Process solution composition for polymer treatment comprising a fluorine compound, a ketone solvent, and a polar aprotic solvent
The present disclosure relates to a process solution composition for polymer treatment comprising: a fluorine compound; a ketone-based solvent; and a polar aprotic solvent, wherein the ketone-based solvent is one or more selected from the group consisting of compounds represented by Chemical Formula 1 or Chemical Formula 2, and has an effect capable of preventing damage to various types of metals while improving the power of removing an adhesive polymer remaining on the wafer circuit surface in a semiconductor manufacturing process.
1 . A process solution composition for polymer treatment comprising:
A) 0.1 to 30% by weight of a fluorine compound;
B) from 5 to 90% by weight of one or more ketone-based solvent represented by the following Chemical Formula 1 or Chemical Formula 2;
wherein R 1 and R 2 are each independently a C 1 -C 18 linear or branched hydrocarbon group or a C 3 -C 18 cycloaliphatic hydrocarbon group;
R 3 and R 5 are each independently a C 1 -C 18 linear or branched aliphatic hydrocarbon group or a C 3 -C 18 cycloaliphatic hydrocarbon group; and
R 4 is a C 1 -C 18 linear or branched divalent aliphatic hydrocarbon group;
C) less than 4% by weight water; and
D) one or more polar aprotic solvent(s) selected from the group consisting of:
i) an amide-based solvent selected from the group consisting of N,N-dimethylformamide, N,N-diethylformamide, N,N-dipropylformamide, N,N-dimethylacetamide, N,N-diethylacetamide, N,N-dipropylacetamide, N-ethyl-N-methylacetamide, N,N-dimethylpropionamide, N,N-dimethylbutyramide, N,N-dimethylisobutyramide, N,N-dimethylpentanamide, N,N-dimethylpropanamide, N,N-diethylpropanamide, and N,N-dibutylpropanamide;
ii) a morpholine-based solvent selected from the group consisting of N-methylmorpholine, N-ethylmorpholine, N-arylmorpholine, N-butylmorpholine, and N-isobutylmorpholine;
iii) a pyrrolidine-based solvent selected from the group consisting of 1-ethylpyrrolidine, 1-propylpyrrolidine, 1-butylpyrrolidine, tert-butyl pyrrolidine, 1-(1-phenylpentan-2-yl) pyrrolidine, and 1-(1-cyclohexen-1-yl) pyrrolidine;
iv) a pyrrolidone-based solvent selected from the group consisting of N-methylpyrrolidone, N-ethylpyrrolidone, and N-vinylpyrrolidone;
v) a urea-based solvent selected from the group consisting of tetramethylurea, tetraethylurea, and tetrabutylurea;
vi) a phosphate-based solvent selected from the group consisting of triethyl phosphate, tributyl phosphate, triamyl phosphate, and triaryl phosphate;
vii) an oxazolidone-based solvent selected from the group consisting of 2-oxazolidone and 3-methyl-2-oxazolidone; and
viii) a piperazine-based solvent selected from the group consisting of dimethylpiperazine and dibutylpiperazine, wherein other than water, the process solution composition does not comprise a compound comprising a hydroxide group.
2 . The process solution composition of claim 1 , wherein the ketone-based solvent includes a compound having the sum of carbon atoms of 3 or more and 30 or less.
3 . The process solution composition of claim 1 , wherein the ketone-based solvent and the polar aprotic solvent have a mixing ratio of 1:9 to 9:1.
4 . The process solution composition of claim 1 , wherein the mixed solvent of the ketone-based solvent and the polar aprotic solvent has a Hansen solubility parameter value range satisfying the following:
δ D : 15.5 to 19.0 [MPa 1/2 ]
δ P : 7.5 to 15.5 [MPa 1/2 ]
δ H : 4.5 to 9.5 [MPa 1/2 ].
5 . The process solution composition of claim 1 , wherein the ketone-based solvent is one or more selected from the group consisting of 2-butanone, dicyclopropyl ketone, cyclopropyl methyl ketone, 3-pentanone, 2-pentanone, 3-methyl-2-pentanone, acetylacetone, 4-methyl-2-pentanone, 2-methyl-3-pentanone, 3-hexanone, 2-hexanone, 1-cyclopentylethanone, 3-methyl-2-hexanone, 2-methyl-3-hexanone, isoamyl ketone, amyl ketone, 4-heptanone, 3-heptanone, 2-heptanone, 5-nonanone, 2,4-dimethyl-3-pentanone, ethyl isobutyl ketone, 3-octanone, 5-methyl-2-hexanone, 5-methyl-3-heptanone, 3-methyl-4-heptanone, 2,5-dimethyl-3-hexanone, 2,6-dimethyl-4-hexanone, 2-undecanone, and 2,6-dimethyl-4-heptanone.
6 . The process solution composition of claim 1 , wherein the fluorine compound is one or more selected from the group consisting of alkylammonium fluoride, alkylphosphonium fluoride, and alkylsulfonium fluoride.
7 . The process solution composition of claim 1 , wherein the process solution composition for polymer treatment removes a reticulated polymer and a linear polymer.