WAFER CLEANING METHOD

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⬇ PDF	Date ▼	Code	Description	Pages	PDF
	2001-09-13	TRNA	Transmittal of New Application	3	View
	2001-09-13	SPEC	Specification	18	View
	2001-09-13	CLM	Claims	4	View
	2001-09-13	ABST	Abstract	1	View
	2001-09-13	DRW	Drawings-only black and white line drawings	11	View
	2001-09-13	OATH	Oath or Declaration filed	2	View

Parent is a Continuation of

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App. 09/643,328 · US 6,295,999

Filed 2000-08-22 · Patented Case

Parent is a Continuation of

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App. 09/057,182 · US 6,140,744

Filed 1998-04-08 · Patented Case

Parent is a Continuation in-part of

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App. 08/724,518 · US 6,039,059

Filed 1996-09-30 · Patented Case

Child is a Continuation of

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App. 11/839,885 · US 7,518,288

Filed 2007-08-16 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 12/399,185

Filed 2009-03-06 · Abandoned -- Failure to Respond to an Office Action

Child is a Continuation of

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App. 10/243,463 · US 6,681,782

Filed 2002-09-12 · Patented Case

Child is a Continuation of

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App. 11/375,907 · US 7,268,469

Filed 2006-03-15 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 10/726,774 · US 7,117,876

Filed 2003-12-03 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 13/603,082 · US 8,771,427

Filed 2012-09-04 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 11/386,634 · US 7,211,932

Filed 2006-03-22 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 13/270,849 · US 8,257,505

Filed 2011-10-11 · Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child is a Continuation of

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App. 10/243,486 · US 6,684,891

Filed 2002-09-12 · Patented Case