Semiconductor device having spacer between contract patterns
A semiconductor device includes a first impurity region on a substrate; a channel pattern protruding from an upper surface of the substrate, the channel pattern extending in a first direction substantially parallel to the upper surface of the substrate; a second impurity region on the channel pattern, the second impurity region covering an entire upper surface of the channel pattern; a gate structure on a sidewall of the channel pattern and the substrate adjacent to the channel pattern; a first contact pattern on the second impurity region; a second contact pattern that is electrically connected to the gate structure; and a spacer between the first contact pattern and the second contact pattern. The spacer completely surrounds the second contact pattern in plan view, and the first contact pattern partially surrounds the second contact pattern in plan view.
1. A semiconductor device, comprising:
a first impurity region on a substrate;
a channel pattern protruding from an upper surface of the substrate, the channel pattern extending in a first direction substantially parallel to the upper surface of the substrate;
a second impurity region on the channel pattern, the second impurity region covering an entire upper surface of the channel pattern;
a gate structure on a sidewall of the channel pattern and the substrate adjacent to the channel pattern;
a first contact pattern on the second impurity region, the first contact pattern comprising a first barrier pattern that contacts the second impurity region, and a first metal pattern;
a second contact pattern that is electrically connected to the gate structure, the second contact pattern comprising a second metal pattern and a second barrier layer formed on sidewalls and a bottom of the second metal pattern; and
a spacer between the first contact pattern and the second contact pattern, the spacer contacting the first barrier pattern, the second barrier pattern, and the first metal pattern,
wherein the second contact pattern has four sides,
wherein the spacer surrounds the four sides of the second contact pattern in plan view,
wherein three sides of the four sides of the second contact pattern face the first contact pattern, and
wherein the first contact pattern surrounds the three sides of the second contact pattern in plan view.
2. The semiconductor device of claim 1 , wherein the spacer contacts a portion of the gate structure and contacts a sidewall of each of the first contact pattern and the second contact pattern.
3. The semiconductor device of claim 1 , wherein the channel pattern includes a plurality of channel patterns, and
wherein a portion of the second contact pattern is disposed between the plurality of channel patterns.
4. The semiconductor device of claim 1 , wherein the channel pattern includes a plurality of channel patterns, and
wherein the first contact pattern is disposed on the plurality of channel patterns, and between the plurality of channel patterns.
5. The semiconductor device of claim 4 , wherein the first contact pattern is electrically connected to a plurality of second impurity regions on the plurality of channel patterns.
6. The semiconductor device of claim 1 , wherein the second contact pattern is spaced apart from a sidewall extending in the first direction of the channel pattern.
7. The semiconductor device of claim 1 , wherein upper surfaces of the first contact pattern and the second contact pattern are coplanar with each other.
8. The semiconductor device of claim 1 , wherein a portion of the second contact pattern extends through an edge of the first contact pattern.
9. The semiconductor device of claim 1 , wherein the spacer contacts at least an upper sidewall of the second contact pattern.
10. The semiconductor device of claim 1 , wherein the gate structure includes a gate insulation pattern and a gate electrode,
wherein the gate structure has a U-shape in cross sectional view, and
wherein the second contact pattern contacts a surface of the gate electrode.
11. The semiconductor device of claim 1 , wherein an upper surface of the spacer is coplanar with an upper surface of the second contact pattern.
12. The semiconductor device of claim 1 , wherein the second contact pattern has a lower width in a second direction perpendicular to the first direction greater than an upper width in the second direction.
13. A semiconductor device, comprising:
a first impurity region on a substrate;
a plurality of channel patterns protruding from an upper surface of the substrate, each of the plurality of channel patterns extending in a first direction substantially parallel to an upper surface of the substrate and being arranged in a second direction perpendicular to the first direction;
second impurity regions covering an entire upper surface of each of the plurality of channel patterns;
a gate structure on sidewalls of the plurality of channel patterns and the substrate between the plurality of channel patterns;
a first contact pattern comprising a first barrier pattern that contacts entire upper surfaces of the second impurity regions, and a first metal pattern;
a second contact pattern electrically connected to the gate structure, the second contact pattern comprising a second metal pattern and a second barrier pattern formed on sidewalls and a bottom of the second metal pattern; and
a spacer between the first contact pattern and the second contact pattern, the spacer contacting the first barrier pattern, the second barrier pattern, and the first metal pattern,
wherein the second contact pattern has four sides,
wherein the spacer surrounds the four sides of the second contact pattern in plan view,
wherein the first contact pattern is disposed on the plurality of channel patterns, and between the plurality of channel patterns,
wherein three sides of the four sides of the second contact pattern face the first contact pattern, and
wherein the first contact pattern surrounds the three sides of the second contact pattern in plan view.
14. The semiconductor device of claim 13 , wherein the spacer covers a sidewall of the first contact pattern and a sidewall of a second impurity region on a channel pattern.
15. The semiconductor device of claim 13 , wherein a first portion of the second contact pattern is disposed between the plurality of channel patterns, and a second portion of the second contact pattern is spaced apart from a region between the plurality of channel patterns in the first direction.
16. The semiconductor device of claim 13 , wherein a portion of the second contact pattern extends through an edge of the first contact pattern.
17. The semiconductor device of claim 13 , wherein upper surfaces of the first contact pattern and the second contact pattern are coplanar with each other.
18. A semiconductor device, comprising:
a first impurity region on a substrate;
a channel pattern protruding from an upper surface of the substrate, the channel pattern extending in a first direction substantially parallel to the upper surface of the substrate;
a second impurity region on the channel pattern, the second impurity region covering an entire upper surface of the channel pattern;
a gate structure on a sidewall of the channel pattern and the substrate adjacent to the channel pattern;
a first contact pattern on the second impurity region, the first contact pattern comprising a first barrier pattern that contacts the second impurity region, and a first metal pattern, the first contact pattern extending in the first direction;
a second contact pattern electrically connected to the gate structure, the second contact pattern comprising a second metal pattern and a second barrier pattern formed on sidewalls and a bottom of the second metal pattern; and
a spacer between the first contact pattern and the second contact pattern, the spacer contacting the first barrier pattern, the second barrier pattern, and the first metal pattern,
wherein the second contact pattern has four sides,
wherein the spacer surrounds the four sides of the second contact pattern in plan view,
wherein three sides of the four sides of the second contact pattern face the first contact pattern,
wherein the first contact pattern surrounds the three sides of the second contact pattern in plan view, and
wherein the second contact pattern is spaced apart from a sidewall extending in the first direction of the channel pattern.
19. The semiconductor device of claim 18 , wherein a portion of the second contact pattern extends through an edge in a second direction perpendicular to the first direction of the first contact pattern.
20. The semiconductor device of claim 18 , wherein upper surfaces of the first contact pattern and the second contact pattern are coplanar with each other.