor material.

10. The SST die of claim 1 , wherein the thermal pad, the first terminal, and the second terminal are all comprised by a metal substrate, and wherein the conductive material is electrically isolated from each of the first terminal and the second terminal by openings in the metal substrate.

11. The SST die of claim 10 , wherein the metal substrate comprises copper (Cu), aluminum (Al), or a nickel iron (NiFe) alloy.

12. The SST die of claim 10 , wherein the metal substrate has a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

13. A solid-state transducer (SST) die, comprising:

a plurality of SST junctions coupled in series;

a dielectric material covering the plurality of SST junctions; and

a metal substrate over the dielectric material, the metal substrate comprising a thermal pad.

14. The SST die of claim 13 , wherein the metal substrate further comprises a first terminal and a second terminal that are electrically isolated from the thermal pad.

15. The SST die of claim 14 , wherein the plurality of SST junctions are coupled in series between the first terminal and the second terminal.

16. The SST die of claim 14 , wherein the thermal pad, the first terminal, and the second terminal are electrically isolated from each other by openings in the metal substrate exposing the dielectric material.

17. The SST die of claim 13 , wherein the metal substrate has a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

18. The SST die of claim 13 , wherein the metal substrate comprises copper (Cu), aluminum (Al), or a nickel iron (NiFe) alloy.

19. The SST die of claim 13 , wherein the dielectric material comprises silicon nitride (SiN), silicon dioxide (SiO2), polyimide, or a combination thereof.

20. A solid-state transducer (SST) die, comprising:

a plurality of SST junctions coupled in series;

a dielectric material covering the plurality of SST junctions; and

a metal substrate over the dielectric material, the metal substrate having a first coefficient of thermal expansion about equal to a second coefficient of thermal expansion of the SST die.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 23, 2020
From: ODNOBLYUDOV, VLADIMIR; SCHUBERT, MARTIN F.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 054739/0910 →
Continuity (8)
Continuation 16669785 · Oct 31, 2019
Continuation 16167280 · Oct 22, 2018
Continuation 15658202 · Jul 24, 2017
Continuation 15019748 · Feb 9, 2016
Continuation 14850715 · Sep 10, 2015
Division 14607839 · Jan 28, 2015
Division 13708526 · Dec 7, 2012
Related Publication 20210119095A1 · Apr 22, 2021
Cited By (2)
US 12,206,046 US 12,279,468