Semiconductor device and method of forming bump structure with insulating buffer layer to reduce stress on semiconductor wafer
A semiconductor wafer has a plurality of semiconductor die with contact pads for electrical interconnect. An insulating layer is formed over the semiconductor wafer. A bump structure is formed over the contact pads. The bump structure has a buffer layer formed over the insulating layer and contact pad. A portion of the buffer layer is removed to expose the contact pad and an outer portion of the insulating layer. A UBM layer is formed over the buffer layer and contact pad. The UBM layer follows a contour of the buffer layer and contact pad. A ring-shaped conductive pillar is formed over the UBM layer using a patterned photoresist layer filled with electrically conductive material. A conductive barrier layer is formed over the ring-shaped conductive pillar. A bump is formed over the conductive barrier layer. The buffer layer reduces thermal and mechanical stress on the bump and contact pad.
1. A method of making a semiconductor device, comprising:
providing a semiconductor wafer including a contact pad;
forming a buffer layer over the semiconductor wafer by,
depositing an insulating layer over the semiconductor wafer,
removing a first portion of the insulating layer to form an opening over the contact pad, and
removing a second portion of the insulating layer completely surrounding the contact pad;
forming a ring-shaped conductive pillar over the buffer layer; and
forming a bump within the ring-shaped conductive pillar and extending into the opening of the insulating layer by,
forming a photoresist layer over the ring-shaped conductive pillar,
removing a portion of the photoresist layer within the ring-shaped conductive pillar, and
depositing a bump material within the ring-shaped conductive pillar.
2. The method of claim 1 , further including forming a conductive layer over the buffer layer and contact pad prior to forming the ring-shaped conductive pillar.
3. The method of claim 1 , further including forming a conductive layer over the ring-shaped conductive pillar prior to forming the bump.
4. The method of claim 1 , wherein forming the ring-shaped conductive pillar includes:
forming a photoresist layer over the semiconductor wafer;
removing a portion of the photoresist layer to form a ring-shaped opening over the buffer layer;
depositing an electrically conductive material in the ring-shaped opening; and
removing the photoresist layer leaving the ring-shaped conductive pillar.
5. The method of claim 1 , further including:
providing a substrate;
singulating the semiconductor wafer into a plurality of semiconductor components each including the ring-shaped conductive pillar and bump; and
disposing one of the semiconductor components over the substrate.