Barrier-free approach for forming contact plugs
A method includes etching a dielectric layer of a substrate to form an opening in the dielectric layer, forming a metal layer extending into the opening, performing an anneal process, so that a bottom portion of the metal layer reacts with a semiconductor region underlying the metal layer to form a source/drain region, performing a plasma treatment process on the substrate using a process gas including hydrogen gas and a nitrogen-containing gas to form a silicon-and-nitrogen-containing layer, and depositing a metallic material on the silicon-and-nitrogen-containing layer.
1 . A method comprising:
etching a dielectric layer to form an opening, wherein a conductive region is exposed to the opening;
performing a thermal soaking process on the dielectric layer and the conductive region using a silicon-containing process gas;
after the thermal soaking process, performing a plasma treatment process directly on the dielectric layer using a process gas comprising hydrogen and nitrogen to form a silicon-and-nitrogen-containing layer; and
depositing a metallic material on the silicon-and-nitrogen-containing layer, wherein the metallic material is electrically coupled to the conductive region.
2 . The method of claim 1 , wherein the thermal soaking process is performed at a temperature in a range between about 250° C. and about 350° C.
3 . The method of claim 1 , wherein at a time the plasma treatment process is finished, the silicon-and-nitrogen-containing layer is free from metal therein.
4 . The method of claim 1 further comprising:
before the plasma treatment process, forming a metal layer extending into the opening; and
performing an anneal process, so that a bottom portion of the metal layer reacts with a semiconductor region underlying the metal layer to form the conductive region that comprises silicide.
5 . The method of claim 1 , wherein when the plasma treatment process is performed, a sidewall of the dielectric layer is exposed to the opening and exposed to the process gas.
6 . The method of claim 1 , wherein the plasma treatment process and at least a part of the depositing the metallic material are in-situ performed without vacuum break therebetween.
7 . The method of claim 6 , wherein the depositing the metallic material comprises depositing a metal seed layer, and wherein the plasma treatment process and the depositing the metal seed layer are in-situ performed without vacuum break in between.
8 . The method of claim 1 , wherein the plasma treatment process results in a mono layer of Si-N bonds to be formed.
9 . The method of claim 1 , wherein the plasma treatment process is performed using a plasma generated from a process gas, and wherein the dielectric layer is exposed to, and is in contact with, the plasma.
10 . The method of claim 1 , wherein the process gas comprising hydrogen (H 2 ) and nitrogen (N 2 ).
11 . The method of claim 1 , wherein the process gas comprises ammonia (NH 3 ).
12 . A method comprising:
etching a dielectric layer of a wafer to form an opening in the dielectric layer;
forming a silicide region on a source/drain region and in the opening;
performing a plasma treatment process using a process gas comprising hydrogen and nitrogen, wherein the process gas is fed into the opening, and wherein the plasma treatment process is performed on the silicide region; and
after the plasma treatment process, depositing a metallic layer comprising a metal on the dielectric layer, wherein a part of the metallic layer is deposited in the opening, wherein covalence Si—N-metal bonds are formed between the metallic layer and the dielectric layer, wherein the metal comprised in the covalence Si—N-metal bonds is in the metallic layer, and wherein the plasma treatment process and the depositing the metallic layer are performed in a same vacuum environment.
13 . The method of claim 12 further comprising, before the plasma treatment process, depositing a silicon layer on the dielectric layer.
14 . The method of claim 13 , wherein during the plasma treatment process, the silicon layer forms Si—N bonds with the process gas.
15 . The method of claim 14 , wherein the metallic layer is attached with the Si—N bonds to form the covalence Si—N-metal bonds.
16 . The method of claim 12 further comprising forming a contact plug for a transistor, wherein the dielectric layer is formed over the contact plug, and wherein the plasma treatment process is performed on the contact plug through the opening in the dielectric layer.
17 . The method of claim 12 , wherein the plasma treatment process is performed using the process gas that comprises ammonia.
18 . A method comprising:
forming a contact opening in a dielectric layer;
forming a silicide region in the contact opening and on a surface of a source/drain region;
performing a treatment process directly on the dielectric layer to generate a silicon-and-nitrogen containing layer; and
depositing a metal layer over and contacting the silicon-and-nitrogen containing layer, wherein covalence Si—N-metal bonds are formed to join the metal layer to the silicon-and-nitrogen containing layer.
19 . The method of claim 18 , wherein the treatment process is performed using a process gas comprising hydrogen and nitrogen, and wherein the dielectric layer is exposed directly to the process gas.
20 . The method of claim 18 further comprising, before the treatment process, soaking the dielectric layer in a silicon-containing process gas.