Nanostructure field-effect transistor (NANO-FET) with gates including a seam in p-type work function metal between nanostructures and methods of forming
A device includes a first nanostructure; a second nanostructure over the first nanostructure; a first high-k gate dielectric disposed around the first nanostructure; a second high-k gate dielectric being disposed around the second nanostructure; and a gate electrode over the first high-k gate dielectric and the second high-k gate dielectric. A portion of the gate electrode between the first nanostructure and the second nanostructure comprises a first portion of a p-type work function metal filling an area between the first high-k gate dielectric and the second high-k gate dielectric.
1. A device comprising:
a first semiconductor structure over a semiconductor substrate;
a second semiconductor structure over and separated from the first semiconductor structure by a spacing;
a first gate dielectric around the first semiconductor structure;
a second gate dielectric around the second semiconductor structure; and
a p-type work function metal between the first gate dielectric and the second gate dielectric, wherein the spacing that separates the first semiconductor structure from the second semiconductor structure is completely filled by the first gate dielectric, the second gate dielectric, and the p-type work function metal, wherein a first portion of the p-type work function metal has a first thickness in the spacing that separates the first semiconductor structure from the second semiconductor structure, wherein a ratio of the first thickness to a minimum width of the p-type work function metal is in a range of 0.03 to 1, the minimum width of the p-type work function metal being measured in a direction perpendicular to a direction in which the first thickness is measured.
2. The device of claim 1 , wherein the p-type work function metal comprises titanium nitride, tantalum nitride, tungsten nitride, or molybdenum nitride.
3. The device of claim 1 , wherein a second portion of the p-type work function metal on a sidewall of the first semiconductor structure has a second thickness, and wherein the first thickness is greater than the second thickness.
4. The device of claim 3 , wherein the second thickness is at least one half of the first thickness.
5. The device of claim 3 , wherein the second thickness is in a range of 30 Å to 50 Å.
6. The device of claim 1 , wherein the p-type work function metal comprises a seam between the first semiconductor structure and the second semiconductor structure.
7. The device of claim 1 , wherein the minimum width of the p-type work function metal is in a range of 10 nm to 180 nm.
8. The device of claim 1 , wherein the p-type work function metal has the minimum width in the spacing between the first semiconductor structure and the second semiconductor structure.
9. The device of claim 1 , further comprising an adhesion layer over the p-type work function metal, wherein the adhesion layer does not extend between the first semiconductor structure and the second semiconductor structure.
10. The device of claim 9 , further comprising a fill metal over the adhesion layer.
11. A transistor comprising:
a first nanostructure over a semiconductor substrate;
a second nanostructure over the first nanostructure;
a gate dielectric surrounding the first nanostructure and the second nanostructure; and
a gate electrode over the gate dielectric, wherein the gate electrode comprises:
a p-type work function metal, wherein the p-type work function metal extends a first distance from a top surface of the gate dielectric on the first nanostructure to a bottom surface of the gate dielectric on the second nanostructure, wherein the p-type work function metal has a seam between the first nanostructure and the second nanostructure, wherein the seam extends a second distance from a first sidewall of the p-type work function metal to a second sidewall of the p-type work function metal, and wherein a ratio of the first distance to the second distance is in a range of 0.03 to 1; and
a fill metal over the p-type work function metal.
12. The transistor of claim 11 , wherein the p-type work function metal has a thickness on a top surface of the second nanostructure, wherein the first distance is greater than the thickness.
13. The transistor of claim 11 , wherein the p-type work function metal comprises titanium nitride, tantalum nitride, tungsten nitride, or molybdenum nitride.
14. The transistor of claim 11 , wherein the gate electrode further comprises an adhesion layer between the fill metal and the p-type work function metal.
15. A method comprising:
depositing a first gate dielectric material around a first nanostructure and a second gate dielectric material around a second nanostructure, the first nanostructure being disposed over the second nanostructure, the first gate dielectric material being spaced apart from the second gate dielectric material by a gap having a first height; and
depositing a p-type work function metal on the first gate dielectric material and the second gate dielectric material, wherein depositing the p-type work function metal comprises depositing the p-type work function metal until the p-type work function metal fills an entirety of the gap, wherein depositing the p-type work function metal comprises depositing the p-type work function metal to have a minimum width between the first nanostructure and the second nanostructure, wherein a ratio of the first height to the minimum width is in a range of 0.03 to 1.
16. The method of claim 15 , further comprising:
depositing an adhesion layer over the p-type work function metal; and
depositing a fill metal over the adhesion layer.
17. The method of claim 15 , wherein depositing the p-type work function metal further comprises depositing the p-type work function metal to have a seam between the first nanostructure and the second nanostructure.
18. The method of claim 17 , wherein the minimum width of the p-type work function metal is a width of the seam.
19. The method of claim 15 , wherein depositing the p-type work function metal comprises depositing the p-type work function metal to have a thickness in a range of 30 Å to 50 Å on a sidewall or a top surface of the first nanostructure.
20. The method of claim 15 , wherein the p-type work function metal comprises titanium nitride, tantalum nitride, tungsten nitride, or molybdenum nitride.