IP Library › Granted Patent US 12,048,207
Granted Patent B2
US 12,048,207 · App. 18/138,866 · Granted Jul 23, 2024

Display device and method for manufacturing the same

Inventors: Shunpei Yamazaki (Tokyo, JP); Masakatsu Ohno (Tochigi, JP); Hiroki Adachi (Tochigi, JP); Satoru Idojiri (Tochigi, JP); Koichi Takeshima (Tochigi, JP)
Assignee: Semiconductor Energy Laboratory Co., Ltd.
H10K59/126B23K26/04B23K26/0617B23K26/0622B23K26/0643B23K26/0648B23K26/083H01L27/1225H01L27/1266H01L29/24H01L29/66969H01L29/78603H01L29/7869H10K50/8426H10K50/844H10K59/1213H10K59/124H10K59/38H10K71/00H10K71/421H10K71/50H10K71/80H10K77/111H10K50/18H10K50/865H10K59/12H10K59/1201H10K2102/311H10K2102/351H10N30/074Y02E10/549Y02P70/50
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Quick Facts
Patent No.
US 12,048,207
App. No.
18/138,866
Granted
Jul 23, 2024
Kind
B2
Abstract

A first organic resin layer is formed over a first substrate; a first insulating film is formed over the first organic resin layer; a first element layer is formed over the first insulating film; a second organic resin layer is formed over a second substrate; a second insulating film is formed over the second organic resin layer; a second element layer is formed over the second insulating film; the first substrate and the second substrate are bonded; a first separation step in which adhesion between the first organic resin layer and the first substrate is reduced; the first organic resin layer and a first flexible substrate are bonded with a first bonding layer; a second separation step in which adhesion between the second organic resin layer and the second substrate is reduced; and the second organic resin layer and a second flexible substrate are bonded with a second bonding layer.

Claims (37)

1. A semiconductor device comprising:

an oxide semiconductor layer over a substrate;

a first insulating film in contact with a side surface of the oxide semiconductor layer;

a first conductive layer over the first insulating film, the first conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a second insulating film in contact with a side surface of the oxide semiconductor layer;

a second conductive layer over the second insulating film, the second conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a third insulating film over and in contact with the oxide semiconductor layer, the third insulating film being spaced apart from the first insulating film and the second insulating film; and

a third conductive layer over the third insulating film.

2. The semiconductor device according to claim 1 , wherein the first conductive layer and the second conductive layer are a source electrode and a drain electrode, and the third conductive layer is a gate electrode.

3. The semiconductor device according to claim 1 , further comprising a fourth insulating in contact with a portion of a top surface of the oxide semiconductor layer.

4. The semiconductor device according to claim 1 , wherein the first conductive layer, the second conductive layer and the third conductive layer are formed from a same step.

5. A semiconductor device comprising:

an oxide semiconductor layer over a substrate;

a first insulating film in contact with a side surface of the oxide semiconductor layer;

a first conductive layer over the first insulating film, the first conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a second insulating film in contact with a side surface of the oxide semiconductor layer;

a second conductive layer over the second insulating film, the second conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a third insulating film over and in contact with the oxide semiconductor layer, the third insulating film being spaced apart from the first insulating film and the second insulating film; and

a third conductive layer over the third insulating film,

wherein the third insulating film has a tapered side surface.

6. The semiconductor device according to claim 5 , wherein the first conductive layer and the second conductive layer are a source electrode and a drain electrode, and the third conductive layer is a gate electrode.

7. The semiconductor device according to claim 5 , further comprising a fourth insulating in contact with a portion of a top surface of the oxide semiconductor layer.

8. The semiconductor device according to claim 5 , wherein the first conductive layer, the second conductive layer and the third conductive layer are formed from a same step.

9. A semiconductor device comprising:

an oxide semiconductor layer over a substrate;

a first insulating film in contact with a side surface of the oxide semiconductor layer;

a first conductive layer over the first insulating film, the first conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a second insulating film in contact with a side surface of the oxide semiconductor layer;

a second conductive layer over the second insulating film, the second conductive layer being in contact with a portion of a top surface of the oxide semiconductor layer;

a third insulating film over and in contact with the oxide semiconductor layer, the third insulating film being spaced apart from the first insulating film and the second insulating film;

a third conductive layer over the third insulating film; and

a fourth conductive layer under the oxide semiconductor layer,

wherein the third insulating film has a tapered side surface, and

wherein a width of the fourth conductive layer is larger than a width of the oxide semiconductor layer in a channel length direction.

10. The semiconductor device according to claim 9 , wherein the first conductive layer and the second conductive layer are a source electrode and a drain electrode, and the third conductive layer is a gate electrode.

11. The semiconductor device according to claim 9 , further comprising a fourth insulating in contact with a portion of a top surface of the oxide semiconductor layer.

12. The semiconductor device according to claim 9 , wherein the first conductive layer, the second conductive layer and the third conductive layer are formed from a same step.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 25, 2023
From: YAMAZAKI, SHUNPEI; OHNO, MASAKATSU; ADACHI, HIROKI; IDOJIRI, SATORU; TAKESHIMA, KOICHI
To: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Reel/Frame 063430/0796 →
Priority Claims (4)
JP 2013-249631 · Dec 2, 2013 · national
JP 2013-256872 · Dec 12, 2013 · national
JP 2013-272176 · Dec 27, 2013 · national
JP 2014-047348 · Mar 11, 2014 · national
Continuity (9)
Continuation 17307088 · May 4, 2021
Continuation 16872806 · May 12, 2020
Continuation 16856139 · Apr 23, 2020
Continuation 16204102 · Nov 29, 2018
Continuation 15894117 · Feb 12, 2018
Continuation 15416166 · Jan 26, 2017
Continuation 15145246 · May 3, 2016
Continuation 14553251 · Nov 25, 2014
Related Publication 20230263018A1 · Aug 17, 2023
Cited By (1)
US 12,738,196