Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus
A solid-state imaging device including an imaging area where a plurality of unit pixels are disposed to capture a color image, wherein each of the unit pixels includes: a plurality of photoelectric conversion portions; a plurality of transfer gates, each of which is disposed in each of the photoelectric conversion portions to transfer signal charges from the photoelectric conversion portion; and a floating diffusion to which the signal charges are transferred from the plurality of the photoelectric conversion portions by the plurality of the transfer gates, wherein the plurality of the photoelectric conversion portions receive light of the same color to generate the signal charges, and wherein the signal charges transferred from the plurality of the photoelectric conversion portions to the floating diffusion are added to be output as an electrical signal.
1. A light detecting device comprising a plurality of unit pixels, wherein each of the unit pixels includes:
a plurality of first photoelectric conversion portions;
a plurality of first transfer gates;
a first floating diffusion region;
a plurality of second photoelectric conversion portions;
a plurality of second transfer gates; and
a second floating diffusion region,
wherein,
the first photoelectric conversion portions and the second photoelectric conversion portions are configured to receive and convert light of the same color,
each of the first transfer gates is configured to transfer a signal charge in a respective one of the first photoelectric conversion portions to the first floating diffusion region, and
each of the second transfer gates is configured to transfer a signal charge in a respective one of the second photoelectric conversion portions to the second floating diffusion region.
2. The solid-state imaging device according to claim 1 , wherein the unit pixel is configured so that the first and second floating diffusion regions are respectively interposed by the first and second plurality of the photoelectric conversion portions and so that the first and second transfer gates are respectively disposed between the first and second photoelectric conversion portions and the first and second floating diffusion regions.
3. The solid-state imaging device according to claim 2 , wherein a plurality of the unit pixels are arrayed in a first direction and a second direction perpendicular to the first direction in the imaging area,
wherein the first and second floating diffusions are disposed so as to be interposed by the plurality of the first and second photoelectric conversion portions in the first direction, and
wherein the plurality of the first and second transfer gates are disposed so as to be interposed between the plurality of the first and second photoelectric conversion portions and the first and second floating diffusions in the first direction.
4. The solid-state imaging device according to claim 2 , comprising a plurality of unit pixels, wherein:
the unit pixels are arrayed in a first direction and a second direction perpendicular to the first direction in the imaging area,
for each unit pixel, the first and second floating diffusion regions are disposed so as to be respectively interposed by the first and second photoelectric conversion portions in a direction slanted with respect to the first direction and the second direction, and
for each unit pixel, the first and second transfer gates are disposed so as to be respectively interposed between the first and second the photoelectric conversion portions and the first and second floating diffusion regions in the direction slanted with respect to the first direction and the second direction.
5. The solid-state imaging device according to claim 3 or 4 , wherein the plurality of the first and second photoelectric conversion portions are arrayed in the unit pixel so that the same number of the photoelectric conversion portions are aligned in each of the first direction and second direction.
6. The solid-state imaging device according to claim 5 , wherein the plurality of the first and second photoelectric conversion portions are arrayed so that an even number of the photoelectric conversion portions are aligned in each of the first direction and the second direction.
7. The solid-state imaging device according to claim 6 , wherein the plurality of the first and second photoelectric conversion portions are arrayed so that multiples of four photoelectric conversion portions are aligned in each of the first direction and the second direction.
8. The solid-state imaging device according to claim 2 , wherein:
the unit pixel includes (a) a first amplification transistor with a first gate which is electrically connected to the first floating diffusion region; and (b) a first vertical signal line which outputs a signal obtained from the signal charges transferred to the first floating diffusion region,
the unit pixel includes (a) a second amplification transistor with a second gate which is electrically connected to the second floating diffusion region; and (b) a second vertical signal line which outputs a signal obtained from the signal charges transferred to the second floating diffusion region
the first and second vertical signal lines are electrically connected to each other, and
the signals output from the first and second vertical signal lines are smoothed.
9. The solid-state imaging device according to claim 2 ,
wherein the unit pixel includes:
an amplification transistor of which the gate is electrically connected to the first and second floating diffusion regions; and
a vertical signal line which outputs a signal obtained from the signal charges transferred to the first and second floating diffusion regions, and
wherein a plurality of the amplification transistors are disposed in the unit pixel, and the sources of the plurality of the amplification transistors are electrically connected to a common vertical signal line.
10. The solid-state imaging device according to claim 1 ,
wherein the unit pixel includes a microlens which focuses light on the first and second photoelectric conversion portions, and
wherein a plurality of the microlenses are disposed corresponding to the plurality of the first and second photoelectric conversion portions.
11. The solid-state imaging device according to claim 1 ,
wherein the unit pixel includes an optical waveguide which guides light to the first and second photoelectric conversion portions, and
wherein a plurality of the optical waveguides are disposed corresponding to the plurality of the first and second photoelectric conversion portions.
12. The light detecting device according to claim 1 , wherein the first floating diffusion region and the second floating diffusion region are disposed in a semiconductor substrate.
13. The light detecting device according to claim 1 , wherein at least one of the first photoelectric conversion portions is disposed adjacent to at least one of the second photoelectric conversion portions.
14. The light detecting device according to claim 1 , wherein the unit pixel includes a first amplification transistor and a second amplification transistor, each of which is electrically connected to the first floating diffusion region and the second floating diffusion region.
15. The light detecting device of claim 1 , wherein the first floating diffusion region and the second floating diffusion region are electrically connected.
16. A method of manufacturing a solid-state imaging device comprising the step of forming the solid-state imaging device by disposing a plurality of unit pixels in an imaging area which captures a color image, wherein the step of forming the unit pixels includes the steps of:
forming a plurality of first photoelectric conversion portions and a plurality of second photoelectric conversion portions which are configured to receive light of the same color to generate signal charges;
disposing a plurality of first transfer gates in the plurality of the first photoelectric conversion portions, which first transfer gates are disposed to transfer the signal charges from the first photoelectric conversion portions;
disposing a plurality of second transfer gates in the plurality of the second photoelectric conversion portions, which second transfer gates are disposed to transfer the signal charges from the second photoelectric conversion portions;
forming a first floating diffusion region to which signal charges from the plurality of the first photoelectric conversion portions are transferred through the plurality of the first transfer gates; and
forming a second floating diffusion region to which signal charges from the plurality of the second photoelectric conversion portions are transferred through the plurality of the second transfer gates.
17. An electronic apparatus having a solid-state imaging device comprising an imaging area where a plurality of unit pixels are disposed to capture a color image, wherein:
each of the unit pixels includes (a) a plurality of first photoelectric conversion portions and a plurality of second photoelectric conversion portions; (b) a plurality of first transfer gates, each of which is disposed in a respective one of the first photoelectric conversion portions to transfer signal charges from the respective photoelectric conversion portion; (c) a plurality of second transfer gates, each of which is disposed in a respective one of the second photoelectric conversion portions to transfer signal charges from the respective second photoelectric conversion portion; (d) a first floating diffusion region to which are transferred the signal charges from the first photoelectric conversion portions by the first transfer gates and (e) a second floating diffusion region to which are transferred the signal charges from the second photoelectric conversion portions by the second transfer gates,
the first and second photoelectric conversion portions are configured to receive light of the same color to generate the signal charges, and
the electronic apparatus is configured such that the signal charges transferred from the first and second photoelectric conversion portions to the first and second floating diffusion regions are added together to be output as an electrical signal.