IP Library › Granted Patent US 6,774,046
Granted Patent Utility Small
US 6,774,046 · Confirmation No. 8818

METHOD FOR MINIMIZING THE CRITICAL DIMENSION GROWTH OF A FEATURE ON A SEMICONDUCTOR WAFER

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2011-11-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-11-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-11-05 PA.. Power of Attorney 2 View
2011-11-05 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2011-11-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-08-04 PEFN Pre-Exam Formalities Notice 1 View
2011-08-04 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2011-07-29 PA.. Power of Attorney 2 View
2011-07-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-02-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-02-08 RFN.REQ Refund Request 4 View
2004-06-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-04-05 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-05 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-04-05 EXIN Examiner Interview Summary Record (PTOL - 413) 1 View
2004-04-05 1449 List of References cited by applicant and considered by examiner 2 View
2004-04-05 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-05 SRFW Search information including classification, databases and other search related notes 2 View
2004-02-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-02-03 CLM Claims 5 View
2004-02-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-12-29 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2003-12-04 A.I. Informal or Non-Responsive Amendment 1 View
2003-12-04 CLM.NE Claim-Amendment Not Entered 4 View
2003-12-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-12-04 LET. Miscellaneous Incoming Letter 2 View
2003-12-04 XT/ Extension of Time 1 View
2003-08-28 CTNF Non-Final Rejection 11 View
2003-08-28 892 List of references cited by examiner 1 View
2003-08-28 1449 List of References cited by applicant and considered by examiner 2 View
2003-06-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-06-30 FOR Foreign Reference 5 View
2002-03-06 C.AD Change of Address 1 View
2001-06-13 TRNA Transmittal of New Application 4 View
2001-06-13 A.PE Preliminary Amendment 12 View
2001-06-13 SPEC Specification 10 View
2001-06-13 CLM Claims 7 View
2001-06-13 ABST Abstract 1 View
2001-06-13 DRW Drawings-only black and white line drawings 8 View
2001-06-13 OATH Oath or Declaration filed 3 View
2001-06-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-06-13 SRFW Search information including classification, databases and other search related notes 1 View
2001-06-13 FWCLM Index of Claims 1 View
2001-06-13 A.PE Preliminary Amendment 4 View
2001-06-13 DRW Drawings-only black and white line drawings 8 View
2001-06-13 SPEC Specification 10 View
2001-06-13 CLM Claims 7 View
2001-06-13 ABST Abstract 1 View
2001-06-13 OATH Oath or Declaration filed 3 View
2001-06-13 WFEE Fee Worksheet (SB06) 1 View
2001-06-13 WFEE Fee Worksheet (SB06) 1 View
2001-06-13 WCLM Claims Worksheet (PTO-2022) 1 View
2001-06-13 A.PE Preliminary Amendment 1 View
2001-06-13 CLM Claims 4 View
2001-06-13 REM Applicant Arguments/Remarks Made in an Amendment 1 View
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Quick Facts
Patent No.
US 6,774,046
App. No.
09/880,584
Filed
2001-06-13
Granted
2004-08-10
Pub. No.
US20010031561A1
Art Unit
1763
PTA
-67 days