Semiconductor device and method of forming interposer frame electrically connected to embedded semiconductor die
A semiconductor device has an interposer frame mounted over a carrier. A semiconductor die has an active surface and bumps formed over the active surface. The semiconductor die can be mounted within a die opening of the interposer frame or over the interposer frame. Stacked semiconductor die can also be mounted within the die opening of the interposer frame or over the interposer frame. Bond wires or bumps are formed between the semiconductor die and interposer frame. An encapsulant is deposited over the interposer frame and semiconductor die. An interconnect structure is formed over the encapsulant and bumps of the first semiconductor die. An electronic component, such as a discrete passive device, semiconductor die, or stacked semiconductor die, is mounted over the semiconductor die and interposer frame. The electronic component has an I/O count less than an I/O count of the semiconductor die.
1. A method of making a semiconductor device, comprising:
providing an interposer substrate;
providing a first semiconductor die;
forming a bump over a surface of the first semiconductor die;
disposing the first semiconductor die within an opening in the interposer substrate;
forming a bond wire between the first semiconductor die and interposer substrate including a loop height of the bond wire less than a height of the bump; and
depositing an encapsulant over the interposer substrate, first semiconductor die, and bump including a height of the encapsulant from the surface of the first semiconductor die greater than the loop height of the bond wire and less than or equal to the height of the bump.
2. The method of claim 1 , further including forming an interconnect structure over the encapsulant.
3. The method of claim 1 , further including disposing a second semiconductor die over the first semiconductor die.
4. The method of claim 1 , further including disposing an electronic component over the first semiconductor die.
5. A method of making a semiconductor device, comprising:
providing an interposer;
disposing a first semiconductor die adjacent to the interposer;
forming a bond wire between the first semiconductor die and interposer;
forming a bump over the first semiconductor die including a height of the bump greater than a loop height of the bond wire; and
depositing an encapsulant over the interposer and first semiconductor die.
6. The method of claim 5 , further including disposing the first semiconductor die within an opening in the interposer.
7. The method of claim 5 , further including disposing the first semiconductor die over the interposer.
8. The method of claim 5 , further including forming an interconnect structure over the encapsulant.
9. The method of claim 5 , further including disposing a second semiconductor die over the first semiconductor die.
10. The method of claim 5 , further including disposing an electronic component over the first semiconductor die.
11. The method of claim 5 , wherein the interposer includes a leadframe.
12. A semiconductor device, comprising:
an interposer;
a first semiconductor die disposed adjacent to the interposer;
a bump formed over a surface of the first semiconductor die;
a bond wire formed between the first semiconductor die and interposer; and
an encapsulant deposited over the interposer, first semiconductor die, bump, and bond wire including a height of the encapsulant from the surface of the first semiconductor die less than or equal to a height of the bump.
13. The semiconductor device of claim 12 , wherein the first semiconductor die is disposed within an opening in the interposer.
14. The semiconductor device of claim 12 , wherein the first semiconductor die is disposed over the interposer.
15. The semiconductor device of claim 12 , further including a second interconnect structure formed over the encapsulant.
16. The semiconductor device of claim 12 , further including a second semiconductor die disposed over the first semiconductor die.
17. A semiconductor device, comprising:
an interposer;
a first semiconductor die disposed adjacent to the interposer;
a first interconnect structure formed over the first semiconductor die;
a second interconnect structure formed between the first semiconductor die and interposer, including a height less than a height of the first interconnect structure; and
an encapsulant deposited over the interposer, first semiconductor die, first interconnect structure, and second interconnect structure.
18. The semiconductor device of claim 17 , wherein the first semiconductor die is disposed within an opening in the interposer.
19. The semiconductor device of claim 17 , wherein the first semiconductor die is disposed over the interposer.
20. The semiconductor device of claim 17 , further including a second semiconductor die disposed over the first semiconductor die.
21. The semiconductor device of claim 17 , further including a third interconnect structure formed over the encapsulant.