IP Library › Granted Patent US 8,994,196
Granted Patent Utility
US 8,994,196 · Confirmation No. 3015

System and Method for Directional Grinding on Backside of a Semiconductor Wafer

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Quick Facts
Patent No.
US 8,994,196
App. No.
13/005,666
Filed
2011-01-13
Granted
2015-03-31
Pub. No.
US20110101546A1
Art Unit
2811
PTA
-2 days