Display apparatus with multilayer encapsulation layer and method of manufacturing the same
A display apparatus includes a base substrate, a light emitting structure disposed on the base substrate, and a thin film encapsulation layer disposed on the light emitting structure and including at least one inorganic layer and at least one organic layer. The at least one inorganic layer includes a high density layer having a density of greater than or equal to about 2.0 g/cm 3 and a low density layer having a density of less than about 2.0 g/cm 3 . The high density layer and the low density layer are in contact with each other.
1. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer over the light emitting structure and the base substrate in a thickness direction, wherein
the thin film encapsulation layer includes:
a first inorganic layer; and
at least one organic layer disposed on the first inorganic layer,
the first inorganic layer includes:
a first-first density layer; and
a first-second density layer having a density lower than that of the first-first density layer and being in contact with the first-first density layer, and
each of the first-first density layer and the first-second density layer consists of a first chemical material including silicon and oxygen.
2. The display apparatus of claim 1 , wherein the first-first density layer is formed by performing densification on a part of the first-second density layer through plasma treatment.
3. The display apparatus of claim 1 , wherein the first chemical material further includes nitrogen.
4. The display apparatus of claim 1 , wherein the first-second density layer is disposed between the base substrate and the first-first density layer.
5. The display apparatus of claim 1 , wherein the first-first density layer is disposed between the base substrate and the first-second density layer.
6. The display apparatus of claim 1 , wherein the first-second density layer has a refractive index of less than about 1.7.
7. The display apparatus of claim 1 , wherein the first-first density layer has a thickness in a range between about 1 nm and about 1 μm.
8. The display apparatus of claim 1 , wherein the thin film encapsulation layer further includes a second inorganic layer disposed on the at least one organic layer.
9. The display apparatus of claim 8 , wherein
the second inorganic layer includes:
a second-first density layer; and
a second-second density layer having a density lower than that of the second-first density layer and being in contact with the second-first density layer, and
each of the second-first density layer and the second-second density layer consists of a second chemical material including silicon and oxygen.
10. The display apparatus of claim 9 , wherein the second-first density layer is formed by performing densification on a part of the second-second density layer through plasma treatment.
11. The display apparatus of claim 9 , wherein the second chemical material further includes nitrogen.
12. The display apparatus of claim 9 , wherein the second-second density layer is disposed between the at least one organic layer and the second-first density layer.
13. The display apparatus of claim 9 , wherein the second-first density layer is disposed between the at least one organic layer and the second-second density layer.
14. The display apparatus of claim 9 , wherein the second-second density layer has a refractive index of less than about 1.7.
15. The display apparatus of claim 9 , wherein the second second-first density layer has a thickness in a range between about 1 nm and about 1 μm.
16. A display apparatus comprising:
a base substrate;
a light emitting structure disposed on the base substrate; and
a thin film encapsulation layer covering the light emitting structure and the base substrate, wherein
the thin film encapsulation layer includes:
a first inorganic layer; and
at least one organic layer disposed on the first inorganic layer,
the first inorganic layer includes:
a first-first-first density layer;
a first-second-first density layer disposed on the first-first-first density layer; and
a first-second density layer disposed between the first-first-first density layer and the first-second-first density layer, the first-second density layer having a density lower than that of the first-first-first density layer and that of the first-second-first density layer and being in contact with the first-first-first density layer and the first-second-first density layer, and
each of the first-first-first density layer, the first-second-first density layer, and the first-second density layer consists of a first chemical material including silicon and oxygen.
17. The display apparatus of claim 16 , wherein the first chemical material further includes nitrogen.
18. The display apparatus of claim 16 , wherein the thin film encapsulation layer further includes a second inorganic layer disposed on the at least one organic layer.
19. The display apparatus of claim 18 , wherein
the second inorganic layer includes:
a second-first-first density layer;
a second-second-first density layer disposed on the second-first-first density layer; and
a second-second density layer disposed between the second-first-first density layer and the second-second-first density layer, the second-second density layer having a density lower than that of the second-first-first density layer and that of the second-second-first density layer and being in contact with the second-first-first density layer and the second-second-first density layer, and
each of the second-first-first density layer, the second-second-first density layer, and the second-second density layer consists of a second chemical material including silicon and oxygen.
20. The display apparatus of claim 19 , wherein the second chemical material further includes nitrogen.