Semiconductor device and method of forming insulating layer around semiconductor die
View Patent ↗A plurality of semiconductor die is mounted to a temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. A portion of the encapsulant is designated as a saw street between the die, and a portion of the encapsulant is designated as a substrate edge around a perimeter of the encapsulant. The carrier is removed. A first insulating layer is formed over the die, saw street, and substrate edge. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first conductive layer and first insulating layer. The encapsulant is singulated through the first insulating layer and saw street to separate the semiconductor die. A channel or net pattern can be formed in the first insulating layer on opposing sides of the saw street, or the first insulating layer covers the entire saw street and molding area around the semiconductor die.
1. A semiconductor device, comprising:
a plurality of semiconductor die;
a first insulating layer formed over the semiconductor die;
an encapsulant deposited around the semiconductor die;
a second insulating layer formed over the first insulating layer, encapsulant, and semiconductor die and directly over a saw street between the semiconductor die, wherein the second insulating layer includes a pattern comprising at least three portions of a material of the second insulating layer;
a conductive layer formed over the second insulating layer; and
a third insulating layer formed over the second insulating layer and conductive layer.
2. The semiconductor device of claim 1 , wherein the pattern includes a channel in the second insulating layer around the semiconductor die.
3. The semiconductor device of claim 1 , wherein the pattern includes a net pattern in the second insulating layer around the semiconductor die.
4. The semiconductor device of claim 1 , wherein the pattern includes a double channel in the second insulating layer around the semiconductor die.
5. The semiconductor device of claim 1 , further including an interconnect structure formed over the third insulating layer and electrically connected to the conductive layer.
6. The semiconductor device of claim 1 , wherein the plurality of semiconductor die is singulated through the second insulating layer and encapsulant.
7. A semiconductor device, comprising:
a semiconductor die;
an encapsulant deposited around the semiconductor die;
a first insulating layer formed over the encapsulant and over a singulation area of the semiconductor device including a pattern formed in the first insulating layer between the singulation area and the semiconductor die;
a conductive layer formed over the first insulating layer; and
a second insulating layer formed over the first insulating layer and conductive layer.
8. The semiconductor device of claim 7 , further including a third insulating layer formed over the semiconductor die.
9. The semiconductor device of claim 7 , wherein the pattern includes a channel.
10. The semiconductor device of claim 7 , wherein the pattern includes a net pattern.
11. A semiconductor device, comprising:
a semiconductor die;
a first insulating layer formed over the semiconductor die;
an encapsulant deposited around the semiconductor die;
a second insulating layer formed over the first insulating layer, the encapsulant, and over a singulation area of the semiconductor device;
a pattern formed in the second insulating layer directly over the singulation area, wherein the pattern includes at least three portions of the second insulating layer; and
an interconnect structure formed over the second insulating layer.
12. The semiconductor device of claim 11 , wherein the interconnect structure includes:
a conductive layer formed over the second insulating layer; and
a third insulating layer formed over the second insulating layer and conductive layer.
13. The semiconductor device of claim 11 , wherein the pattern includes a channel.
14. The semiconductor device of claim 11 , wherein the pattern includes a net pattern.
15. A semiconductor device, comprising:
a semiconductor die;
an encapsulant deposited around the semiconductor die;
a first insulating layer formed over the encapsulant and semiconductor die extending beyond an active area of the semiconductor die including a pattern formed in the first insulating layer beyond the active area between a singulation area and the semiconductor die, wherein the pattern includes at least three portions of the first insulating layer; and
an interconnect structure formed over the first insulating layer.
16. The semiconductor device of claim 15 , wherein the interconnect structure includes:
a conductive layer formed over the first insulating layer; and
a second insulating layer formed over the first insulating layer and conductive layer.
17. The semiconductor device of claim 15 , further including a second insulating layer formed over the semiconductor die.
18. The semiconductor device of claim 15 , wherein the pattern includes a channel.
19. The semiconductor device of claim 15 , wherein the pattern includes a net pattern.
20. A semiconductor device, comprising:
a semiconductor die;
an encapsulant deposited around the semiconductor die; and
an insulating layer formed over the encapsulant and over a singulation area of the semiconductor device including a pattern formed in the insulating layer directly over the singulation area, wherein the pattern includes at least three portions of the insulating layer.
21. The semiconductor device of claim 20 , wherein the pattern includes a rectangular waveform pattern.
22. The semiconductor device of claim 20 , wherein the insulating layer covers a substrate edge of the semiconductor device.
23. The semiconductor device of claim 20 , further including:
a conductive layer formed over the insulating layer;
a second insulating layer formed over the conductive layer; and
an interconnect structure formed over the conductive layer.
24. The semiconductor device of claim 7 , wherein the pattern includes a rectangular waveform pattern.
25. The semiconductor device of claim 15 , wherein the pattern includes a rectangular waveform pattern.
26. The semiconductor device of claim 1 , wherein the pattern includes a rectangular waveform pattern.
27. The semiconductor device of claim 7 , wherein the pattern includes a double channel in the first insulating layer.
28. The semiconductor device of claim 11 , wherein the pattern includes a double channel in the second insulating layer.
29. The semiconductor device of claim 15 , wherein the pattern includes a double channel in the first insulating layer.
30. The semiconductor device of claim 20 , wherein the pattern includes a double channel in the insulating layer.