Semiconductor package and manufacturing method thereof
A semiconductor package includes a first die, a second die and a redistribution layer structure. The first die and the second die are disposed laterally. The redistribution layer structure is disposed over and electrically connected to the first die and the second die, wherein the redistribution layer structure includes a plurality of vias and a plurality of lines stacked alternately and electrically connected to each other and embedded by a plurality of polymer layers, and wherein from a top view, first vias of the plurality of vias overlapping with the first die or the second die have an elliptical-like shape.
1 . A semiconductor package, comprising:
a first die and a second die disposed laterally; and
a redistribution layer structure disposed over and electrically connected to the first die and the second die, wherein the redistribution layer structure comprises a plurality of vias and a plurality of lines stacked alternately and electrically connected to each other and embedded by a plurality of polymer layers, and wherein from a top view, first vias of the plurality of vias overlapping with the first die or the second die have an elliptical-like shape,
wherein the first vias are embedded by a first polymer layer of the plurality of polymer layers, and a top surface of the first polymer layer is substantially flushed with top surfaces of the first vias, and wherein at least one of the first vias includes an upper sidewall portion and a lower sidewall portion, the upper sidewall portion is separated from the first polymer layer, and the lower sidewall portion is in contact with the first polymer layer.
2 . The semiconductor package as claimed in claim 1 , wherein the first vias have a first length at a semi-major axis and a second length at a semi-minor axis, the first length is greater than the second length, and the semi-major axis of the first vias extends along a direction from the first die towards the second die.
3 . The semiconductor package of claim 2 , wherein the first die has a plurality of first die connectors electrically connected to the redistribution layer structure, and wherein from a top view, the first die connectors have a circle-like shape and have a first diameter.
4 . The semiconductor package as claimed in claim 3 , wherein the first length of the first vias is greater than the diameter of the first die connectors, and the second length of the first vias is smaller than the diameter of the first die connectors.
5 . The semiconductor package as claimed in claim 3 , wherein both of the first length and the second length of the first vias are no more than the diameter of the first die connectors.
6 . The semiconductor package as claimed in claim 1 , wherein the first vias are elongated towards an extending direction of the adjacent lines.
7 . The semiconductor package of claim 1 , wherein some of the first vias are arranged parallel to each other and located at substantially the same level.
8 . The semiconductor package of claim 1 , wherein some of the first vias are arranged parallel to each other and located at different levels.
9 . The semiconductor package as claimed in claim 1 , wherein the first vias are stacking vias electrically connected to an integrated device on the redistribution layer structure.
10 . The semiconductor package as claimed in claim 1 , wherein the first vias are staggered vias electrically connected to an integrated device on the redistribution layer structure.
11 . The semiconductor package as claimed in claim 1 , wherein from a top view, second vias of the plurality of vias non-overlapping with the first die or the second die have a circle-like shape.
12 . A semiconductor package, comprising:
a first die comprising a plurality of first die connectors and a first protection layer around the first die connectors;
a second die disposed aside the first die and comprising a plurality of second die connectors and a second protection layer around the second die connectors;
a dielectric encapsulation layer encapsulating the first die and the second die;
a plurality of first vias disposed over and in physical contact with the first die connectors of the first die and the second die connectors of the second die; and
a first polymer layer surrounding the first vias,
wherein the first vias are elongated vias and arranged parallel to each other, and
wherein a top surface of the first polymer layer is substantially flushed with top surfaces of the first vias, and wherein at least one of the first vias includes an upper sidewall portion and a lower sidewall portion, the upper sidewall portion is separated from the first polymer layer, and the lower sidewall portion is in contact with the first polymer layer.
13 . The semiconductor package as claimed in claim 12 , wherein the first vias have a first length at a semi-major axis and a second length at a semi-minor axis, the first length is greater than the second length, and the semi-major axis of the first vias extends along a direction from the first die towards the second die.
14 . The semiconductor package as claimed in claim 13 , wherein the first length of the first vias is greater than the diameter of the first die connectors, and the second length of the first vias is smaller than the diameter of the first die connectors.
15 . The semiconductor package as claimed in claim 13 , wherein both of the first length and the second length of the first vias are no more than the diameter of the first die connectors.
16 . The semiconductor package as claimed in claim 12 , wherein the first vias are in physical contact with the first protection layer of the first die.
17 . The semiconductor package as claimed in claim 12 , further comprising a plurality of second vias disposed over and in physical contact with the first vias, wherein a portion of at least one of the second vias extends into an opening between the upper sidewall portion of the at least one first via and the first polymer layer.
18 . The semiconductor package as claimed in claim 12 , further comprising a plurality of through dielectric vias penetrating through the dielectric encapsulation layer and aside the first die and the second die.
19 . The semiconductor package as claimed in claim 18 , further comprising a plurality of second vias disposed over and in physical contact with the through dielectric vias, wherein a diameter of the second vias is less than a diameter of the through dielectric vias.
20 . A method of forming a semiconductor package, comprising:
providing at least two dies on a carrier within a chip region and providing through dielectric vias on the carrier outside of the chip region;
forming a redistribution layer structure over and electrically connected to the dies and the through dielectric vias, wherein forming the redistribution layer structure comprises forming first vias within the chip region and forming second vias outside of the chip region, wherein from a top view, a shape of first vias different from a shape of the second vias, wherein the first vias are embedded by a first polymer layer of a plurality of polymer layers, and a top surface of the first polymer layer is substantially flushed with top surfaces of the first vias, and wherein at least one of the first vias includes an upper sidewall portion and a lower sidewall portion, the upper sidewall portion is separated from the first polymer layer, and the lower sidewall portion is in contact with the first polymer layer;
forming at least one device and bumps on the redistribution layer structure; and
removing the carrier.