IP Library Granted Patent US 7,843,042
Granted Patent B2
US 7,843,042 · App. 12/493,108 · Granted Nov 30, 2010

Wafer level integration package

Assignee: STATS ChipPAC, Ltd.
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Quick Facts
Patent No.
US 7,843,042
App. No.
12/493,108
Granted
Nov 30, 2010
Kind
B2
Abstract

A semiconductor package has a first conductive layer formed on a top surface of a substrate. A conductive via is formed between the first conductive layer and a bottom surface of the substrate. A semiconductor component is mounted to the substrate and electrically connected to the first electrical contact pad. The semiconductor component can be a flip chip semiconductor device, wire bond semiconductor device, or passive component. An encapsulant is deposited over the semiconductor component. The encapsulant extends into a channel formed on a side of the substrate from the top surface to the bottom surface of the substrate. An interconnect structure is formed over the bottom surface of the substrate. A heat spreader structure can be disposed over the semiconductor component. An EMI shield can be disposed over the semiconductor component. A plurality of semiconductor components can be stacked in a package-in-package arrangement.

Claims (54)

1. A semiconductor package, comprising:

a double-sided substrate having an active surface and second surface opposite the active surface;

a through-hole interconnect structure extending through the double-sided substrate from the active surface to the second surface;

a first conductive layer formed over the active surface and electrically connected to the through-hole interconnect structure;

a semiconductor die mounted to the active surface of the double-sided substrate and electrically connected to the first conductive layer;

an encapsulant deposited over the semiconductor die and double-sided substrate and further along a sidewall of the double-sided substrate extending from the active surface to the second surface;

a second conductive layer formed over the second surface and electrically connected to the through-hole interconnect structure; and

a dielectric layer formed over the second surface creating a land while surrounding and isolating the second conductive layer.

2. The semiconductor package of claim 1 , wherein the semiconductor die includes a flip chip semiconductor device, wire bond semiconductor device, or passive component.

3. The semiconductor package of claim 1 , further including a heat spreader structure disposed over the semiconductor die.

4. The semiconductor package of claim 1 , further including an electromagnetic interference shield disposed over the die.

5. The semiconductor package of claim 1 , further including a passive component mounted to the double-sided substrate and electrically connected to the first conductive layer.

6. The semiconductor package of claim 1 , further including a plurality of die stacked in a package-in-package arrangement.

7. The semiconductor package of claim 1 , wherein a surface of the semiconductor die is exposed from the encapsulant.

8. The semiconductor package of claim 1 , further including an underfill material disposed between the semiconductor die and the double-sided substrate to provide structural support.

9. A semiconductor package, comprising:

a double-sided substrate having an active surface and second surface opposite the active surface;

a conductive via formed from the active surface and extending through the double-sided substrate to the second surface;

a first conductive layer formed over the active surface and electrically connected to the conductive via;

a semiconductor component mounted to the active surface of the double-sided substrate and electrically connected to the first conductive layer and conductive via;

an encapsulant deposited over the semiconductor component, over the double-sided substrate, and in a channel formed along a side of the double-sided substrate;

a second conductive layer formed over the second surface and electrically connected to the conductive via; and

a dielectric layer formed over the second surface surrounding and isolating the second conductive layer.

10. The semiconductor package of claim 9 , wherein the semiconductor component includes a flip chip semiconductor device, wire bond semiconductor device, or passive component.

11. The semiconductor package of claim 9 , further including a heat spreader structure disposed over the semiconductor component.

12. The semiconductor package of claim 9 , further including an electromagnetic interference shield disposed over the semiconductor component.

13. The semiconductor package of claim 9 , further including a passive component mounted over the double-sided substrate and electrically connected to the first conductive layer.

14. The semiconductor package of claim 9 , further including a plurality of semiconductor components stacked in a package-in-package arrangement.

15. The semiconductor package of claim 9 , wherein a surface of the semiconductor component is exposed from the encapsulant.

16. A semiconductor package, comprising:

a substrate with a wafer-form factor having an active surface and second surface opposite the active surface;

a conductive via formed between the active surface and second surface;

a first conductive layer formed over the active surface and electrically connected to the conductive via;

a semiconductor component mounted over the substrate and electrically connected to the first conductive layer and the conductive via;

a channel extending from the active surface partially through the substrate;

an encapsulant deposited over the substrate, semiconductor component, and into the channel wherein:

the substrate is backgrinded to expose the encapsulant in the channel and the conductive via; and

an interconnect structure formed over the second surface.

17. The semiconductor package of claim 16 , wherein the interconnect structure includes:

a contact pad formed over the second surface and electrically connected to the conductive via; and

a dielectric layer formed over the second surface and around the contact pad.

18. The semiconductor package of claim 16 , further including a heat spreader structure disposed over the semiconductor component.

19. The semiconductor package of claim 16 , further including an electromagnetic interference shield disposed over the semiconductor component.

20. The semiconductor package of claim 16 , further including an underfill material disposed between the semiconductor component and substrate to provide structural support.

21. A semiconductor package, comprising:

a substrate;

a first conductive layer formed over a first surface of the substrate;

a conductive via formed between the first conductive layer and a second surface of the substrate;

a semiconductor component mounted to the substrate and electrically connected to the first conductive layer; and

an encapsulant deposited over the semiconductor component and covering a side of the substrate from the first surface to the second surface of the substrate.

22. The semiconductor package of claim 21 , further including an interconnect structure formed over the bottom surface of the substrate.

23. The semiconductor package of claim 21 , further including a heat spreader structure disposed over the semiconductor component.

24. The semiconductor package of claim 21 , further including an electromagnetic interference shield disposed over the semiconductor component.

25. The semiconductor package of claim 21 , further including a plurality of semiconductor components stacked in a package-in-package arrangement.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNEE'S NAME PREVIOUSLY RECORDED AT REEL: 038378 FRAME: 0309. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Sep 11, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 065236/0767 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 18, 2019
From: STATS CHIPPAC PTE. LTD.
To: JCET SEMICONDUCTOR (SHAOXING) CO., LTD.
Reel/Frame 051365/0680 →
RELEASE OF SECURITY INTEREST Recorded Dec 13, 2019
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 051285/0318 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0309 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0343 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
Continuity (2)
Division 1176593000 · Jun 20, 2007
Related Publication 20090261460A1 · Oct 22, 2009