Gate dielectric for thin film oxide transistors
A thin film transistor (TFT) structure. In an example, the TFT includes a gate electrode, a first layer comprising an oxide semiconductor material, and a second layer between the first layer and the gate electrode. The second layer is crystalline and is in contact with the first layer, and includes zirconium and oxygen. The TFT includes a first contact coupled to the first layer at a first location, and a second contact coupled to the first layer at a second location. In some cases, the second layer further includes hafnium. In some cases, the TFT includes a third layer between of the gate electrode and the second layer, the third layer comprising a metal and oxygen. The gate electrode may also include the metal. In some cases, hydrogen is present at an interface between the gate electrode and the second layer.
1. A thin film transistor, comprising:
a gate electrode;
a first layer comprising an oxide semiconductor material;
a second layer between the first layer and the gate electrode, and in contact with the first layer, the second layer comprising zirconium and oxygen, wherein the second layer is crystalline, and wherein hydrogen has a local maximum concentration at an interface between the gate electrode and the second layer;
a first contact coupled to the first layer at a first location; and
a second contact coupled to the first layer at a second location.
2. The thin film transistor of claim 1 , wherein the second layer further includes hafnium.
3. The thin film transistor of claim 1 , further comprising insulator material on the first layer, wherein the first and second contacts are in the insulator material.
4. The thin film transistor of claim 3 , wherein the first and second contacts include one, two or all three of:
a fill material comprising a metal;
a liner layer between the insulator material and the fill material; and
a seed layer between the liner layer and the fill material, the seed layer comprising the metal.
5. The thin film transistor of claim 1 , wherein a thickness of the second layer is between 45 Å and 65 Å.
6. The thin film transistor of claim 1 , wherein the thin film transistor is configured to operate at temperatures up to 150° C.
7. The thin film transistor of claim 1 , wherein the oxide semiconductor material is an amorphous oxide semiconductor material.
8. The thin film transistor of claim 1 , wherein the interface between the gate electrode and the second layer is along a bottom surface of the second layer, an interface between the first layer and the second layer is along a bottom surface of the first layer, the first contact is coupled to a top surface of the first layer, and the second contact is coupled to the top surface of the first layer.
9. An integrated circuit comprising:
a gate electrode;
a first layer on top of the gate electrode, the first layer comprising a metal and oxygen, wherein hydrogen is built up at an interface between the gate electrode and the first layer;
a second layer on top of the first layer, the second layer comprising a dielectric including zirconium and oxygen, wherein the second layer is crystalline;
a third layer on top of and in contact with the second layer, the third layer comprising a semiconductor material; and
a fourth layer over the third layer, the fourth layer including an insulator, a source contact, and a drain contact.
10. The integrated circuit of claim 9 , wherein the dielectric further includes hafnium.
11. The integrated circuit of claim 9 , wherein a thickness of the second layer is between 45 Å and 80 Å.
12. The integrated circuit of claim 9 , wherein the gate electrode comprises the metal of the first layer.
13. The integrated circuit of claim 12 , wherein the metal is titanium and the gate electrode further includes nitrogen.
14. The integrated circuit of claim 9 , wherein the third layer is an oxide semiconductor material.
15. The integrated circuit of claim 9 , wherein the interface between the gate electrode and the first layer is along a bottom surface of the first layer, an interface between the first layer and the second layer is along a bottom surface of the second layer, and an interface between the third layer and the second layer is along a top surface of the second layer.
16. An integrated circuit, comprising:
a gate electrode;
a first layer comprising a semiconductor material;
a second layer between the first layer and the gate electrode, and in contact with the first layer, the second layer comprising a crystalline high-k dielectric material, wherein hydrogen is stacked up at an interface between the gate electrode and the second layer;
a first contact coupled to the first layer at a first location; and
a second contact coupled to the first layer at a second location.
17. The integrated circuit of claim 16 , wherein the second layer comprises zirconium and one or more of oxygen, nitrogen, or carbon.
18. The integrated circuit of claim 17 , wherein the second layer further comprises one or more of hafnium, silicon, aluminum, tantalum, titanium, yttrium, or lanthanum.
19. The integrated circuit of claim 16 , wherein the semiconductor material is an oxide semiconductor material.
20. The integrated circuit of claim 16 , wherein the semiconductor material is amorphous.