Granted Patent
Utility
US 10,358,579
· Confirmation No. 3009
CMP COMPOSITIONS AND METHODS FOR POLISHING NICKEL PHOSPHOROUS SURFACES
Applicant:
Cabot Microelectronics Corporation
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Code | Description | Pages | ||
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| 2019-07-02 | ISSUE.NTF |
Issue Notification | 1 | View | |
| 2019-06-11 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2019-06-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-06-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-03-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 8 | View | |
| 2019-03-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 3 | View | |
| 2019-03-28 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2019-03-28 | FWCLM |
Index of Claims | 1 | View | |
| 2019-03-28 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2019-01-10 | APDR |
Patent Board Decision - Examiner Reversed | 12 | View | |
| 2017-12-01 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2017-11-22 | APRB |
Reply Brief Filed | 5 | View | |
| 2017-11-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-11-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-09-22 | APEA |
Examiner's Answer to Appeal Brief | 14 | View | |
| 2017-05-31 | AP.B |
Appeal Brief Filed | 10 | View | |
| 2017-05-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-03-31 | N/AP |
Notice of Appeal Filed | 2 | View | |
| 2017-03-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-03-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-03-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2017-03-02 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2017-03-02 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2017-01-30 | A.NE |
Response After Final Action | 1 | View | |
| 2017-01-30 | CLM |
Claims | 2 | View | |
| 2017-01-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2017-01-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2017-01-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-12-01 | CTFR |
Final Rejection | 14 | View | |
| 2016-12-01 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2016-12-01 | FWCLM |
Index of Claims | 1 | View | |
| 2016-12-01 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2016-08-15 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2016-08-15 | CLM |
Claims | 2 | View | |
| 2016-08-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2016-08-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-08-15 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-05-19 | CTNF |
Non-Final Rejection | 11 | View | |
| 2016-05-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-05-19 | SRNT |
Examiner's search strategy and results | 5 | View | |
| 2016-05-19 | FWCLM |
Index of Claims | 1 | View | |
| 2016-05-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-05-03 | RCEX |
Request for Continued Examination (RCE) | 3 | View | |
| 2016-05-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-05-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-05-03 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2016-05-03 | CLM |
Claims | 2 | View | |
| 2016-05-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2016-05-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-04-07 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2016-04-07 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2016-03-30 | A.NE |
Response After Final Action | 1 | View | |
| 2016-03-30 | CLM |
Claims | 2 | View | |
| 2016-03-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2016-03-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2016-03-30 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2016-02-08 | CTFR |
Final Rejection | 11 | View | |
| 2016-02-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2016-02-08 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2016-02-08 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2016-02-08 | FWCLM |
Index of Claims | 1 | View | |
| 2015-11-03 | A.NE |
Response After Final Action | 1 | View | |
| 2015-11-03 | CLM |
Claims | 2 | View | |
| 2015-11-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2015-11-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-11-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-09-03 | CTNF |
Non-Final Rejection | 15 | View | |
| 2015-09-03 | 892 |
List of references cited by examiner | 1 | View | |
| 2015-09-03 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2015-09-03 | FWCLM |
Index of Claims | 1 | View | |
| 2015-09-03 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2015-06-04 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2015-05-20 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2015-05-20 | CLM |
Claims | 3 | View | |
| 2015-05-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2015-05-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2015-02-26 | CTNF |
Non-Final Rejection | 14 | View | |
| 2015-02-26 | 892 |
List of references cited by examiner | 1 | View | |
| 2015-02-26 | FWCLM |
Index of Claims | 1 | View | |
| 2015-02-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2015-02-26 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2015-02-26 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2015-02-26 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2015-02-26 | FOR |
Foreign Reference | 12 | View | |
| 2014-02-17 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2014-02-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-02-17 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2013-12-24 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2013-12-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2013-12-24 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-12-03 | TRNA |
Transmittal of New Application | 2 | View | |
| 2013-12-03 | ADS |
Application Data Sheet | 4 | View | |
| 2013-12-03 | SPEC |
Specification | 14 | View | |
| 2013-12-03 | CLM |
Claims | 2 | View | |
| 2013-12-03 | ABST |
Abstract | 1 | View | |
| 2013-12-03 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | OATH |
Oath or Declaration filed | 1 | View | |
| 2013-12-03 | PA.. |
Power of Attorney | 1 | View | |
| 2013-12-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Ke Zhang
Singapore, SINGAPORE
Michael White
Ridgefield, CT
Tsung-Ho Lee
Tainan City, TAIWAN
Steven Grumbine
Aurora, IL
Hon-Wu Lau
Singapore, SINGAPORE
Attorneys & Agents of Record
Classification
USPC
216/53
C09G1/02
C09G1/18
C23F3/06
H01L21/304
H01L21/30625
H01L21/32115
H01L21/3212
Prosecution
- Examiner
- DUCLAIR, STEPHANIE P.
- Art Unit
- 1713
- Customer No.
- 29050
- Docket No.
- 100563
- Confirmation No.
- 3009
Publication
- Pub. No.
- US20150152289A1
- Pub. Date
- 2015-06-04
Patent Term Adjustment
-30days
from
CMC MATERIALS, INC.,
ENTEGRIS GP, INC.,
ENTEGRIS, INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
POCO GRAPHITE, INC.,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY INTEREST
Recorded 2022-07-08
SECURITY INTEREST
Recorded 2022-07-08
CABOT MICROELECTRONICS CORPORATION,
QED TECHNOLOGIES INTERNATIONAL, INC.,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
KMG-BERNUTH, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
SEALWELD (USA), INC.,
INTERNATIONAL TEST SOLUTIONS, LLC,
CMC MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2022-07-06
from
CABOT MICROELECTRONICS CORPORATION,
FLOWCHEM LLC,
KMG ELECTRONIC CHEMICALS, INC.,
MPOWER SPECIALTY CHEMICALS LLC,
QED TECHNOLOGIES INTERNATIONAL, INC.
SECURITY AGREEMENT
Recorded 2018-11-16
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-09-13
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Quick Facts
- Patent No.
- US 10,358,579
- App. No.
- 14/094,921
- Filed
- 2013-12-03
- Granted
- 2019-07-23
- Pub. No.
- US20150152289A1
- Examiner
- DUCLAIR, STEPHANIE P.
- Art Unit
- 1713
- PTA
- -30 days
External Links