Source/drain epitaxial layers for transistors
View Patent ↗The present disclosure is directed to methods for forming source/drain (S/D) epitaxial structures with a hexagonal shape. The method includes forming a fin structure that includes a first portion and a second portion proximate to the first portion, forming a gate structure on the first portion of the fin structure, and recessing the second portion of the fin structure. The method further includes growing a S/D epitaxial structure on the recessed second portion of the fin structure, where growing the S/D epitaxial structure includes exposing the recessed second portion of the fin structure to a precursor and one or more reactant gases to form a portion of the S/D epitaxial structure. Growing the S/D epitaxial structure further includes exposing the portion of the S/D structure to an etching chemistry and exposing the portion of the S/D epitaxial structure to a hydrogen treatment to enhance growth of the S/D epitaxial structure.
1. A semiconductor structure, comprising:
a substrate;
a fin structure on the substrate comprising a first portion and a second portion taller than the first portion;
an isolation layer on the substrate covering bottom sidewalls of the second portion of the fin structure and sidewalls of the first portion of the fin structure; and
a source/drain (S/D) epitaxial structure on the first portion of the fin structure separated from adjacent S/D epitaxial structures and substantially covering an end portion of the second portion of the fin structure, wherein a distance between a top corner of the end portion and a facet of the S/D epitaxial structure proximal to the top corner is greater than about 2 nm.
2. The semiconductor structure of claim 1 , wherein the facet proximal to the top corner of the second portion of the fin structure is parallel to a (111) crystal plane.
3. The semiconductor structure of claim 1 , wherein the S/D epitaxial structure has a hexagonal shape.
4. The semiconductor structure of claim 1 , wherein a top surface of the S/D epitaxial structure is above a top surface of the second portion of the fin structure, and wherein the top surface of the S/D epitaxial structure is substantially planar and parallel to the top surface of the second portion of the fin structure.
5. The semiconductor structure of claim 1 , wherein a side surface of the S/D epitaxial structure is in contact with a side surface of the second portion of the fin structure.
6. The semiconductor structure of claim 1 , wherein another facet of the S/D epitaxial structure parallel to a (111) crystal plane adjoins the facet and forms an angle greater than about 70° with the facet.
7. The semiconductor structure of claim 1 , wherein a width of the S/D epitaxial structure along a direction perpendicular to a (110) crystal plane is between about 5 nm and about 100 nm.
8. The semiconductor structure of claim 1 , wherein the S/D epitaxial structure comprises a top surface with a width along a direction perpendicular to a (110) crystal plane, the width between about 2 nm and about 80 nm.
9. The semiconductor structure of claim 1 , further comprising:
spacers on the isolation layer abutting bottom sidewalls of the S/D epitaxial structure; and
a gate structure on the second portion of the fin structure, wherein the gate structure abuts a side surface of the S/D epitaxial structure.
10. A semiconductor structure, comprising:
a substrate;
a fin structure on the substrate comprising a first end portion, a second end portion, and a middle portion between the first and second end portions, wherein the first and second end portions are recessed portions of the fin structure;
a gate structure on the middle portion of the fin structure;
first and second source/drain (S/D) epitaxial structures on the respective first and second end portions of the fin structure and separated from adjacent S/D epitaxial structures, wherein each of the first and second S/D epitaxial structures comprises a top surface above and parallel to the middle portion of the fin structure and a side surface adjacent to the top surface, and wherein a distance between the side surface and top corners of the middle portion of the fin structure is greater than about 2 nm; and
sidewall spacers in contact with bottom sidewalls of the first and second S/D epitaxial structures.
11. The semiconductor structure of claim 10 , wherein the side surface is parallel to a (111) crystal plane.
12. The semiconductor structure of claim 10 , wherein each of the first and second S/D epitaxial structures has a hexagonal shape.
13. The semiconductor structure of claim 10 , wherein the first and second S/D epitaxial structures substantially cover end surfaces of the second portion of the fin structure.
14. The semiconductor structure of claim 10 , wherein each of the first and second S/D epitaxial structures comprises an additional side surface adjacent to the side surface and parallel to a (111) crystal plane, and wherein an angle between the side surface and the additional side surface ranges from about 108° to about 180°.
15. The semiconductor structure of claim 10 , wherein the top surface of the S/D epitaxial structure is perpendicular to a (110) crystal plane and a width of the top surface is between about 2 nm and about 80 nm.
16. A semiconductor structure, comprising:
a substrate;
a fin structure on the substrate comprising a first portion, a second portion, and a third portion, wherein the second portion is a recessed middle portion between the first and third portions;
an isolation layer on the substrate surrounding the fin structure, wherein the second portion of the fin structure is recessed below a top surface of the isolation layer; and
a source/drain (S/D) epitaxial structure on the second portion of the fin structure, wherein:
the S/D epitaxial structure substantially covers end surfaces of the first and second portions of the fin structure and is separated from adjacent S/D epitaxial structures;
the S/D epitaxial structure comprises a first side facet, a second side facet, and a top surface between the first and second side facts; and
a distance between the first side facet of the S/D epitaxial structure and top corners of the first portion of the fin structure is greater than about 2 nm.
17. The semiconductor structure of claim 16 , wherein the side facet is parallel to a (111) crystal plane.
18. The semiconductor structure of claim 16 , wherein the S/D epitaxial structure has a hexagonal shape.
19. The semiconductor structure of claim 16 , wherein the S/D epitaxial structure comprises a top facet above and parallel to a top surface of the second portion of the fin structure.
20. The semiconductor structure of claim 16 , wherein the S/D epitaxial structure comprises an additional side facet adjacent to the side facet, and wherein an angle between the side facet and the additional side facet ranges from about 108° to about 180°.