Electronic device having stacked structures and method for manufacturing the same
A method for manufacturing an electronic device includes forming a first source layer including a trench, forming a first sacrificial layer in the trench, forming a first structure over the first source layer, wherein the first structure includes first material layers and second material layers which are alternately stacked over the each other, forming first openings passing through the first structure and extending to the first sacrificial layer, forming first channel layers in the first openings, forming a slit passing through the first structure and extending to the first sacrificial layer, forming a second opening by removing the first sacrificial layer through the slit, and forming a second source layer in the second opening, wherein the second source layer is coupled to the first channel layers.
1 . An electronic device comprising:
a stacked structure including conductive layers and insulating layers, the conductive layers arranged alternately with the insulating layers in a stacking direction;
a first polysilicon layer having a surface oriented toward the stacked structure in the stacking direction;
channel layers passing through the stacked structure, each of the channel layers including a first portion surrounded by the stacked structure and a second portion extending from the first portion toward the first polysilicon layer; and
a second polysilicon layer disposed between the channel layers at a level where the second portion is disposed, the second polysilicon layer being located between the first polysilicon layer and the stacked structure.
2 . The electronic device of claim 1 , further comprising a memory layer interposed between the stacked structure and each of the channel layers,
wherein the memory layer includes an end facing the first polysilicon layer, and
wherein the end of the memory layer does not reach the second portion of each of the channel layers to form a concave portion.
3 . The electronic device of claim 2 , wherein the first polysilicon layer and the second polysilicon layer form a source structure, and
wherein the source structure extends to fill the concave portion.
4 . The electronic device of claim 1 , wherein the conductive layers include a first conductive layer and second conductive layers, the first conductive layer being located between the second polysilicon layer and the second conductive layers.
5 . The electronic device of claim 4 , further comprising:
lower insulating layers passing through the first conductive layer and spaced apart from each other; and
a slit passing through the first conductive layer and the second conductive layers,
wherein the slit includes two ends respectively connected to the lower insulating layers, and
wherein each of the second conductive layers covers the lower insulating layers.
6 . The electronic device of claim 5 , wherein the first conductive layer is separated into line patterns by the lower insulating layers and the slit.
7 . The electronic device of claim 5 , wherein the channel layers are divided into a first group and a second group adjacent to each other in a first direction,
wherein the slit is disposed between the first group and the second group of the channel layers and extends in a second direction intersecting the first direction, and
wherein the lower insulating layers are spaced apart from each other in the second direction.
8 . The electronic device of claim 1 , further comprising a slit insulating layer passing through the insulating layers of the stacked structure,
wherein the slit insulating layer includes protrusions located between the insulating layers and located on sidewalls of the conductive layers.
9 . The electronic device of claim 1 , wherein the stacked structure includes a first structure and a second structure over the first structure,
wherein the conductive layers include first and second gate electrodes of memory cells,
wherein the first structure includes the first gate electrodes spaced apart from each other at a first interval,
wherein the second structure includes the second gate electrodes spaced apart from each other at a second interval, and
wherein one first electrode and one second electrode adjacent each other, among the first and second gate electrodes, are spaced apart from each other at a third interval greater than each of the first interval and the second interval.